Sigma Computer Monitor SQM 160 User Manual

SQM-160  
Rate/Thickness Monitor  
User’s Guide  
Version 2.0  
© Copyright Sigma Instruments, Inc. 2000  
Sigma  
instruments  
S
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Warranty Information  
This Sigma Instruments product is warranted against defects in material and  
workmanship for a period of 1 year from the date of shipment, when used in accordance  
with the instructions in this manual. During the warranty period, Sigma Instruments will,  
at its option, either repair or replace products that prove to be defective.  
Limitation of Warranty  
Defects from, or repairs necessitated by, misuse or alteration of the product, or any  
cause other than defective materials or workmanship are not covered by this warranty.  
NO OTHER WARRANTIES ARE EXPRESSED OR IMPLIED, INCLUDING BUT NOT  
LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS  
FOR A PARTICULAR PURPOSE. UNDER NO CIRCUMSTANCES SHALL SIGMA  
INSTRUMENTS BE LIABLE FOR CONSEQUENTIAL OR OTHER DAMAGES  
RESULTING FROM A BREACH OF THIS LIMITED WARRANTY, OR OTHERWISE.  
Return Policy  
The purchaser may return this product in like new condition within 30 days after  
shipment for any reason. In case of return, purchaser is liable and responsible for all  
freight charges in both directions.  
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Table of Contents  
Chapter 1  
Quick Start  
1.0 Introduction ..................................................................................................................1-1  
1.1 Installation.....................................................................................................................1-4  
1.2 Front Panel...................................................................................................................1-1  
1.3 Rear Panel....................................................................................................................1-2  
1.4 System Connections ...................................................................................................1-3  
1.5 Film Setup.....................................................................................................................1-5  
1.6 Depositing a Film.........................................................................................................1-6  
Chapter 2  
Operation  
2.0 Introduction...................................................................................................................2-1  
2.1 Menu Selection............................................................................................................2-1  
2.2 Film Parameters Setup...............................................................................................2-2  
2.3 System Parameters Setup.........................................................................................2-4  
2.4 Sensor Selection.........................................................................................................2-7  
2.5 Sensor Min/Max Frequency.......................................................................................2-8  
2.6 Sensor Tooling .............................................................................................................2-9  
2.7 Rate/Thickness or Frequency Display......................................................................2-10  
2.8 Crystal Life Display......................................................................................................2-10  
2.9 Zero Thickness.............................................................................................................2-11  
2.10 Shutter Operation......................................................................................................  
2.11 Simulate Mode...........................................................................................................  
Chapter 3  
Options  
3.0 Introduction...................................................................................................................  
3.1 Option Card Installation..............................................................................................  
3.2 Four Sensor Card........................................................................................................  
3.3 Analog Output Card.....................................................................................................  
Chapter 4  
MonComm Software  
4.0 Introduction...................................................................................................................4-1  
4.1 Installation.....................................................................................................................4-1  
4.2 Run MonComm............................................................................................................4-1  
4.3 Add and Delete Films..................................................................................................4-2  
4.4 Download Films............................................................................................................4-3  
4.5 Graph Data ...................................................................................................................4-4  
4.6 Save Data .....................................................................................................................4-5  
4.7 Edit System Parameters.............................................................................................4-6  
4.8 Load Defaults ...............................................................................................................4-6  
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Chapter 5  
Maintenance  
5.0 Introduction...................................................................................................................5-1  
5.1 Fuse Replacement......................................................................................................5-1  
Appendix  
A. Material Parameters  
B. Specifications  
C. I/O Connections  
D. Declaration of Conformity  
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Chapter 1  
Quick Start  
1.0 Introduction  
Congratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor.  
The SQM-160 is an easy-to-use instrument for measuring many types of thin film  
coatings. This chapter will help to get you up and running quickly. Please review the  
entire manual for detailed operational, programming, and safety information.  
1.1 Installation  
Refer to Sections 1.3 and 1.4 for detailed system hookup information.  
Rack  
Installation  
The SQM-160 occupies a 3.5” high, half-rack space. An  
optional kit (900-008) is available to adapt to a full rack. Install  
the unit in a 19” rack with the supplied hardware.  
Power  
Connection  
WARNING: The SQM-160 is shipped with a ½ A Fuse for use  
with 90–120 VAC. If your line voltage is 180–240 VAC, replace  
the fuse with the ¼A fuse included with your SQM-160.  
WARNING: Verify that the Voltage Selector Switch located next  
to the power switch matches your line voltage.  
Plug the SQM-160 into your power source with the included  
power cord.  
Sensor  
Connections  
Connect the BNC cables and oscillator from your vacuum  
chamber feedthrough to the desired SQM-160 Sensor Input(s).  
Digital I/O  
Connections  
Refer to Appendix C for details on wiring digital I/O to the  
SQM-160 Relay I/O connector.  
Computer  
Connection  
If you would like to use the supplied Windows software to  
collect data or program the SQM-160, attach a 9 pin straight-  
thru cable from the SQM-160 RS-232 connector to your  
computer’s serial port.  
Option  
Connections  
If you purchased the Analog Output Option (502-021), connect  
a BNC cable form the Rate or Thickness connector to your  
chart recorder.  
Move the rear panel power switch to the On (|) position. The SQM-160 will briefly  
display its software version, then go to normal operating mode.  
1-1  
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Chapter 1  
Quick Start  
1.2 Front Panel  
Display1 Display2  
Crystal Status LEDs  
Control Knob  
Rate A/s  
Thickness kA  
1
3
5
2
4
6
Zero  
Crystal Status  
Open  
Time SP  
Time  
Closed  
Thk SP  
Next  
Prev  
Clear  
Program  
Xtal Life  
Shutter  
Final Thk  
Control  
Configuration  
S
Setpoint LEDs  
Configuration Section  
Control Section  
Front Panel Controls  
Display 1  
Display 2  
Displays rate and thickness in normal operation.  
Displays setup parameter name in program mode.  
Displays deposition time in normal operation.  
Displays setup parameter value in program mode.  
Control  
Section  
Zero thickness reading. Toggle Display 1 between Crystal Life  
and Rate/Thickness readings. Toggle shutter relay on/off.  
Configuration  
Section  
Program enters setup mode. Next/Prev moves thru menus.  
Clear cancels change and returns value to its original setting.  
Setpoint LEDs  
Illuminate when the indicated setpoint is reached.  
Crystal Status  
LEDs  
Illuminate when a crystal is active and operating.  
Flashes when an active crystal fails.  
Control Knob  
Used to adjust values or scroll though menu selections.  
Pushing the control knob stores the current setting.  
1-2  
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Chapter 1  
Quick Start  
1.3 Rear Panel  
Ground  
Option A Card  
Option B Card  
0
1
Rate  
Thick  
3
4
5
6
Sensor 1 Sensor 2  
RS-232  
Relay I/O  
Line Fuse  
Fuse 1/2 A SB at 120VAC  
Fuse 1/4 A SB at 240VAC  
Model No. SQM-160  
Ser No. 80901  
Rear Panel Connections  
Sensor 1 & 2  
Connection to quartz crystal sensor remote oscillator. See  
Section 1.4 for detailed hookup.  
RS-232  
Connection to computer serial port for programming and data  
acquisition.  
Relay I/O  
Connects 4 relays and 4 digital inputs to external equipment for  
process control. See Appendix C for connections.  
Option A Card  
Option B Card  
Provides an additional four sensor measurement channels.  
Provides two 0-5V analog outputs for rate and thickness  
readings.  
Ground Terminal  
Measurement ground terminal.  
Voltage Selector  
Line Fuse  
WARNING: Select 115V for 90-120VAC, 230V for 180-240VAC.  
WARNING: Replace line fuse only with a fuse of the specified  
type and rating.  
Power Connector  
WARNING: Use removable power cords only of the specified  
type and rating.  
1-3  
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Chapter 1  
Quick Start  
1.4 System Connections  
The diagram and table below identifies typical vacuum system components and their  
function.  
Sensor  
Ground Wire  
O p t i o n  
A
C a r d  
O p t i o n  
B
C a r d  
Ground  
0
1
In-Vac  
Cable  
Sensor  
1
Sensor  
2
RS-232  
Relay I/O  
Line Fuse  
Source  
Shutter  
Fuse 1/2  
Fuse 1/4  
A
A
SB at 120VAC  
SB at 240VAC  
Manufactured By  
Model No. SQM-160  
Ser No. 80901  
Sigma  
S
instruments  
Feedthrough  
6" BNC Cable  
Oscillator  
10' BNC Cable  
System Components  
Sensor  
Holds the quartz crystal used to measure rate and thickness.  
Crystals must be replaced occasionally.  
In-Vac Cable  
Feedthrough  
6” BNC Cable  
Oscillator  
A coax cable, typically 30” long, that connects the sensor to the  
feedthrough.  
Provides isolation between vacuum and atmosphere for  
electrical and cooling lines.  
Provides a flexible connection from the feedthrough to the  
oscillator. Keep this cable as short as possible.  
Contains the electronics to operate the quartz crystal. Total  
cable length to the crystal should be under 40”.  
10’ BNC Cable  
Ground Wire  
Connects the oscillator to the SQM-160. Lengths up to 100’  
are acceptable.  
A wire, typically braided, that connects the vacuum system to  
the SQM160 ground terminal.  
1-4  
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Chapter 1  
Quick Start  
1.5 Film Setup  
This section will help you setup the SQM-160 to measure a film. Refer to Chapter 2 for  
detailed film programming instructions.  
Note: User actions with front panel controls are indicated by a Box. Results shown on  
displays, are indicated by a Dashed Box.  
Enter Program  
Mode  
If the Crystal Life display is shown, press Xtal Life to return to  
Rate/Thickness mode. Press Program to enter the film setup  
menu. Pressing the program switch while in program mode  
returns the SQM-160 to normal mode.  
Select a Film  
Turn the Control Knob to select one of the nine possible films,  
then press the Control Knob to enter the film parameters  
menu.  
Set Film  
Parameters  
Turn the Control Knob to set the first film parameter (density).  
The parameter value is shown in Display 2. Press the Control  
Knob to save the value and move to the next film parameter. If  
you press Clear, the film parameter returns to its original value.  
Continue to set each parameter. When the last film parameter  
is entered, the SQM-160 returns to normal mode. See Chapter  
2 for detailed instructions on setting Film Parameters.  
Set System  
Parameters  
To Enter the system menu, press Program, then Prev. Set  
system parameters by turning, then pushing, the Control Knob  
as described above. See Chapter 2 for detailed instructions on  
setting System Parameters.  
If the sensor(s) you selected during film setup are connected to the SQM-160, the  
Crystal Status LEDs should be lit. If not, return to the Film Parameters menu and set  
the Sensor Average parameter to the desired sensor(s).  
If the Crystal Status LED is flashing, it is most likely that sensor is not properly  
connected. Sigma supplies a small test crystal with each oscillator module that can be  
used to test sensor connections external to the vacuum chamber. Referring to Section  
1.4, disconnect the oscillator from its 6” BNC cable. Attach the test crystal to the  
oscillator’s feedthrough connector. The Crystal Status LED will remain lit if the external  
sensor connections are correct.  
Refer to the Sensor Selection, Frequency Display and Sensor Min/Max sections of  
Chapter 2 for information that can assist in troubleshooting sensor problems.  
1-5  
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Chapter 1  
Quick Start  
1.6 Depositing a Film  
If you have followed this Quick Start chapter, you are ready to deposit a film. Follow the  
procedure below to begin deposition.  
Verify Sensor  
Operation  
Verify that the Crystal Status LED for the measuring sensor is  
lit, and not flashing.  
Display  
Rate/Thickness  
Display 1 should be displaying Rate on the left and Thickness  
on the right. If the Crystal Life display mode is active, press  
the Xtal Life switch to return to Rate/Thickness mode. If the  
Program Mode is active, press Program to return to normal  
mode.  
Zero  
If needed, press the Zero switch to zero the thickness reading.  
Thickness  
Start  
Deposition  
Apply power to your source evaporation supply. If the SQM-  
160 shutter relay is connected, press the Shutter switch to  
begin deposition.  
The Rate and Thickness displays should begin to move from zero. Please take time to  
review the remainder of this manual for detailed operational, programming, and safety  
information.  
If the displays remain at zero, check your system setup to assure that you are actually  
evaporating. Also check that the deposited material is reaching the sensor.  
If the display is erratic or noisy, first check your sensor connections. Refer to the  
Timebase, Rate Filter and Rate Resolution sections of Chapter 2 for information that  
can help in troubleshooting noisy reading problems.  
If the rate and thickness readings do not match your expectations, refer to the Film  
Parameter (Density, Z-Factor, Tooling) and Sensor Tooling sections of Chapter 2.  
1-6  
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Chapter 2  
Operation  
2.0 Introduction  
This section details the operation of the SQM-160 menus and front panel controls. It is  
arranged by common user tasks.  
Note: User actions with front panel controls are indicated by a Box. Results shown on  
displays, are indicated by a Dashed Box.  
2.1 Menu Selection  
Two menus provide control of the SQM-160 programming. The Film Parameters Menu  
allows you to customize each of the nine stored films. The System Parameters Menu  
sets values that remain constant for all films.  
Note: If Crystal Life is shown on the SQM-160 displays, press the Xtal Life switch to  
return the displays to rate/thickness or frequency display.  
The Configuration Section of the SQM-160 front panel contains four switches used to  
access the program menus. Within the program menus, the Control Knob is also used  
to adjust values and select menu choices. In program mode, Display 1 shows the  
parameter to be changed. Display 2 shows the selected parameter’s value.  
To enter the Film Parameters Menu, press the Program switch. The SQM-160 displays  
the currently active film. Turn the control knob to select a different film, then press Next  
to display the first parameter for the selected film.  
To enter the System Parameters Menu, press the Program switch. Then press Prev to  
display the first system parameter.  
Rate A/s  
Thickness kA  
1
2
4
6
3
5
Zero  
Crystal Status  
Open  
Time SP  
Thk SP  
Final Thk  
Time  
Closed  
Next  
Prev  
Clear  
Program  
Xtal Life  
Shutter  
Control  
Configuration  
S
Press  
Press PREV then  
NEXT to move  
thru the  
Press NEXT to  
move thru the  
Film menu  
PROGRAM  
to access  
menus  
System menu  
2-1  
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Chapter 2  
Operation  
2.2 Film Parameters Setup  
The Film Parameters Menu programs the SQM-160 for the materials that will be  
deposited as thin films. Nine films can be stored, but only one film is active at any time.  
To program film parameters:  
1. Press Program to enter program mode.  
2. Use the Control Knob to scroll to the desired Film # (1-9).  
3. Depress the Control Knob or Next to enter the film parameters menu for the  
selected film.  
4. Use Next and Prev to move through the film parameters, shown in Display 1.  
5. Use the Control Knob to adjust the parameter value, shown in Display2 , to the  
desired setting.  
6. Press Clear to abandon the change and return to the original setting.  
7. Depress the Control Knob to save the displayed value, or press Next to exit without  
saving the value. (Pressing either one will take you to the next material parameter.)  
8. Press Program to exit the Film Parameters Menu and return to normal mode.  
Notes:  
1. Refer to the section on Sensor Selection for instructions on setting SENS AVG.  
2. A setting of zero for FINL THK, THK SET or TIME SET will disable that function.  
2-2  
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Chapter 2  
Operation  
The diagram and table below detail the parameters available in the Film Parameters  
Menu:  
Film Selection Film Parameters Menu  
Sub-Menu  
Film1  
- DENSITY  
- TOOLING  
- Z-FACTOR  
- FINL THK  
- THK SET  
- TIME SET  
- SENS AVG  
.
.
.
.
.
.
Program  
- 1  
- 2  
- 3  
Sensors 3 to 6  
show only if the  
four sensor  
option card is  
iinstalled.  
Film9  
.
.
- 6  
Display  
Description  
Range  
Default  
Units  
DENSITY  
TOOLING  
Density of the material being  
deposited.  
0.5 – 99.99  
10 – 399  
1.00  
gm/cc  
%
Overall tooling Factor for this film.  
See the Sensor Tooling section of  
this chapter for information on  
setting tooling values.  
100  
1.0  
Z-FACTOR  
FINL THK  
Z-Factor of the material being  
deposited.  
0.10 – 10.00  
Desired Final Thickness of  
deposited material. Lights Final Thk  
LED. Zero is disabled.  
0.000 – 99.99 0.500  
KÅ  
KÅ  
Sec  
THK SET  
Thickness value that closes the  
Thickness Setpoint relay and lights  
Thk SP LED. Zero is disabled.  
0.000 – 99.99  
0:00 – 99:59  
Enabled/  
0
0
TIME SET  
SENS AVG  
Elapsed time that closes the Timer  
Setpoint relay and lights Time SP  
LED. Zero is disabled.  
Enable/disable crystals for this film.  
Ch1  
See the Sensor Selectionsection of Disabled  
Enabled  
this chapter for more information.  
2-3  
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Chapter 2  
Operation  
2.3 System Parameters Setup  
The System Parameters Menu sets values that pertain to the overall functioning of the  
SQM-160, and to your vacuum system’s setup. System parameters are constant for all  
films.  
1. Press Program to enter program mode.  
2. Press Prev to enter the System Parameters Menu  
3. Use Next and Prev to move through the system parameters.  
4. Use the Control Knob to adjust the parameter value shown in Display2 to the  
desired setting.  
5. Press Clear to abandon the change and return to the original setting.  
6. Depress the Control Knob to save the displayed value, or press Next to exit without  
saving the value. (Pressing either one will take you to the next material parameter.)  
7. Press Program to exit the System Parameters Menu and return to normal mode.  
Notes:  
1. Refer to the section on Sensor Tooling for instructions on setting xTOOLING.  
2. Refer to the section on Sensor Min/Max for instructions on setting FMIN/FMAX.  
3. Refer to the Options Chapter for instructions on setting R/T BNDS for the Analog  
Output Card  
2-4  
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Chapter 2  
Operation  
System Parameters Menu  
Sub-Menu  
- TIMEBASE  
- SIM MODE  
- FRQ DISP  
- RATE RES  
- RATEFILT  
- BAUDRATE  
- ETCH  
- xTLTOOL1  
- xTLTOOL2  
- xTLTOOL3  
.
.
Program  
Prev  
- xTLTOOL6  
- xTOOLING  
- FMIN/MAX  
- R/T BNDS  
- FREQ MIN  
- FREQ MAX  
- RATE MIN  
- RATE MAX  
- THICKMIN  
Display  
Description  
Range  
Default  
Units  
TIMEBASE  
Time required to take a single  
measurement  
0.15 – 2.00  
0.25  
sec  
SIM MODE  
FRQ DISP  
Simulates sensors.  
On/Off  
On/Off  
Off  
Off  
Toggles between Rate/Thickness  
and Frequency Displays  
RATE RES  
RATEFILT  
Display resolution of Rate  
Hi/Low  
1 – 20  
Low  
8
Number of readings averaged for  
rate calculations  
BAUDRATE  
ETCH  
Serial Baud Rate to PC  
2.4 – 19.2  
On/Off  
19.2  
Off  
kbps  
Sets mode to negative rate for  
etching applications  
2-5  
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Chapter 2  
Operation  
Display  
Description  
Range  
Default  
Units  
xTOOLING  
Tooling value assigned to each  
sensor. See the Sensor Tooling  
section of this chapter for  
information on setting tooling  
values.  
10 – 399  
100  
%
FMIN/MAX  
Sub-Menu to select Crystal  
Frequency Limits  
FREQ MIN  
FREQ MAX  
Minimum Crystal Frequency  
Maximum Crystal Frequency  
4.00 – 6.00  
4.10 – 6.10  
5.00  
6.10  
MHz  
MHz  
The following System Parameters apply only if the optional Analog Output card is  
installed. See the Options chapter for more information on setting the Analog Output  
Card parameters.  
Display  
Description  
Range  
Default  
Units  
R/T BNDS  
Rate and Thickness Bounds Sub-  
Menu  
RATE MIN  
RATE MAX  
THICKMIN  
THICKMAX  
Deposition Rate for Zero Output  
(Zero Volts)  
0 – 999  
0
Å/s  
Å/s  
kÅ  
Deposition Rate for Full Scale  
Output (+5 Volts)  
9.9 – 999  
0 – 99.99  
0 – 99.99  
100  
0.00  
1.00  
Thickness for Zero Output (Zero  
Volts)  
Thickness for Full Scale Output  
(+5 Volts)  
kÅ  
2-6  
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Chapter 2  
Operation  
2.4 Sensor Selection  
The SQM-160 comes standard with two sensor inputs. Four additional sensors are  
available by adding a Sensor Option Card. The sensors can each be assigned to a  
different film, or multiple sensors can be averaged for a single film. The averaging  
option provides more uniform coverage of the deposition area, and provides a backup  
sensor capability. If one of multiple sensors assigned to a film fails, the sensor is  
automatically removed from rate/thickness calculations.  
To assign a sensor, or sensors, to a film:  
1. Press Program to enter program mode.  
2. Use the Control Knob to scroll to the desired Film # (1-9).  
3. Depress the Control Knob or Next to enter the film parameters menu for the  
selected film.  
4. Press Next until SENS AVG is shown.  
5. Use the Control Knob to scroll through the sensors in Display2.  
6. Depress the Control Knob to toggle the sensor on/off.  
Sensor status can be seen by observing the Crystal Status LEDs:  
If the LED is not illuminated, the crystal is disabled.  
If the LED is illuminated,the crystal is enabled and receiving valid readings.  
If the LED is flashing, the crystal is enabled, but is not receiving valid readings.  
7. Continue selecting sensors until the Crystal Status LEDs indicate the desired setup.  
8. Press Program to exit the Film Parameters Menu and return to normal mode.  
2-7  
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Chapter 2  
Operation  
2.5 Sensor Min/Max Frequency  
The Sensor Min/Max frequencies establish the operating range for the sensing quartz  
crystals. Both values are used to determine the % life that is displayed in Xtal Life  
mode.  
When the sensor frequency drops below the minimum, the SQM-160 indicates a sensor  
failure by blinking the Crystal Status display. Likewise, a sensor whose initial value  
exceeds the maximum will cause a blinking Crystal Status.  
To set sensor minimum and maximum frequencies:  
1. Press Program to enter program mode.  
2. Press Prev to enter the System Parameters Menu  
3. Press Next until FMIN/FMAX is shown.  
4. Depress the Control Knob to display FREQ MIN.  
5. Adjust the Control Knob to the desired minimum operating frequency on Display2.  
6. Depress the Control Knob to accept the minimum value and display FREQ MAX.  
7. Adjust the Control Knob to the desired maximum operating frequency on Display2.  
8. Depress the Control Knob to accept the maximum value.  
9. Press Program to exit the System Parameters Menu and return to normal mode.  
2-8  
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Chapter 2  
Operation  
2.6 Sensor Tooling  
Sensor Tooling adjusts for the difference in deposition rate between the sensor and the  
substrate being coated. It is an empirically determined value that matches the sensor  
readings to your vacuum system.  
Substrate  
Substrate  
Tooling  
Tooling  
Over 100%  
Under 100%  
The first Tooling is set in the Film Parameters Menu and is applied to the averaged Rate  
and Thickness for all sensors assigned to that film. Film Tooling is a film specific value.  
The second Tooling Factor, xTooling, is set in the System Parameters menu. It adjusts  
the tooling for each individual sensor before it is averaged. xTooling for a sensor  
applies to all films. If the individual sensor xToolings are set properly, a sensor failure  
will not cause a jump in the average Rate and Thickness reading.  
To adjust xTooling:  
1. Press Program to enter program mode.  
2. Press Prev to enter the System Parameters Menu  
3. Press Next until FRQ DISP is shown, then press the Control Knob.  
4. Adjust the Control Knob to set the XTLTOOL 1 value  
5. Depress the Control Knob to save the value and move to XTALTOOL 2.  
6. Repeat Steps 4-5 for each of the installed sensors.  
7. Press Program to exit the System Parameters Menu and return to normal mode.  
2-9  
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Chapter 2  
Operation  
2.7 Rate/Thickness or Frequency Display  
The SQM-160 determines deposition rate and thickness by measuring the frequency  
shift of a crystal oscillator over time. In some applications, the actual crystal frequency  
is desired. Displaying crystal frequency can also be useful in troubleshooting sensor  
operation.  
To select Rate/Thickness, or Frequency displays:  
1. Press Program to enter program mode.  
2. Press Prev to enter the System Parameters Menu  
3. Press Next until FRQ DISP is shown.  
4. Turn the Control Knob left or right to select the desired display mode.  
5. Depress the Control Knob to accept the value.  
6. Press Program to exit the System Parameters Menu and return to normal mode.  
2.8 Crystal Life Display  
The SQM-160 calculates the remaining crystal life based on the FMin/Max values set in  
the System Parameters Menu (see Section 2.5).  
To display the remaining crystal life for the sensors used by the currently active film:  
1. Press the Xtal Life switch in the front panel Control section.  
2. The sensor is shown in Display 1, the % remaining life, is shown in Display2.  
3. Turn the Control Knob to display the % life of other sensors active for this film.  
4. Press Xtal Life to return to normal rate/thickness, or frequency display.  
Note: You cannot enter program mode while the crystal life display is active.  
2-10  
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Chapter 2  
Operation  
2.9 Zero Thickness  
Before starting each film deposition, you will probably want to reset the SQM-160  
Thickness value to zero. To zero Thickness:  
1. Press the Zero switch in the front panel Control section.  
In addition to zeroing Thickness, pressing the Zero switch has these effects:  
1. The Time display is reset to its programmed value, and starts counting down.  
2. The Thickness Setpoint and Timer relays open.  
3. The Time SP, Thk SP, and Final Thk LEDs turn off.  
2.10 Shutter Operation  
The SQM-160 Shutter Relay normally controls the source material shutter. To open or  
close the Shutter Relay:  
1. Press the Shutter switch in the front panel Control section.  
The Open and Closed LEDs light to indicate the Shutter relay status.  
2.11 Simulate Mode  
In Simulate Mode, the SQM-160 simulates attached sensors. It is an easy way to  
become familiar with the SQM-160 front panel controls and programming. In Simulate  
Mode you can open/close the shutter to simulate deposition, zero readings, and display  
crystal life. You can also test the Time and Thickness setpoint relays and LEDs.  
To enter Simulate Mode:  
1. Press Program to enter program mode.  
2. Press Prev to enter the System Parameters Menu  
3. Press Next until SIM MODE is shown.  
4. Turn the Control Knob left or right to enable and disable Simulate Mode.  
5. Depress the Control Knob to accept the value.  
6. Press Program to exit the System Parameters Menu and return to normal mode.  
2-11  
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Chapter 3  
Options  
3.0 Introduction  
The SQM-160 has two slots to accommodate option cards. The Option A slot holds a  
Four Sensor Card, which expands the SQM-160 inputs to a total of six quartz crystal  
sensors. The Option B Analog Output Card provides Rate and Thickness outputs for  
connection to strip chart recorders.  
3.1 Installation  
WARNING: Hazardous voltages are present inside the SQM-160 when it is  
connected to a power source. Remove the power cable before opening the case  
to install option cards.  
Ground  
Option A Card  
Option B Card  
0
1
Rate  
Thick  
4
5
3
6
Sensor 1 Sensor 2  
RS-232  
Relay I/O  
Line Fuse  
Fuse 1/2 A SB at 120VAC  
Fuse 1/4 A SB at 240VAC  
Model No. SQM-160  
Ser No. 80901  
Remove  
Top Cover.  
Use a 1/16” hex driver to remove the four screws that attach  
the top cover to the chassis. Remove the top cover.  
Remove Option  
Cover Plate  
Use a 1/16” hex driver to remove the two 4-40 back panel  
screws that hold the option cover plate. Save the screws.  
Remove the option cover plate.  
Insert  
Option Card  
Insert the option card, from the inside, through the rear panel  
opening. Option A slot is for the Four Sensor Card, Option B  
slot is the Analog Output Card. Align the 36-pin option card  
connector with the mating pins on the main board. Press the  
option card connector onto the main board pins.  
Secure  
Option Card  
Secure the option card to the rear panel with the screws saved  
in Step 2, and to the main board with the supplied 4-40 screw.  
Replace Top  
Cover  
Replace the top cover, and attach it to the chassis with the four  
screws from Step 1.  
3-1  
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Chapter 3  
Options  
3.2 Four Sensor Card  
The SQM-160 automatically detects the presence of the Four Sensor Card.  
Refer to System Connections in Chapter 1 for sensor hookup information.  
Refer to Chapter 2, Sensor Selection, to assign Four Sensor Card sensors to a film.  
3.3 Analog Output Card  
Once the Analog Output Card is installed, the SQM-160 System Parameters must be  
set to match the device that will be attached to the Rate or Thickness output.  
To setup the Analog Output Card in the System Parameters menu:  
1. Press Program to enter program mode.  
2. Press Prev to enter the System Parameters Menu  
3. Use Next to move through the system parameters until R/T BNDS is displayed.  
4. Depress the Control Knob to display RATE MIN.  
5. Adjust the Control Knob to the Rate desired for a 0V output.  
6. Depress the Control Knob to save the value and display the RATE MAX setting.  
7. Adjust the Control Knob to the Rate desired for a 5V output.  
8. Repeat steps 4-7 to adjust the Thickness output values.  
9. Press Program to exit the System Parameters Menu and return to normal mode.  
Refer to System Parameters Setup in Chapter 2 for more information on setting SQM-  
160 System Parameters.  
3-2  
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Chapter 4  
MonComm Software  
4.0 Introduction  
Included with the SQM-160 is a Windows 95/98 program, MonComm. MonComm is  
used to setup instrument parameters, graph, and save instrument readings.  
4.1 Installation  
1. Insert installation Disk 1 into your computer’s A Drive.  
2. In Windows 95/98 select Start, then Run. Type A:\Setup, then click OK.  
3. Follow the on-screen instructions to complete the installation.  
4.2 Run MonComm  
Before starting the MonComm program, connect the SQM-160 to your computer with  
the straight-thru DB-9 cable supplied.  
In Windows 95/98 select Start, Programs,  
MonComm 1.0, MonComm to start the  
program.  
The main MonComm screen will appear. If the  
SQM-160 was located by the program,  
MON Ver X.XX will appear below the menu.  
If “No Instrument Found” appears instead,  
check your connections, and click Find  
Instrument to try again.  
At this point, the download list displays the last  
films downloaded to the SQM-160. To display  
the setup currently stored in the SQM-160,  
click Load Unit Films. The Download list is  
updated with the SQM-160 films.  
4-1  
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Chapter 4  
MonComm Software  
4.3 Add and Delete Films  
To add a new film to the Films List:  
1. Click the New Film button.  
2. A film named NewFilm# will be added to the end of the films list.  
3. Click on this film to highlight it.  
4. Change the name of the film - up to eight characters are allowed.  
5. Select the material for the film from the Material combo box.  
6. The density and the Z-factor for the material will be automatically  
changed to that of selected material. Both parameters can be  
edited if desired.  
7. Change the tooling for the film to the desired percentage.  
8. Set the thickness setpoint, final thickness,  
and the time setpoint to the desired values  
for the film.  
9. Select the channels to enable for the film.  
A checked box indicates the channel is  
enabled for the film. If only two channels  
are available, then enabling a channel  
above 2 will have no effect.  
To delete a film from the Films List:  
1. Highlight the film to be deleted by clicking it once in the Films list  
box.  
2. Click on the Delete Film button.  
4-2  
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Chapter 4  
MonComm Software  
4.4 Download Films  
To add or replace a film in the Download List:  
1. Highlight the desired film by clicking on  
it in the Films list box.  
2. Highlight the desired position for the film  
in the Download List box.  
3. Click on the Add Film button. If there is  
already a film in the selected position in  
the Download Films box, it will be replaced  
with the new film. If there is no film in the  
selected position then the “UnitFilm#” will  
be replaced with the new film.  
To remove a film from the Download List :  
1. Highlight the desired film by clicking on it in the  
Download Films list box.  
2. Click on the Remove Film button. A “UnitFilm#” will  
be left in the list as a position holder.  
To download the films in the Download List :  
Click on the Download Films button. The films in theDownload  
List box will be placed in the SQM-160 as Films 1 - 9 . A  
“UnitFilm#” in the Download List box indicates that the film in that  
position will not be affected by the download.  
4-3  
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Chapter 4  
MonComm Software  
4.5 Graph Data  
The SQM-160 graphs are accessed by clicking the Graph button.  
Two graphs of data from the SQM-160 can be displayed. The first displays the average  
rate of all active channels versus time. The second graph displays each individual  
channel’s rate versus time. To the right of the graph average rate, average thickness,  
each channel’s rate, elapsed time, and estimated time remaining until final thickness are  
displayed.  
The display is changed from one graph to the other by clicking on the Channel/Average  
button in the upper left hand corner of the screen. The caption on the button is the  
graph that will appear if the button is clicked.  
Graphing begins when the Go button is clicked. Graphing continues until the Stop  
button is clicked.  
4-4  
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Chapter 4  
MonComm Software  
To Adjust the Graph’s Scope:  
1 Select the Configure menu followed by the Graph sub menu item to display the  
graphs configuration form.  
2. Adjust the graph  
minimums and maximums  
as desired. The X and Y  
divisions determine the  
number of ticks between  
graph numerical markings  
and grid placement for  
each axis. The X and Y  
grids can be enabled or  
disabled with X and Y Grid  
check boxes.  
4.6 Save Data  
Your can save the data for Average Thickness, Average Rate, and each channel’s Rate  
in an Excel format spreadsheet.  
1. Click on the File menu followed by theNewsub menu.  
2. Enter a name for the file in the Save In dialog box.  
3. First set the starting time for the readings by  
adjusting the Start Time display to the desired  
minutes and seconds.  
4. Next adjust the ending time for the window in the End Time display. The recording of  
the data will begin when the graph time reaches the Start Time and end when the graph  
reaches the End Time or the graphing is stopped.  
4-5  
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Chapter 4  
MonComm Software  
4.7 Edit System Parameters  
System Parameters are accessed by clicking on the Config menu item followed by the  
System sub menu. All of the system parameters, except Baud Rate, are available for  
edit.  
The system parameters are downloaded to the SQM-160 by clicking on theUpdate  
Parameters button. The parameters can be reloaded into the form from the SQM-160 by  
clicking the Refresh menu item.  
Return to the main display by clicking on theExit menu item.  
4.8 Load Defaults  
The default film and system parameters can be loaded by clicking on the Config menu  
item followed by the Load Defaults sub menu item. The SQM-160 loads all default  
values into its parameters upon receipt of this command.  
4-6  
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Chapter 5  
Maintenance  
5.0 Introduction  
WARNING: There are no user adjustments, or serviceable parts, inside the SQM-160.  
For maintenance or repair, contact  
Sigma Instruments  
1318 Duff Drive  
Fort Collins, CO 80524 USA  
970-416-9660  
5.1 Fuse Replacement  
WARNING: Remove the power cable before replacing the fuse.  
Ground  
Option A Card  
Option B Card  
0
1
Rate  
Thick  
3
4
5
6
Sensor 1 Sensor 2  
RS-232  
Relay I/O  
Line Fuse  
Fuse 1/2 A SB at 120VAC  
Fuse 1/4 A SB at 240VAC  
Model No. SQM-160  
Ser No. 80901  
The SQM-160 is shipped with a ½ A Fuse for use with 90–120 VAC. If your line voltage  
is 180–240 VAC, replace the fuse with the ¼A fuse included with your SQM-160.  
WARNING: Always replace the Line Fuse with the same size and type fuse  
specified above.  
5-1  
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Appendix  
A. Material Parameters  
Material  
Aluminum  
Aluminum Oxide  
Antimony  
Arsenic  
Barium  
Beryllium  
Bismuth  
Bismuth Oxide  
Boron  
Cadmium  
Cadmium Selenium  
Cadmium Sulfide  
Cadmium Teluridium  
Calcium  
Calcium Fluoride  
Carbon Diamond  
Carbon Graphite  
Cerium Fluoride  
Cerium Oxide  
Chromium  
Chromium Oxide  
Cobalt  
Copper  
Copper Sulfide  
Copper Sulfide B  
Copper Sulfide A  
Dysprosium  
Erbium  
Density ZFactor  
Material  
Manganese  
Manganese Sulfide  
Mercury  
Molybdenum  
Neodymium Fluoride  
Neodymium Oxide  
New  
Nickel  
Niobium  
Niobium Oxide  
Palladium  
Platinum  
Density ZFactor  
2.73  
3.97  
6.66  
2.9  
1.08  
1
0.766  
0.966  
2.1  
7.2  
3.99  
13.46  
10.2  
6.506  
7.24  
1
0.377  
0.94  
0.74  
0.257  
1
3.5  
1.87  
9.8  
0.543  
0.79  
1.003  
0.389  
0.682  
1
1.02  
0.98  
2.62  
0.775  
0.22  
3.26  
1
1
1
8.92  
2.54  
8.64  
5.82  
4.83  
5.85  
1.55  
3.18  
3.52  
2.25  
6.16  
7.13  
99.9  
5.21  
8.71  
8.93  
4.6  
8.91  
8.57  
4.47  
12  
21.4  
1.98  
21.04  
12.41  
7.54  
3
4.82  
2.32  
2.21  
2.13  
10.5  
6.48  
5.56  
0.97  
2.17  
2.07  
16.6  
8.2  
0.331  
0.493  
1
0.357  
0.245  
2.05  
0.15  
0.21  
0.89  
0.91  
0.864  
0.712  
1.07  
0.87  
0.529  
1.18  
1.32  
4.8  
Potassium Chloride  
Rhenium  
Rhodium  
Samarium  
Scandium  
Selenium  
Silicon  
1
0.305  
1
0.343  
1
Silicon Dioxide  
Silicon Oxide  
Silver  
Silver Bromide  
Silver Chloride  
Sodium  
Sodium Chloride  
Sulfur  
Tantalum  
Tantalum Oxide  
Tellurium  
Terbium  
Thallium  
Thorium Fluoride  
Tin  
0.82  
0.67  
0.69  
0.6  
0.74  
0.67  
0.593  
1.59  
0.516  
1.111  
0.36  
1
0.58  
0.841  
0.769  
1
0.129  
0.349  
0.92  
1
5.8  
5.6  
1.57  
2.29  
0.262  
0.3  
8.54  
9.05  
7.89  
5.93  
5.31  
5.35  
99.9  
13.1  
9.63  
8.8  
Gadolinium  
Gallium  
Gallium Arsenide  
Germanium  
Gold  
Hafnium  
Hafnium Oxide  
Holnium  
6.25  
8.27  
11.85  
6.32  
7.3  
0.9  
0.66  
1.55  
1
0.724  
0.628  
1
Titanium  
4.5  
4.9  
Titanium Oxide  
Titanium Oxide IV  
Tungsten  
Tungsten Carbide  
Uranium  
Vanadium  
Ytterbium  
Yttrium  
Yttrium Oxide  
Zinc  
Indium  
7.3  
4.26  
19.3  
15.6  
18.7  
5.96  
6.98  
4.34  
5.01  
7.04  
5.61  
5.26  
4.09  
5.6  
0.4  
Indium Intimnide  
Indium Oxide  
Iridium  
5.76  
7.18  
22.4  
7.86  
6.17  
5.94  
6.51  
11.3  
7.5  
0.53  
2.64  
1.74  
3
0.163  
0.151  
0.508  
0.53  
1.13  
0.835  
1
0.514  
0.556  
0.722  
0.775  
1.001  
Iron  
Lanthanum  
Lanthanum Fluoride  
Lanthanum Oxide  
Lead  
Lead Sulfide  
Lithium  
Lithium Fluoride  
Magnesium  
Magnesium Fluoride  
1
1.13  
0.566  
5.9  
0.774  
1.61  
1
Zinc Oxide  
Zinc Selenide  
Zinc Sulfide  
Zirconium Oxide  
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Appendix  
B. Specifications  
Measurement  
Number of Sensors  
Frequency Range  
Frequency Accuracy  
Frequency Resolution  
Rate Accuracy  
2 standard, plus 4 optional  
4.0MHz to 6.0Mhz  
.01% @ 2 rdgs/sec.  
.1 Hz  
.5% typical  
.01/.1 Å/s  
Rate Resolution  
Thickness Accuracy  
Thickness Resolution  
Measurement Filter  
Measurement Period  
.5% typical  
1 Å  
1 to 20 readings  
.15 to 2 sec  
Film Parameters  
Stored Films  
Density  
9
0.5 – 99.99 gm/cc  
Tooling  
10 – 399 %  
Z-Factor  
0.10 – 10.00  
0.000 – 99.99 kÅ  
0.000 – 99.99 kÅ  
0:00 – 99:59 sec  
Final Thickness  
Thickness Setpoint  
Time Setpoint  
System Parameters  
Simulate Mode  
On/Off  
Frequency Mode  
Etch Mode  
On/Off  
On/Off  
Crystal Fail Minimum.  
Crystal Fail Maximum  
RS-232 Baud Rate  
4.0 to 6.0 MHz  
4.1 to 6.1 MHz  
2.4/4.8/9.6/19.2 kb/s  
General Specifications  
Power Supply  
90-140VAC, 180-240VAC, 50-60HZ  
20VA  
Power Consumption  
0°C to 50°C  
Operating Environment  
0 to 80% RH non-condensing  
-40°C to 70°C  
0 to 2,000 meters  
88.5mm x 212.7mm x 196.9mm  
13.2 kg (6 lbs)  
Storage Environment  
Operating Altitude  
Rack Dimensions (HxWxD)  
Weight  
Accessories  
Power Cord, Rack Mount Ears,  
Relay I/O Connector, RS-232 Cable,  
MonComm Software, Manual  
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Appendix  
C. I/O Connections  
A 15-pin female D-sub connector is included with the instrument to connect digital I/O to  
the SQM-160 Relay I/O connector. The figure below shows the solder side pin  
assignments for the connector.  
1
8
9
15  
Relay I/O Connector Rear View  
Relays are rated for 125VAC or 30VDC, 2A maximum. Inputs can be activated either  
by connecting to a switch and shorting to Ground, or they can be driven by a TTL  
compatible signal. These are not isolated inputs! The voltage level applied must be  
limited to between 0 and +5 volts with respect to Ground.  
Pins  
Type  
Description  
1,2  
3,4  
5,6  
7,8  
9
Relay  
Relay  
Relay  
Relay  
Input  
Input  
Input  
Input  
Crystal Fail Relay, contacts closed when all  
enabled sensors have failed.  
Timer Setpoint, contacts closed when timer  
reaches Zero from its programmed value.  
Shutter Relay, contacts closed when shutter  
is open.  
Thickness Setpoint Relay, contacts close  
when thickness value reached.  
Zero Timer Input, grounding this pin will zero  
the timer.  
Zero Thickness Input, grounding this pin will  
zero the thickness reading.  
10  
11  
12  
Close Shutter Input, grounding this pin will  
close the shutter.  
Open Shutter Input, grounding this pin will  
open the shutter.  
13,14,15  
Ground  
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Appendix  
D. Declaration of Conformity  
Manufacturer’s Name:  
Sigma Instruments  
Manufacturer’s Address: 1318 Duff Drive  
Fort Collins, CO 80524 USA  
declares that the product:  
Product Name:  
Product Model:  
Rate/Thickness Monitor  
SQM-160  
Product Options: All Options  
conforms to the following Product Specifications:  
Safety:  
EMC:  
IEC  
CSA  
UL  
CISPR  
IEC  
IEC  
IEC  
Supplementary Information: This product complies with the requirements of the Low  
Voltage Directive 73 / 23 / EEC and the EMC Directive 89 / 336 / EEC (inclusive 93 / 68  
/ EEC) and carries the “CE” mark accordingly.  
Fort Collins, Colorado  
April 2000  
Gary L. Halcomb  
President  
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