Automated IC Inspection Microscope L200A
Automated IC Inspection Microscope
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The next generation in automated
IC inspection microscopy
Standardized, contamination-free inspections
The Eclipse L200A has scored major
advances in the standardization of
inspection and safeguards against
To minimize the chance of
contamination, the L200A's aperture
control and other major operations
are now motorized, enabling remote
control for use on unattended IC
Option keys
contamination. In a new design that
combines motorized control with
Cursor keys
Remote Controller
Menu key
automated operation, observation
conditions can be programmed for
each individual objective or for each
substrate to be inspected. Focus position,
objective magnification, illumination control
and other microscope methods are fully
programmable and can be recalled instantly.
This eliminates deviation in inspection
results that might occur due to different
settings made by multiple users.
production lines. Like other Eclipse-
series microscopes from Nikon, the
L200A features industry-acclaimed CFI60
infinity optics.
Include an ergonomic design for comfortable
viewing, a rigid, vibration resistant
construction, and you have a microscope
unsurpassed to meet the stringent
requirements of the latest semiconductor fabs.
The L200A is the next step upward in
automated IC inspection microscopy.
Enter key
LCD screen
DIC adjustment
knob*
Lamp intensity Auto/
Manual changeover key
Lamp intensity control knob
Aperture keys
AF-MF changeover key*
Focus fine adjustment knob*
(When AF is ON)
Brightfield key
Darkfield key
Focus dial
Objective
selection keys
Focus Coarse/Fine
changeover key
*Active when the respective optional module is attached.
Motorized, remote control minimizes
the chance of contamination, while
enhancing productivity
Frequently used operations such as aperture control, focusing, brightfield-
darkfield changeover, nosepiece rotation, lamp intensity control, and DIC
setting (option) are all motorized and can be controlled by the remote
controller or a PC. In addition, there is virtually no operation that requires
manual adjustment above the sample, therefore preventing particle
contamination introduced from the operator.
Free from deviations in
inspection results, due to
human errors and differences in
microscope settings
Optimum observation conditions including focus position,
aperture, light intensity, as well as DIC prism and polarizer
position can be preset objective-by-objective and recalled
simply by selecting the objective. This eliminates the need
to configure these settings each time the microscope is
used, providing standardized observation regardless of
who operates the microscope.
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Easy configuration into an automated inspection system
Programmed settings
As an inspection process varies depending on substrate,
layer, and even the operator, it has been necessary to re-
adjust settings for each inspection process.
Communication System Diagram
In combination with
wafer loaders
AF
DIC
Confocal
DUV
Of course, the L200A can be configured with
Nikon's NWL-860 series of wafer loaders and
manual or motorized scanning stages to
create a wafer inspection system at a
minimum cost.
The L200A's programming feature eliminates this process.
You just select the settings-such as observation method,
objective magnification, point to be checked, focus
position, aperture, and light intensity-and save them by
attaching appropriate file names. All you need do to begin
your inspection is just to specify the file name.
Local
RS232C (Binary)
Local
Local
L200A
Local
DART software (option)
RS232C
(Binary)
Scanning
stage
Other Euipment
(ISS)
PC
RS232C (Binary)
RS232C (SECS)
Local
(DART Software)
(Other Software)
Wafer
Loader
NWL860
Host
Computer
Filing
System
Auto In-
spection
Machine
L200A configured with NWL-860 INX
DART Software is an integrated software package
that can fully automate the inspection process.
DART combined with an NWL860 wafer loader,
ISS200 Motorized Stage and a L200A Auto Focus
offers a complete automated wafer inspection
station. DART software modules allow further
upgrades with options such as image archiving,
defect review, post probe review and online
communications.
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Top-notch basic performance facilitates inspections
Accessories to enhance performance
CFI LU/L Plan series objectives Illumination systems
DXM1200 digital camera
SEMI S2-93A, S8-95 compliant
Type
Magnifi- N.A.
cation
W.D.
•12V-100W halogen lamphouse
•100W mercury lamphouse
•150W metal halide
lamphouse
•75W xenon lamphouse
The DXM1200 Digital Camera achieves ultra-
high-quality digital images equivalent to
approximately 12 million output pixels, plus
has a low-noise design for clear, low-light
image capture. The camera's software can be
set to automatically categorize the images
taken, sort them and save them, all
Optical System
design
(mm)
0.075 8.80
CFI L Plan Epi*
CFI LU Plan Epi*
2.5X
5X
10X
20X
50X
100X
0.15
0.30
0.45
0.80
0.90
0.40
0.55
0.80
0.35
0.45
0.70
0.95
1.25
0.15
0.30
0.45
0.80
0.90
0.40
0.55
0.80
0.90
23.50
17.30
4.50
1.00
1.00
13.00
10.10
3.50
24.00
17.00
6.50
0.30
0.25
18.00
15.00
4.50
1.00
1.00
13.00
9.80
3.50
Stages and wafer
holders
CFI LU Plan Epi ELWD* 20X
50X
100X
20X
50X
100X
150X
150X
5X
10X
20X
50X
100X
20X
50X
100X
150X
automatically—a powerful feature when you
take a large number of photomicrographs.
CFI L Plan Epi SLWD*
•8x8 Stage
•8-inch (200mm) wafer holder
•6-inch (150mm) wafer holder
•6-inch (150mm) mask holder
•5-inch (125mm) mask holder
•4-inch (100mm) mask holder
CFI LU Plan Apo Epi*
CFI L Plan Apo Epi WI*
CFI LU Plan BD
ECLIPSE L200A
Conventional model
A tilting trinocular eyepiece tube with a lower eyepoint
designed to be closer to the operator allows you to sit in a
more natural erect position. Microscope controls located
comfortably up-front in the microscope base minimize
hand movement, allowing you to concentrate on the
inspection process.
CFI LU Plan BD ELWD
CFI LU Plan Apo BD
0.42
* A nosepiece adapter is needed to use these objectives.
Nikon's renowned CFI60 optics are the fusion of CF design
and infinity optics. These new optics feature longer working
distances and high N.A.'s. They also produce brighter
images with more contrast and reduced flare.
System Diagram
C-Mount/ENG-Mount TV
Zooming Adapter
Photomicrographic System
FX-III Series
C-Mount/ENG-Mount
CCD Camera
Digital Still Camera/
C-Mount CCD Camera
Eyepieces
CFI UW 10X
Centerable motorized
nosepiece
The sextuple motorized
nosepiece not only has
the same encoded
CF Projection Lenses
PLI 2X, 2.5X, 4X, 5X
TV Adapter
TV Adapter
CFI UW 10XM
CFI 10X
High-contrast darkfield images
V-T Photo Adapter
A new illumination
system produces a
Signal to Background
positioning system
CFI 10XM
CFI 12.5X
(S/B) ratio that is
nearly three times
greater than former
models. This
improves sensitivity
during darkfield
offered on the Eclipse
L200, but it also offers
three adjustable objective
positions that improve
par-centricity even more.
YM-TI Trinocular
Eyepiece Tube
L2-TT Trinocular Tilting
Eyepiece Tube
Confocal Unit
(Under development)
CFI 15X
Adapter
Illumination
Systems
Double Port
(Under
development)
Auto Focus Module
Filar Micrometer
10XA
observations, enabling the detection of minute scratches
and surface irregularities within the sample, and provides
exceptionally high contrast.
Motorized
DIC Module
Filter Sliders
Pinhole Slider
Vibration-isolation design
HMX-3
Lamphouse
Adapter
Mercury
Lampsocket
100W
Mercury Lamphouse
HMX-3B
Thanks to Computer-Aided
Engineering, the L200A is three
times less susceptible to
floor vibrations when
compared with conventional
models in this class. This
reduces the chance of
unwanted blur or image
shifts even during high-
magnification
Breadth Shield
Epi
Collector
Lens
Safeguards against
contamination
The body of this microscope is finished with electrostatic
discharge (ESD) coatings to prevent foreign particles from
adhering to it. Furthermore, the motorized nosepiece uses
a shielded center-motor that traps foreign particles inside,
preventing them from falling onto the sample.
LU Nosepiece
Adapter
Stages
CFI LU Plan BD
Objectives
CFI LU/L Plan
Epi Objectives
Xenon
Xenon Lamphouse
L200A
Remote
Controller
Lampsocket 75W HMX-4
8x8 Stage
Fiber
Guide
Adapter
Motorized Scanning
Stage ISS200
Metal Halide Starter
observations.
Liquid Fiber Guide
ISS200 Remote Controller
8" Wafer
Holder
4-6-inch
4-6-inch
Wafer Holder Mask Holder
12V-100W Halogen
Lamphouse
L Stage for NWL860
Wafer Loader
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