Omega Fma 4000 User Manual

User’s Guide

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FMA 4000

Digital Mass Flow Meters

TABLE OF CONTENTS

1. UNPACKING THE FMA 4000 MASS FLOW METER...................................

1.1 Inspect Package for External Damage.................................................

1.2 Unpack the Mass Flow Meter...............................................................

1.3 Returning Merchandise for Repair.......................................................

2. INSTALLATION........................................................................................

2.1 Primary Gas Connections.................................................................

2.2 Electrical Connections......................................................................

2.2.1 Power Supply Connections..............................................................

2.2.2 Output Signals Connections..............................................................

2.2.3 Communication Parameters and Connections...................................

3. PRINCIPLE OF OPERATION...................................................................

4. SPECIFICATIONS...................................................................................

5. OPERATING INSTRUCTIONS..................................................................

5.1 Preparation and Warm Up..................................................................

5.2 Swamping Condition.......................................................................

5.3 FMA 4000 Parameters Settings...........................................................

5.3.1 Engineering Units Settings...............................................................

5.3.2 Gas Table Settings..............................................................................

5.3.3 Totalizer Settings.............................................................................

5.3.4 Flow Alarm Settings........................................................................

5.3.5 Relay Assignment Settings..............................................................

5.3.6 K Factors Settings...........................................................................

5.3.7 Zero Calibration...............................................................................

5.3.8 Self Diagnostic Alarm.......................................................................

5.4 Analog output Signals configuration...................................................

6. MAINTENANCE.........................................................................................

6.1 Introduction......................................................................................

6.2 Flow Path Cleaning...........................................................................

6.2.1 Restrictor Flow Element (RFE)........................................................

6.2.2 FMA 4000 model.............................................................................

7. CALIBRATION PROCEDURES.................................................................20

7.1 Flow Calibration...............................................................................20

7.2 Gas Calibration of FMA 4000 Mass Flow Meter...............................2. 1

7.2.1 Connections and Initial Warm Up....................................................2. 1

7.2.2 ZERO Check/Adjustment Adjustment...............................................2..1

7.2.3 Gas Linearization Table Adjustment.................................................21

7.3 Analog output Calibration of FMA 4000 Mass Flow Meter.............. 23

7.3.1 Initial Setup......................................................................................2.4

7.3.2 Gas flow 0-5 Vdc analog output calibration.................................... 25

7.3.3 Gas flow 4-20 mA analog output calibration...................................25

8. RS485 / RS232 SOFTWARE INTERFACE COMMANDS......................... 26

8.1 General............................................................................................26

8.2 Commands Structure.......................................................................2..6

8.3 ASCII Commands Set.......................................................................2..8

9. TROUBLESHOOTING...............................................................................3.4

9.1 Common Conditions........................................................................34

9.2 Troubleshooting Guide.....................................................................35

9.3 Technical Assistance....................................................................... 37

10. CALIBRATION CONVERSIONS FROM REFERENCE GASES...................

APPENDIX I OMEGA FMA 4000 EEPROM Variables..............................

APPENDIX II INTERNAL USER SELECTABLE GAS FACTOR TABLE

(INTERNAL “K” FACTORS)........................................................

APPENDIX III GAS FACTOR TABLE (“K” FACTORS)....................................

APPENDIX IV COMPONENT DIAGRAM......................................................

APPENDIX V DIMENSIONAL DRAWINGS.................................................

APPENDIX VI WARRANTY...........................................................................

TRADEMARKS

Buna-N -is a registered trademark of DuPont Dow Elastomers.

Neoprene -is a registered trademark of DuPont.

Kalrez -is a registered trademark of DuPont Dow Elastomers.

Omega -is a registered trademark of Omega Engineering Inc.

UNPACKING THE FMA 4000 MASS FLOW METER

Inspect Package for External Damage

1.1

Your FMA 4000 Mass Flow Meter was carefully packed in a sturdy cardboard car-

ton, with anti-static cushioning materials to withstand shipping shock. Upon

receipt, inspect the package for possible external damage. In case of external

damage to the package contact the shipping company immediately.

1.2

Unpack the Mass Flow Meter

Open the carton carefully from the top and inspect for any sign of concealed ship-

ping damage. In addition to contacting the shipping carrier please forward a copy

of any damage report to Omega7 directly.

When unpacking the instrument please make sure that you have all the items

indicated on the Packing List. Please report any shortages promptly.

1.3

Returning Merchandise for Repair

Please contact an OMEGA7 customer service representative and request a

Return Authorization Number (AR).

It is mandatory that any equipment returned for servicing be purged and neutral-

ized of any dangerous contents including but not limited to toxic, bacterially infec-

tious, corrosive or radioactive substances. No work shall be performed on a

returned product unless the customer submits a fully executed, signed SAFETY

CERTIFICATE. Please request form from the Service Manager.

INSTALLATION

2.1

Primary Gas Connections

Please note that the FMA 4000 Mass Flow Meter will not operate with liquids. Only

clean gases are allowed to be introduced into the instrument. If gases are con-

taminated they must be filtered to prevent the introduction of impediments into the

sensor.

CAUTION: FMA 4000 TRANSDUCERS SHOULD NOT BE USED FOR

MONITORING OXYGEN GAS UNLESS SPECIFICALLY CLEANED AND

PREPARED FOR SUCH APPLICATION.

For more information, contact Omega7.

Attitude limit of the Mass Flow Meter is 15 from calibration position (standard

calibration is in horizontal position). This means that the gas flow path of the Flow

Meter must be within this limit in order to maintain the original calibration accura-

cy. Should there be need for a different orientation of the meter, re-calibration may

be necessary. It is also preferable to install the FMA 4000 transducer in a stable

environment, free of frequent and sudden temperature changes, high moisture,

and drafts.

Prior to connecting gas lines inspect all parts of the piping system including fer-

rules and fittings for dust or other contaminant’s.

When connecting the gas system to be monitored, be sure to observe the direc-

tion of gas flow as indicated by the arrow on the front of the meter.

Insert tubing into the compression fittings until the ends of the properly sized tub-

ing home flush against the shoulders of the fittings. Compression fittings are to be

tightened to one and one quarter turns according to the manufacturer's instruc-

tions. Avoid over tightening which will seriously damage the Restrictor Flow

Elements (RFE's)!

CAUTION: For FMA 4000 model, the maximum pressure in the

gas line should not exceed 500 PSIA (34.47 bars). Applying pressure above

500 PSIA (34.47 bars) will seriously damage the flow sensor.

FMA 4000 transducers are supplied with either standard 1/4 inch, or optional 1/8

inch inlet and outlet compression fittings which should NOT be removed unless

the meter is being cleaned or calibrated for a new flow range.

Using a Helium Leak Detector or other equivalent method, perform a thorough

leak test of the entire system. (All FMA 4000's are checked prior to shipment for

leakage within stated limits. See specifications in this manual.)

2.2

Electrical Connections

FMA 4000 is supplied with a 15 pin “D” connector. Pin diagram is presented in

Figure b-1.

2.2.1 Power Supply Connections

The power supply requirements for FMA 4000 transducers are: 11 to 26 Vdc,

(unipolar power supply)

DC Power (+) --------------- pin 7 of the 15 pin “D” connector

DC Power (-) --------------- pin 5 of the 15 pin “D” connector

CAUTION: Do not apply power voltage above 26Vdc.

Doing so will cause FMA 4000 damage or faulty operation.

2.2.2 Output Signals Connections

CAUTION: When connecting the load to the output terminals, do not exceed

the rated values shown in the specifications. Failure to do so might cause

damage to this device. Be sure to check if the wiring and the polarity of the

power supply is correct before turning the power ON. Wiring error may cause

damage or faulty operation.

FMA 4000 Mass Flow Meters are equipped with either calibrated 0-5 or calibrat-

ed 4-20 mA output signals (jumper selectable). This linear output signal repre-

sents 0-100% of the flow meter’s full scale range.

WARNING: The 4-20 mA current loop output is self-powered (non-isolated).

Do NOT connect an external voltage source to the output signals.

Flow 0-5 VDC or 4-20 mA output signal connection:

Plus (+) -------------------------- pin 2 of the 15 pin “D” connector

Minus (-) -------------------------- pin 1 of the 15 pin “D” connector

To eliminate the possibility of noise interference, use a separate cable entry for

the DC power and signal lines.

2.2.3 Communication Parameters and Connections

The digital interface operates via RS485 (optional RS232) and provides access to

applicable internal data including: flow, CPU temperature reading, auto zero, total-

izer and alarm settings, gas table, conversion factors and engineering units selec-

tion, dynamic response compensation and linearization table adjustment.

Communication Settings for RS485 / RS232 communication interface:

Baud rate:

Stop bit:

Data bits:

Parity:

......................

9600 baud

None

Flow Control: ......................

RS485 communication interface connection:

The RS485 converter/adapter must be configured for: multidrop, 2 wire, half

duplex mode. The transmitter circuit must be enabled by TD or RTS (depending

on which is available on the converter/adapter). Settings for the receiver circuit

should follow the selection made for the transmitter circuit in order to eliminate

echo.

RS485 T(-) or R(-)

RS485 T(+) or R(+)

...................... pin 8 of the 15 pin “D” connector (TX-)

...................... pin 15 of the 15 pin “D” connector (RX+)

RS485 GND (if available) ...................... pin 9 of the 15 pin “D” connector (GND)

RS232 communication interface connection:

Crossover connection has to be established:

RS232 RX (pin 2 on the DB9 connector) ..... pin 8 of the 15 pin “D” connector (TX)

RS232 TX (pin 3 on the DB9 connector) ..... pin 15 of the 15 pin “D” connector (RX)

RS232 GND (pin 5 on the DB9 connector) ..... pin 9 of the 15 pin “D” connector (GND)

Figure b.1 - FMA 4000 15 PIN “D” CONNECTOR CONFIGURATION

FMA 4000 FUNCTION

Common, Signal Ground For Pin 2

(4-20 mA return).

0-5 Vdc or 4-20mA Flow Signal Output.

Relay No. 2 - Normally Open Contact.

Relay No. 2 - Common Contact.

Common, Power Supply

(- DC power for 11 to 26 Vdc).

Relay No. 1 - Common Contact.

Plus Power Supply

(+ DC power for 11 to 26 Vdc).

RS485 (-) (Optional RS232 TX).

RS232 Signal GND (RS485 GND Optional).

Do not connect (Test/Maintenance terminal).

Relay No. 2 - Normally Closed Contact.

Relay No. 1 - Normally Open Contact.

Relay No. 1 - Normally Closed Contact.

Do not connect (Test/Maintenance terminal).

RS485 (+) (Optional RS232 RX).

Shield Chassis Ground.

IMPORTANT NOTES:

Generally, “D” Connector numbering patterns are standardized. There are, how-

ever, some connectors with nonconforming patterns and the numbering

sequence on your mating connector may or may not coincide with the numbering

sequence shown in our pin configuration table above. It is imperative that you

match the appropriate wires in accordance with the correct sequence regardless

of the particular numbers displayed on the mating connector.

Make sure power is OFF when connecting or disconnecting any cables in

the system.

The (+) and (-) power inputs are each protected by a 300mA M (medium time-lag)

resettable fuse. If a shorting condition or polarity reversal occurs, the fuse will cut

power to the flow transducer circuit. Disconnect the power to the unit, remove the

faulty condition, and reconnect the power. The fuse will reset once the faulty con-

dition has been removed. DC Power cable length may not exceed 9.5 feet (3

meters). Use of the FMA 4000 flow transducer in a manner other than that spec-

ified in this manual or in writing from Omega, may impair the protection provided

by the equipment.

PRINCIPLE OF OPERATION

The stream of gas entering the Mass Flow transducer is split by shunting a small

portion of the flow through a capillary stainless steel sensor tube. The remainder of

the gas flows through the primary flow conduit. The geometry of the primary con-

duit and the sensor tube are designed to ensure laminar flow in each branch.

According to principles of fluid dynamics the flow rates of a gas in the two laminar

flow conduits are proportional to one another. Therefore, the flow rates measured

in the sensor tube are directly proportional to the total flow through the transducer.

In order to sense the flow in the sensor tube, heat flux is introduced at two sec-

tions of the sensor tube by means of precision wound heater-sensor coils. Heat is

transferred through the thin wall of the sensor tube to the gas flowing inside. As

gas flow takes place heat is carried by the gas stream from the upstream coil to

the downstream coil windings. The resultant temperature dependent resistance

differential is detected by the electronic control circuit.The measured temperature

gradient at the sensor windings is linearly proportional to the instantaneous rate

of flow taking place.

An output signal is generated that is a function of the amount of heat carried by

the gases to indicate mass-molecular based flow rates.

Additionally, the FMA 4000 Mass Flow Meter incorporates a Precision Analog

Microcontroller (ARM7TDMI7 MCU) and non-volatile memory that stores all hard-

ware specific variables and up to 10 different calibration tables. The flow rate can

be displayed in 23 different volumetric or mass flow engineering units. Flow meter

parameters and functions can be programmed remotely via the RS485/RS232

(optional) interface. FMA 4000 flow meters support various functions including:

programmable flow totalizer, low, high or range flow alarm, automatic zero adjust-

ment (activated via local button or communication interface), 2 programmable

SPDT relays output, 0-5 Vdc / 4-20 mA analog outputs (jumper selectable), self

diagnostic alarm, 36 internal and user defined K-factor. Optional local 2x16 LCD

readout with adjustable back light provides flow rate and total volume reading in

currently selected engineering units and diagnostic events indication.

SPECIFICATIONS

FLOW MEDIUM: Please note that FMA 4000 Mass Flow Meters are designed to work only

with clean gases. Never try to measure flow rates of liquids with any FMA 4000.

CALIBRATIONS: Performed at standard conditions [14.7 psia (101.4 kPa) and 70 F

(21.1 C)] unless otherwise requested or stated.

ENVIRONMENTAL (PER IEC 664): Installation Level II; Pollution Degree II.

FLOW ACCURACY (INCLUDING LINEARITY): 1% of FS at calibration temperature and

pressure.

REPEATABILITY: 0.15% of full scale.

FLOW TEMPERATURE COEFFICIENT: 0.15% of full scale/ C or better.

FLOW PRESSURE COEFFICIENT: 0.01% of full scale/psi (6.895 kPa) or better.

FLOW RESPONSE TIME: 1000ms time constant; approximately 2 seconds to within 2%

of set flow rate for 25% to 100% of full scale flow.

MAXIMUM GAS PRESSURE: 500 psig (3447 kPa gauge).

MAXIMUM PRESSURE DROP: 0.18 PSID (at 10 L/min flow). See Table IV for

pressure drops associated with various models and flow rates.

GAS AND AMBIENT TEMPERATURE: 41 F to 122 F (5 C to 50 C).

RELATIVE GAS HUMIDITY: Up to 70%.

LEAK INTEGRITY: 1 x 10^-9sccs He maximum to the outside environment.

ATTITUDE SENSITIVITY: Incremental deviation of up to 1% from stated accuracy, after re-

zeroing.

OUTPUT SIGNALS: Linear 0-5 Vdc (3000 ohms min load impedance);

Linear 4-20 mA (500 ohms maximum loop resistance).

Maximum noise 20mV peak to peak (for 0-5 Vdc output).

TRANSDUCER INPUT POWER: 11 to 26 Vdc, 100 mV maximum peak to peak output

noise.

Power consumption:

+12Vdc (200 mA maximum);

+24Vdc (100 mA maximum);

Circuit board have built-in polarity reversal protection, 300mA resettable fuse provide

power input protection.

WETTED MATERIALS: Anodized aluminum, brass, 316 stainless steel, 416 stainless steel,

FKM, O-rings; BUNA-N7, NEOPRENE7 or KALREZ7 O-rings are optional.

CAUTION: Omega makes no expressed or implied guarantees of corrosion

resistance of mass flow meters as pertains to different flow media reacting with

components of meters. It is the customers' sole responsibility to select the

model suitable for a particular gas based on the fluid contacting (wetted)

materials offered in the different models.

INLET AND OUTLET CONNECTIONS: Model FMA 4000 standard 1/4" compression fittings.

Optional 1/8" or 3/8" compression fittings and 1/4" VCR fittings are available.

DISPLAY: Optional local 2x16 characters LCD with adjustable backlight (2 lines of text).

CALIBRATION OPTIONS: Standard is one 10 points NIST calibration.

Optional, up to 9 additional calibrations may be ordered at additional charge.

CE COMPLIANCE: EMC Compliance with 89/336/EEC as amended.

Emission Standard: EN 55011:1991, Group 1, Class A.

Immunity Standard: EN 55082-1:1992.

FLOW RANGES

TABLE I FMA 4000 LOW FLOW MASS FLOW METER*

scc/min [N₂]

std liters/min [N₂]

0 to 1

CODE

0 to 5

0 to 10

0 to 20

0 to 50

0 to 100

0 to 200

0 to 500

0 to 2

0 to 5

0 to 10

*Flow rates are stated for Nitrogen at STP conditions [i.e. 70 F (21.1 C) at 1 atm].

For other gases use the K factor as a multiplier from APPENDIX III.

TABLE IV PRESSURE DROPS

MAXIMUM PRESSURE DROP

FLOW RATE

MODEL

[std liters/min]

[mm H₂O]

[psid]

[kPa]

FMA 4000

up to 10

130

0.18

1.275

WEIGHT

SHIPPING WEIGHT

MODEL

FMA 4000 transmitter

2.20 lbs. (1.00 kg)

3.70 lbs. (1.68 kg)

OPERATING INSTRUCTIONS

Preparation and Warm Up

5.1

It is assumed that the Mass Flow Meter has been correctly installed and thor-

oughly leak tested as described in section 2. Make sure the flow source is OFF.

When applying power to a flow meter within the first two seconds, you will see on

the LCD display: the product name, the software version, and revision of the EEP-

ROM table (applicable for LCD option only).

OMEGA FMA 4000 485

S: Ver1.4

Rev.A0

Figure b-2: FMA 4000 first Banner Screen

Within the next two seconds, the RS485 network address, the analog output set-

tings, and currently selected gas calibration table will be displayed (applicable for

LCD option only).

Ad: 11 Out: 0-5Vdc

Gas# 1

AIR

Figure b-3: FMA 4000 second Banner Screen

Note: Actual content of the LCD screen may vary depending on the

model and device configuration.

ꢀ

After two seconds, the LSD display switches to the main screen with the

following information:

Mass Flow reading in current engineering units (upper line).

Totalizer Volume reading in current volume or mass based

engineering units (lower line).

F: 50.0 L/min

T: 75660.5 Ltr

Figure b-4: FMA 4000 Main Screen

Note: Allow the Digital Mass Flow Meter to warm-up for a MINIMUM

of 6 minutes.

ꢀ

During initial powering of the FMA 4000 transducer, the flow output signal will be

indicating a higher than usual output. This is an indication that the FMA 4000

transducer has not yet attained its minimum operating temperature.This condition

will automatically cancel within a few minutes and the transducer should eventu-

ally indicate zero.

Note: During the first 6 minutes of the initial powering of the FMA 4000

transducer, the status LED will emit CONSTANT UMBER light.

ꢀ

For the FMA 4000 transducer with LCD option: If the LCD diagnostic is activated,

the second line of the LCD will display the time remaining until the end of the

warm up period (Minutes:Seconds format) and will alternatively switch to Totalizer

reading indication every 2 seconds.

F: 50.0 L/min

** WarmUp 2:39 **

Figure b-5: FMA 4000 Main Screen during Sensor Warm up period.

Note: After 6 minutes of the initial powering of the FMA 4000 the

ꢀ _{transducer, status LED will emit a constant GREEN light (normal}

operation, ready to measure). For FMA 4000 with LCD option, the

screen will reflect flow and totalizer reading. (see Figure b-4).

5.2

Swamping Condition

If a flow of more than 10% above the maximum flow rate of the Mass Flow Meter

is taking place, a condition known as “swamping” may occur. Readings of a

“swamped” meter cannot be assumed to be either accurate or linear. Flow must

be restored to below 110% of maximum meter range. Once flow rates are lowered

to within calibrated range, the swamping condition will end. Operation of the meter

above 110% of maximum calibrated flow may increase recovery time.

5.3

FMA 4000 Parameters Settings

5.3.1 Engineering Units Settings

The FMA 4000 Mass Flow Meter is capable of displaying flow rate with 23 different

Engineering Units. Digital interface commands (see paragraph 8.3 ASCII Command

Set “FMA 4000 SOFTWARE INTERFACE COMMANDS”) are provided to:

get currently active Engineering Units

set desired Engineering Units.

The following Engineering Units are available:

TABLE VI UNITS OF MEASUREMENT

FLOW RATE

ENGINEERING

UNITS

TOTALIZER

ENGINEERING

UNITS

NUMBER

INDEX

DESCRIPTION

Ltr

Percent of full scale

Milliliter per second

Milliliter per minute

Milliliter per hour

mL/sec

mL/min

mL/hr

L/sec

Liter per second

L/ min

L/hr

Liter per minute

Liter per hour

Cubic meter per second

Cubic meter per minute

m /sec

m / min

Cubic meter per hour

Cubic feet per second

m /hr

f /sec

Cubic feet per minute

Cubic feet per hour

Grams per second

Grams per minute

Grams per hour

f /min

f /hr

g/sec

g/min

g/hr

kg/sec

kg/min

kg/hr

Kilograms per second

Kilograms per minute

Kilograms per hour

Pounds per second

Pounds per minute

Pounds per hour

Lb/sec

Lb/min

Lb/hr

User

User defined

Note: Once Flow Unit of Measure is changed, the Totalizer’s

ꢀ _{Volume/Mass based Unit of Measure will be changed automatically.}

5.3.2 Gas Table Settings

The FMA 4000 Mass Flow Meter is capable of storing calibration data for up to 10

different gases. Digital interface commands are provided to:

get currently active Gas Table number and Gas name

set desired Gas Table.

Note: By default the FMA 4000 is shipped with at least one valid

ꢀ _{calibration table (unless optional additional calibrations were ordered).}

If instead of the valid Gas name (for example NITROGEN), the LCD

screen or digital interface displays Gas designator as “Uncalibrated”,

then the user has chosen the Gas Table which was not calibrated.

Using an “Uncalibrated” Gas Table will result in erroneous reading.

5.3.3 Totalizer Settings

The total volume of the gas is calculated by integrating the actual gas flow rate

with respect to the time. Digital interface commands are provided to:

reset the totalizer to ZERO

start the totalizer at a preset flow

assign action at a preset total volume

start/stop (enable/disable) totalizing the flow

read totalizer via digital interface

The Totalizer has several attributes which may be configured by the user.

These attributes control the conditions which cause the Totalizer to start integrat-

ing the gas flow and also to specify actions to be taken when the Total Volume is

outside the specified limit.

Note: Before enabling the Totalizer, ensure that all totalizer settings

ꢀ _{are configured properly. Totalizer Start values have to be entered in}

%F.S. engineering unit. The Totalizer will not totalize until the flow rate

becomes equal to or more than the Totalizer Start value. Totalizer Stop

values must be entered in currently active volume / mass based

engineering units. If the Totalizer Stop at preset total volume feature is

not required, then set Totalizer Stop value to zero.

Totalizer action conditions become true when the totalizer reading and preset

“Stop at Total” volumes are equal.

Local maintenance push button is available for manual Totalizer reset on the field.

The maintenance push button is located on the right side of the flow meter inside

the maintenance window above the 15 pin D-connector (see Figure c-1 “FMA

4000 configuration jumpers”).

Note: In order to locally Reset Totalizer, the reset push button must be

ꢀ _{pressed during power up sequence. The following sequence is}

recommended:

1. Disconnect FMA 4000 from the power.

2. Press maintenance push button (do not release).

3. Apply power to the FMA 4000 while holding down the maintenance

push button.

4. Release maintenance push button after 6 seconds. For FMA 4000

with optional LCD, when FMA 4000 Main Screen appears

(see Figure b-4).

5.3.4 Flow Alarm Settings

FMA 4000 provides the user with a flexible alarm/warning system that monitors

the Gas Flow for conditions that fall outside configurable limits as well as visual

feedback for the user via the status LED and LCD (only for devices with LCD

option) or via a Relay contact closure.

The flow alarm has several attributes which may be configured by the user via a

digital interface. These attributes control the conditions which cause the alarm to

occur and to specify actions to be taken when the flow rate is outside the speci-

fied conditions.

Mode Enable

/Disable -

Allows the user to Enable/Disable Flow Alarm.

Low Alarm - The value of the monitored Flow in % F.S. below

which is considered an alarm condition.

Note:

The value of the Low alarm must be less than the

value of the High Alarm.

ꢀ

High Alarm- The value of the monitored Flow in % F.S. above

which is considered an alarm condition.

Note:

The value of the High alarm must be more than the

value of the Low Alarm.

Action Delay- The time in seconds that the Flow rate value must remain

above the high limit or below the low limit before an alarm

condition is indicated. Valid settings are in the range of 0

to 3600 seconds.

Latch Mode- Controls Latch feature when Relays are assigned to

Alarm event. Following settings are available:

0 - Latch feature is disabled for both relays

1 - Latch feature is enabled for Relay#1 and disabled for Relay#2

2 - Latch feature is enabled for Relay#2 and disabled for Relay#1

3 - Latch feature is enabled for both relays.

Note: If the alarm condition is detected, and the Relay is assigned to

ꢀ _{Alarm event, the corresponding Relay will be energized.}

Note: By default, flow alarm is non-latching. That means the alarm is

ꢀ _{indicated only while the monitored value exceeds the specified}

conditions. If Relay is assigned to the Alarm event, in some cases, the

Alarm Latch feature may be desirable.

The current Flow Alarm settings and status are available via digital interface (see

paragraph 8.3 ASCII Command Set “FMA 4000 SOFTWARE INTERFACE COM-

MANDS”).

5.3.5 Relay Assignment Settings

Two sets of dry contact relay outputs are provided to actuate user supplied equip-

ment. These are programmable via digital interface such that the relays can be

made to switch when a specified event occurs (e.g. when a low or high flow alarm

limit is exceeded or when the totalizer reaches a specified value).

The user can configure each Relay action from 6 different options:

No Action

: (N) No assignment (relay is not assigned to any events and not energized).

: (T) Totalizer reached preset limit volume.

: (H) High Flow Alarm condition.

Totalizer > Limit

High Flow Alarm

Low Flow Alarm

: (L) Low Flow Alarm condition.

Range between H&L : (R) Range between High and Low Flow Alarm condition.

Manual Enabled : (M) Activated regardless of the Alarm and Totalizer conditions.

5.3.6 K Factors Settings

Conversion factors relative to Nitrogen for up to 36 gases are stored in the FMA

4000 (see APPENDIX II). In addition, provision is made for a user-defined con-

version factor. Conversion factors may be applied to any of the ten gas calibra-

tions via digital interface commands.

The available K Factor settings are:

•

Disabled

(K = 1).

Internal Index The index [0-35] from internal K factor table

(see APPENDIX II).

•

User Defined User defined conversion factor.

Note: The conversion factors will not be applied for % F.S.

ꢀ _{engineering unit.}

5.3.7 Zero Calibration

The FMA 4000 includes an auto zero function that, when activated, automatical-

ly adjusts the mass flow sensor to read zero. The initial zero adjustment for your

FMA 4000 was performed at the factory. It is not required to perform zero calibra-

tion unless the device has zero reading offset with no flow conditions.

Note: Before performing Zero Calibration, make sure the device is

ꢀ _{powered up for at least 15 minutes and absolutely no flow condition is}

established.

Shut off the flow of gas into the Digital Mass Flow Meter. To ensure that no seep-

age or leak occurs into the meter, it is good practice to temporarily disconnect the

gas source. The Auto Zero may be initiated via digital communication interface or

locally by pressing the maintenance push button, which is located on the right side

of the flow meter inside the maintenance window above the 15 pin D-connector

(see Figure c-1 “FMA 4000 configuration jumpers”).

Note: The same maintenance push button is used for Auto Zero

ꢀ _{initiation and Totalizer reset. The internal diagnostic algorithm will}

prevent initiating Auto Zero function via the maintenance push button

before the 6 minutes sensor warm up period has elapsed.

To start Auto Zero locally, press the maintenance push button.The status LED will

flash not periodically with the RED light. On the FMA 4000 with optional LCD, the

following screen will appear:

AUTOZERO IS ON!

Figure b-6: FMA 4000 Screen in the beginning of Auto Zero procedure.

The Auto Zero procedure normally takes 1 - 2 minutes during which time the DP

Zero counts and the Sensor reading changes approximately every 3 to 6 seconds.

AUTOZERO IS ON!

405 DP: 512

Figure b-7: FMA 4000 during the Auto Zero procedure.

The nominal value for a fully balanced sensor is 120 Counts. If the FMA 4000’s

digital signal processor was able to adjust the Sensor reading within 120 10

counts, then Auto Zero is considered successful. The status LED will return to a

constant GREEN light and the screen below will appear:

AutoZero is Done

122 DP: 544

Figure b-7: FMA 4000 during the Auto Zero procedure.

Note: The actual value of the Sensor and DP counts will vary for each

ꢀ _{FMA 4000.}

If the device was unable to adjust the Sensor reading to within 120 10 counts,

then Auto Zero is considered as unsuccessful. The constant RED light will appear

on the status LED.The user will be prompted with the “AutoZero ERROR!” screen.

Note: For FMA 4000 with RS232 option all Auto Zero status info

ꢀ _{available via digital communication interface.}

5.3.8 Self Diagnostic Alarm

FMA 4000 series Mass Flow Meters are equipped with a self-diagnostic alarm

which is available via multicolor LED, digital interface and on screen indication (for

devices with optional LCD). The following diagnostic events are supported:

DIAGNOSTIC

ALARM DESCRIPTION

LED COLOR

AND PATTERN

PRIORITY

LEVEL

NUMBER

Not periodically

flashing RED

Auto Zero procedure is running

FATAL ERROR (reset or

maintenance service is required for Constant RED

return in to the normal operation)

CPU Temperature too high

(Electronics Overheating)

Flashing RED/UMBER

Sensor in the warm up stage

(first 6 minutes after power up

sequence, normal operation, no

critical diagnostic events present)

Constant UMBER

Flow Sensor Temperature too low

Flashing UMBER/OFF

Flow Sensor Temperature too high Flashing RED/OFF

Totalizer Reading hit preset limit

Low flow Alarm conditions

High flow Alarm conditions

Flashing GREEN/UMBER

Flashing GREEN/OFF

Flashing GREEN/RED

Constant GREEN

Normal operation, no diagnostic

events

Note: [0] - Priority Level is highest (most important). When two or more

diagnostic events are present at the same time, the event with the

highest priority level will be indicated on the status LED and displayed

on the LCD (if equipped). All diagnostic events may be accessed

simultaneously via digital communication interface (see paragraph 8.3

“ASCII Command Set”).

ꢀ

5.4

Analog Output Signals configuration

FMA 4000 series Mass Flow Meters are equipped with calibrated 0-5 Vdc and 4-

20 mA output signals. The set of the jumpers (J7A, J7B, J7C) located on the right

side of the flow meter, inside of the maintenance window above the 15 pin D-con-

nector (see Figure c-1 “FMA 4000 configuration jumpers”) are used to switch

between 0-5 Vdc or 4-20 mA output signals (see Table VI).

Analog output signals of 0-5 Vdc and 4-20 mA are attained at the appropriate pins of

the 15-pin “D” connector (see Figure b-1) on the side of the FMA 4000 transducer.

Table VI Analog Output Jumper Configuration

ANALOG SIGNAL

0-5 Vdc

4-20 mA

OUTPUT

J7.A

J7.B

J7.C

5-9

6-10

7-11

J7.A

J7.B

J7.C

1-5

2-6

3-7

Flow Rate Output

Jumper Header J7

See APPENDIX IV for actual jumpers layout on the PCB.

Note: Digital output (communication) is simultaneously available with

ꢀ _{analog output.}

MAINTENANCE

6.1

Introduction

It is important that the Mass Flow Meter is only used with clean, filtered gases.

Liquids may not be metered. Since the RTD sensor consists, in part, of a small

capillary stainless steel tube, it is prone to occlusion due to impediments or gas

crystallization. Other flow passages are also easily obstructed.

Therefore, great care must be exercised to avoid the introduction of any potential

flow impediment. To protect the instrument, a 50 micron (FMA 4000) filter is built

into the inlet of the flow transducer.The filter screen and the flow paths may require

occasional cleaning as described below. There is no other recommended mainte-

nance required. It is good practice, however, to keep the meter away from vibra-

tion, hot or corrosive environments and excessive RF or magnetic interference.

If periodic calibrations are required, they should be performed by qualified per-

sonnel and calibrating instruments, as described in section 7. It is recommended

that units are returned to Omega^®for repair service and calibration.

CAUTION: TO PROTECT SERVICING PERSONNEL IT IS

MANDATORY THAT ANY INSTRUMENT BEING SERVICED IS

COMPLETELY PURGED AND NEUTRALIZED OF TOXIC,

BACTERIOLOGICALLY INFECTED, CORROSIVE OR RADIOACTIVE

CONTENTS.

6.2

Flow Path Cleaning

Before attempting any disassembly of the unit for cleaning, try inspecting the flow

paths by looking into the inlet and outlet ends of the meter for any debris that may

be clogging the flow through the meter. Remove debris as necessary. If the flow

path is clogged, proceed with steps below.

Do not attempt to disassemble the sensor. If blockage of the sensor tube is not alle-

viated by flushing through with cleaning fluids, please return meter for servicing.

CAUTION: DISASSEMBLY MAY COMPROMISE CURRENT CALIBRATION.

6.2.1 Restrictor Flow Element (RFE)

The Restrictor Flow Element (RFE) is a precision flow divider inside the trans-

ducer which splits the inlet gas flow by a preset amount to the sensor and main

flow paths. The particular RFE used in a given Mass Flow Meter depends on the

gas and flow range of the instrument.

6.2.2 FMA 4000 Model

Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow

Element (RFE) is connected to the inlet fitting. Carefully disassemble the RFE

from the inlet connection. The 50 micron filter screen will now become visible.

Push the screen out through the inlet fitting. Clean or replace each of the removed

parts as necessary. If alcohol is used for cleaning, allow time for drying.

Inspect the flow path inside the transducer for any visible signs of contaminant. If

necessary, flush the flow path through with alcohol. Thoroughly dry the flow paths

by flowing clean dry gas through.

Carefully re-install the RFE and inlet fitting avoiding any twisting and deforming to

the RFE. Be sure that no dust has collected on the O-ring seal.

NOTE: OVER TIGHTENING WILL DEFORM AND RENDER THE RFE

ꢀ _{DEFECTIVE. IT IS ADVISABLE THAT AT LEAST ONE CALIBRATION}

POINT BE CHECKED AFTER RE-INSTALLING THE INLET FITTING.

SEE SECTION (7.2.3).

CALIBRATION PROCEDURES

NOTE: REMOVAL OF THE FACTORY INSTALLED CALIBRATION

SEALS AND/OR ANY ADJUSTMENTS MADE TO THE METER, AS

DESCRIBED IN THIS SECTION, WILL VOID ANY CALIBRATION

WARRANTY APPLICABLE.

7.1

Flow Calibration

Omega^®Engineerings' Flow Calibration Laboratory offers professional calibration

support for Mass Flow Meters using precision calibrators under strictly controlled

conditions. NIST traceable calibrations are available. Calibrations can also be per-

formed at customers' site using available standards.

Factory calibrations are performed using NIST traceable precision volumetric cal-

ibrators incorporating liquid sealed frictionless actuators.

Generally, calibrations are performed using dry nitrogen gas. The calibration can

then be corrected to the appropriate gas desired based on relative correction [K]

factors shown in the gas factor table (see APPENDIX III). A reference gas, other

than nitrogen, may be used to better approximate the flow characteristics of cer-

tain gases.This practice is recommended when a reference gas is found with ther-

modynamic properties similar to the actual gas under consideration. The appro-

priate relative correction factor should be recalculated (see section 9).

It is standard practice to calibrate Mass Flow Meters with dry nitrogen gas at

70.0 F (21.1 C), 20 psia (137.9 kPa absolute) inlet pressure and 0 psig outlet

pressure. It is best to calibrate FMA 4000 transducers to actual operating condi-

tions. Specific gas calibrations of non-toxic and non-corrosive gases are available

for specific conditions. Please contact your Omega^®for a price quotation.

It is recommended that a flow calibrator be used which has at least four times bet-

ter collective accuracy than that of the Mass Flow Meter to be calibrated.

Equipment required for calibration includes: a flow calibration standard, PC with

available RS485 / RS232 communication interface, a certified high sensitivity

multi meter (for analog output calibration only), an insulated (plastic) screwdriver,

a flow regulator (for example - metering needle valve) installed upstream from the

Mass Flow Meter, and a pressure regulated source of dry filtered nitrogen gas (or

other suitable reference gas). Using Omega^®supplied calibration and mainte-

nance software to simplify the calibration process is recommended.

Gas and ambient temperature, as well as inlet and outlet pressure conditions,

should be set up in accordance with actual operating conditions.

7.2

Gas Flow Calibration of FMA 4000 Mass Flow Meter

All adjustments in this section are made from the outside of the meter

via digital communication interface between a PC (terminal) and FMA

4000. There is no need to disassemble any part of the instrument or

perform internal PCB component (potentiometers) adjustment.

ꢀ

FMA 4000 Mass Flow Meters may be field recalibrated/checked for the same

range they were originally factory calibrated for. When linearity adjustment is

needed or flow range changes are being made, proceed to step 7.2.3. Flow range

changes may require a different Restrictor Flow Element (RFE). Consult Omega^®

for more information.

7.2.1 Connections and Initial Warm Up

Power up the Mass Flow Meter for at least 15 minutes prior to commencing the

calibration procedure. Establish digital RS485 / RS232 communication between

PC (communication terminal) and the FMA 4000. Start Omega^®supplied calibra-

tion and maintenance software on the PC.

7.2.2 ZERO Check/Adjustment

Using Omega^®supplied calibration and maintenance software open Back Door

access:

Query/BackDoor/Open

When software prompts with Warning, click the [YES] button. This will open the

access to the rest of the Query menu.

Start Sensor Compensated Average reading:

Query/Read/ SensorCompAverage

This will display Device Sensor Average ADC counts.

With no flow conditions, the sensor Average reading must be in the range 120

10 counts. If it is not, perform Auto Zero procedure (see section 5.3.10 “Zero

Calibration”).

7.2.3 Gas Linearization Table Adjustment

Note: Your FMA 4000 Digital Mass Flow Meter was calibrated at the

ꢀ

factory for the specified gas and full scale flow range (see device’s

front label). There is no need to adjust the gas linearization table

unless linearity adjustment is needed, flow range has to be changed,

or new additional calibration is required. Any alteration of the gas

linearization table will VOID calibration warranty supplied with instrument.

Gas flow calibration parameters are separately stored in the Gas Dependent por-

tion of the EEPROM memory for each of 10 calibration tables. See APPENDIX I

for complete list of gas dependent variables.

Note: Make sure the correct gas number and name selected are

ꢀ

current. All adjustments made to the gas linearization table will be

applied to the currently selected gas. Use Gas Select command via

digital communication interface (see paragraph 8.3 ASCII Command

Set “FMA 4000 SOFTWARE INTERFACE COMMANDS”) or Omega^®

supplied calibration and maintenance software to verify current gas

table or select a new gas table.

The FMA 4000 gas flow calibration involves building a table of the actual flow val-

ues (indexes 114, 116, 118, 120, 122, 124, 126, 128, 130, 132, 134) and corre-

sponding sensor readings (indexes 113, 115, 117, 118, 119, 121, 123, 125, 127,

129, 131, 133).

Actual flow values are entered in normalized fraction format: 100.000 % F.S. cor-

responds to 1.000000 flow value and 0.000 % F.S. corresponds to 0.000000 flow

value. The valid range for flow values is from 0.000000 to 1.000000 (note: FMA

4000 will accept up to 6 digits after decimal point).

Sensor readings are entered in counts of 12 bits ADC output and should always

be in the range of 0 to 4095.There are 11 elements in the table so the data should

be obtained at an increment of 10.0 % of full scale (0.0, 10.0, 20.0, 30.0, 40.0,

50.0, 60.0, 70.0, 80.0, 90.0 and 100.0 % F.S.).

Note: Do not alter memory index 113 (must be 120 counts) and 114

(must be 0.0). These numbers represent zero flow calibration points

and should not be changed.

ꢀ

If a new gas table is going to be created, it is recommended to start calibration

from 100% full scale. If only linearity adjustment is required, calibration can be

started in any intermediate portion of the gas table.

Using the flow regulator, adjust the flow rate to 100% of full scale flow. Check the

flow rate indicated against the flow calibrator. Observe the flow reading on the

FMA 4000. If the difference between calibrator and FMA 4000 flow reading is

more than 0.5% F.S., make a correction in the sensor reading in the correspon-

ding position of the linearization table (see Index 133).

If the FMA 4000 flow reading is more than the calibrator reading, the number of

counts in the index 133 must be decreased. If the FMA 4000 flow reading is less

than the calibrator reading, the number of counts in the index 133 must be

increased. Once Index 133 is adjusted with a new value, check the FMA 4000 flow

rate against the calibrator and, if required, perform additional adjustments for

Index 133.

If a simple communication terminal is used for communication with the FMA 4000,

then “MW” (Memory Write) command from the software interface commands set

may be used to adjust sensor value in the linearization table (see section 8.3 for

complete software interface commands list).

Memory Read “MR” command can be used to read the current value of the index.

Assuming the FMA 4000 is configured with RS485 interface and has address

“11”, the following example will first read the existing value of Index 133 and then

write a new adjusted value:

!11,MR,133[CR]

- reads EEPROM address 133

!11,MW,133,3450[CR] - writes new sensor value (3450 counts) in to the index 133

Once 100% F.S. calibration is completed, the user can proceed with calibration for

another 9 points of the linearization table by using the same approach.

Note: It is recommended to use Omega^®supplied calibration and

maintenance software for gas table calibration. This software includes

an automated calibration procedure which may radically simplify

reading and writing for the EEPROM linearization table.

ꢀ

7.3

Analog output Calibration of FMA 4000

Mass Flow Meter

FMA 4000 series Mass Flow Meters are equipped with

calibrated 0-5 Vdc and 4-20 mA output signals. The set

of the jumpers (J7A, J7B, J7C) on the printed circuit

board is used to switch between 0-5 Vdc and 4-20 mA

output signals (Figure c-1 “FMA 4000 configuration

jumpers”).

AutoZero/Reset

push button.

FUNCTION J7A

JCD

J7B

6-10 7-11

2-6 3-7

J7C

ANALOG

OUTPUT

0-5 VDC

4-20 mA

OFF

5-9

1-5

RS485

8-12

4-8

TERMINAL

RESISTOR

J7 Jumpers

Figure c-1 FMA 4000 Analog Output Configuration Jumpers

The FMA 4000 analog output calibration involves calculation and storing of the

offset and span variables in the EEPROM for each available output. The 0-5 Vdc

output has only scale variable and 20 mA output has offset and scale variables.

The following is a list of the Gas independent variables used for analog output

computation:

Note: The analog output available on the FMA 4000 Digital Mass Flow

ꢀ

Meter was calibrated at the factory for the specified gas and full scale

flow range (see the device’s front label). There is no need to perform

analog output calibration unless the EEPROM IC was replaced or

offset/span adjustment is needed. Any alteration of the analog output

scaling variables in the Gas independent table will VOID calibration

warranty supplied with instrument.

Note: It is recommended to use the Omega^®supplied calibration and

maintenance software for analog output calibration. This software

includes an automated calibration procedure which may radically

simplify calculation of the offsets and spans variables and, the reading

and writing for the EEPROM table.

Index Name

Description

AoutScaleV

- DAC 0-5 Vdc Analog Output Scale

AoutScale_mA - DAC 4-20mA Analog Output Scale

AoutOffset_mA - DAC 4-20mA Analog Output Offset

7.3.1 Initial Setup

Power up the Mass Flow Meter for at least 15 minutes prior to commencing the

calibration procedure. Make sure absolutely no flow takes place through the

meter. Establish digital RS485 / RS232 communication between PC (communi-

cation terminal) and FMA 4000. The commands provided below assume that cal-

ibration will be performed manually (w/o Omega^®supplied calibration and main-

tenance software) and the device has RS485 address 11. If Omega^®supplied cal-

ibration and maintenance software is used, skip the next section and follow the

software prompts.

Enter Backdoor mode by typing:

Unit will respond with:

Disable DAC update by typing:

Unit will respond with:

!11,MW,1000,1[CR]

!11,BackDoorEnabled: Y

!11,WRITE,4,D[CR]

!11,DisableUpdate: D

7.3.2 Gas flow 0-5 Vdc analog output calibration

1. Install jumpers J7A, J7B and J7C on the PC board for 0-5 Vdc output (see Table VI).

2. Connect a certified high sensitivity multi meter set for the voltage measurement to the

pins 2 (+) and 1 (-) of the 15 pins D connector.

3. Write 4000 counts to the DAC channel 1: !11,WRITE,1,4000[CR]

4. Read voltage with the meter and calculate:

5. Save FlowOutScaleV in to the EEPROM:

Where: X – the calculated AoutScaleV value.

!11,MW,25,X[CR]

7.3.3 Gas flow 4-20 mA analog output calibration

1. Install jumpers J7A, J7B and J7C on the PC board for 4-20 mA output (see Table VI).

2. Connect a certified high sensitivity multi meter set for the current measurement to

pins 2 (+) and 1 (-) of the 15 pins D connector.

3. Write 4000 counts to the DAC channel 1:

4. Read current with the meter and calculate:

!11,WRITE,1,4000[CR]

5. Write zero counts to the DAC channel 1:

!11,WRITE,1,0CR]

6. Read offset current with the meter and calculate:

7. Save AoutScale_mA in to the EEPROM:

Save AoutOffset_mA in to the EEPROM:

!11,MW,27,Y[CR]

!11,MW,28,Z[CR]

Where: Y – the calculated AoutScale_mA value.

Z – the calculated AoutOffset_mA value.

Note: When done with the analog output calibration make sure the

DAC update is enabled and the BackDoor is closed

(see command below).

ꢀ

Enable DAC update by typing:

Unit will respond with:

!11,WRITE,4,N[CR]

!11,DisableUpdate: N

Close BackDoor access by typing:

Unit will respond with:

!11,MW,1000,0[CR]

!11,BackDoorEnabled: N

RS485 / RS232 SOFTWARE INTERFACE COMMANDS

General

8.1

The standard FMA 4000 comes with an RS485 interface. For the optional RS232

interface, the start character (!) and two hexadecimal characters for the address

must be omitted. The protocol described below allows for communications with

the unit using either a custom software program or a “dumb terminal.” All values

are sent as printable ASCII characters. For RS485 interface, the start character is

always (!).The command string is terminated with a carriage return (line feeds are

automatically stripped out by the FMA 4000). See section 2.2.3 for information

regarding communication parameters and cable connections.

8.2

Commands Structure

The structure of the command string:

!<Addr>,<Cmd>,Arg1,Arg2,Arg3,Arg4<CR>

Where:

Start character **

RS485 device address in the ASCII representation of hexadecimal

(00 through FF are valid).**

Addr

Cmd

The one or two character command from the table below.

Arg1 to Arg4 The command arguments from the table below.

Multiple arguments are comma delimited.

Carriage Return character.

Note: ** Default address for all units is 11. Do not submit start

character and two character hexadecimal device address for

RS232 option.

ꢀ

Several examples of commands follow. All assume that the FMA 4000 has been

configured for address 18 (12 hex) on the RS485 bus:

1. To get current calibration tables: !12,G<CR>

The FMA 4000 will reply:

!12,G 0 AIR<CR>

(Assuming Current Gas table is #0, calibrated for AIR )

2. To get current Alarm status:

The FMA 4000 will reply:

3. To get a flow reading:

!12,A,R<CR>

!12,N<CR> (Assuming no alarm conditions)

!12,F<CR>The FMA 4000 will reply:

!12,50.0<CR> (Assuming the flow is at 50% FS)

4. Set the high alarm limit to 85% of full scale flow rate:

!12,A,H,85.0<CR>

The FMA 4000 will reply:

!12,AH85.0<CR>

Note: Address 00 is reserved for global addressing. Do not assign, the

global address for any device. When command with global address is

sent, all devices on the RS485 bus execute the command but do not

reply with an acknowledge message.

ꢀ

The global address can be used to change RS485 address for a particular device with

unknown address:

Make sure only one device (which address must be changed) is connected to the

RS485 network.

Type the memory write command with global address: !00,MW,7,XX[CR] where

XX, the new hexadecimal address, can be [01 – FF].

After assigning the new address, a device will accept commands with the new address.

Note: Do not assign the same RS485 address for two or more

ꢀ

devices on the same RS485 bus. If two or more devices with the same

address are connected to the one RS485 network, a communication

collision will take place on the bus and communication errors will occur.

8.3

ASCII Commands Set

TROUBLESHOOTING

Common Conditions

9.1

Your FMA 4000 Digital Mass Flow Meter was thoroughly checked at numerous

quality control points during and after manufacturing and assembly operations. It

was calibrated according to your desired flow and pressure conditions for a given

gas or a mixture of gases.

It was carefully packed to prevent damage during shipment. Should you feel that

the instrument is not functioning properly, please check for the following common

conditions first:

Are all cables connected correctly? Are there any leaks in the installation? Is the

power supply correctly selected according to requirements? When several meters

are used a power supply with appropriate current rating should be selected.

Were the connector pinouts matched properly? When interchanging with other

manufacturers' equipment, cables and connectors must be carefully wired for cor-

rect pin configurations. Is the pressure differential across the instrument sufficient?

9.2

Troubleshooting Guide

NO.

INDICATION

LIKELY REASON

SOLUTION

No zero reading after

15 min. warm up time has been changed.

and no flow condition.

Embedded temperature Perform Auto Zero Procedure (see section

5.3.6 “Zero Calibration”).

Status LED indicator

and LCD Display

Power supply is bad or Measure voltage on pins 7 and 5 of the 15

polarity is reversed.

pin D-connector. If voltage is out of

specified range, then replace power supply

with a new one. If polarity is reversed

(reading is negative) make correct

connection.

remains blank when

unit is powered up. No

response when flow is

introduced from analog

outputs 0-5 Vdc or

4-20 mA.

PC board is defective.

Return FMA 4000 to factory for repair.

LCD Display reading or Output 0-5 Vdc signal

/ and analog output (pins 2–1 of the

0-5 Vdc signal fluctuate D-connector) is shorted resistance is more than 1000 Ohm.

Check external connections to pin 2 – 1, of

the D-connector. Make sure the load

in wide range during

flow measurement.

on the GND or

overloaded.

LCD Display reading

does correspond to the

correct flow range, but

0-5 Vdc output signal

does not change

(always the same read

ing or around zero).

Output 0-5 Vdc

schematic is burned

out or damaged.

Return FMA 4000 to factory for repair.

Analog flow output

scale and offset

variable are corrupted. recalibration (see section 7.3).

Restore original EEPROM scale and offset

variable or perform analog output

LCD Display reading

and 0-5 Vdc output

voltage do correspond

to the correct flow

range, but 4-20 mA

output signal does not

change (always the

same or reading

External loop is open or Check external connections to pins 2 and

load resistance more

than 500 Ohm.

15 of the D-connector. Make sure the loop

resistance is less than 500 Ohm.

Output 4-20 mA

schematic is burned

out or damaged.

Return FMA 4000 to factory for repair.

around 4.0 mA).

Calibration is off (more FMA 4000 has initial

than 1.0 % F.S.). zero shift.

Shut off the flow of gas into the FMA 4000

(ensure gas source is disconnected and no

seepage or leak occurs into the meter).

Wait for 15 min. with no flow condition and

perform Auto Zero calibration Procedure

(see section 5.3.7 “Zero Calibration”).

LCD Display reading is Sensor under

Lower the flow through FMA 4000 within

calibrated range or shut down the flow

completely. The swamping condition will

end automatically.

swamping conditions

above maximum flow

range and output volt

age 0-5 Vdc signal is

more than 5.0 Vdc

when gas flows

(flow is more than 10%

above maximum flow

rate for particular

FMA 4000).

through the FMA 4000.

PC board is defective.

Return FMA 4000 to factory for repair.

NO.

INDICATION

LIKELY REASON

SOLUTION

Gas flows through the The gas flow is too low Check maximum flow range on transducer’s

FMA 4000, but LCD for particular model of front panel and make required flow

Display reading and the FMA 4000.

output voltage 0-5 Vdc

adjustment.

FMA 4000 models:

Unscrew the inlet compression fitting of the

meter and reinstall RFE (see section 6.2.2).

NOTE: Calibration accuracy can be affected.

signal do not respond

to flow.

RFE is not connected

properly to the inlet

fitting.

Sensor or PC board is Return FMA 4000 to factory for repair.

defective.

Gas does not flow

through the FMA 4000

with inlet pressure

applied to the inlet

fitting. LCD Display

reading and output

voltage 0-5 Vdc signal

show zero flow.

Filter screen obstructed Flush clean or disassemble to remove

at inlet.

impediments or replace the filter screen

(see section 6.2).

NOTE: Calibration accuracy can be affected.

10 Gas flows through the Direction of the gas

Check the direction of gas flow as indicated

by the arrow on the front of the meter and

make required reconnection in the

installation.

FMA 4000, output

voltage 0-5 Vdc signal

does not respond to

flow (reading near

1mV).

flow is reversed.

FMA 4000 is connected Locate and correct gas leak in the system.

in the installation with If FMA 4000 has internal leak return it to

back pressure

factory for repair.

conditions and gas leak

exist in the system.

11 The Status LED

indicator is rapidly

flashing with UMBER

color on /off.

Sensor temperature is Make sure the ambient and gas

too low.

temperatures are within specified range

(above 5 C)

12 The Status LED

indicator is rapidly

flashing with RED color

on /off.

Sensor temperature is Make sure the ambient and gas

too high.

temperatures are within specified range

(below 50 C).

13 The Status LED

indicator is rapidly

flashing with RED and

UMBER colors.

MCU temperature is too Disconnect power from the FMA 4000.

high (overload).

Make sure the ambient temperature is with

in specified range (below 50 C). Let the

device cool down for at least 15 minutes.

Apply power to the FMA 4000 and check

status LED indication. If overload condition

will be indicated again the unit has to be

returned to the factory for repair.

14 The Status LED

indicator is constantly

on with the RED light.

Fatal Error (EEPROM

or Auto Zero error).

Cycle the power on the FMA 4000. If Status

LED still constantly on with RED light, wait

6 minutes and start Auto Zero function (see

5.3.7 Zero Calibration). If after Zero

Calibration the Fatal Error condition will be

indicated again the unit has to be returned

to the factory for repair.

9.3

Technical Assistance

OMEGA7 Engineering will provide technical assistance over the phone to quali-

fied repair personnel. Please call our Flow Department at 800-872-9436 Ext.

2298. Please have your Serial Number and Model Number ready when you call.

10.

CALIBRATION CONVERSIONS FROM

REFERENCE GASES

The calibration conversion incorporates the K factor. The K factor is derived from

gas density and coefficient of specific heat. For diatomic gases:

K_gas

d X C_p

where d = gas density (gram/liter)

C_p

= coefficient of specific heat (cal/gram)

Note in the above relationship that d and Cp are usually chosen at the same con-

ditions (standard, normal or other).

If the flow range of a Mass Flow Meter remains unchanged, a relative K factor is

used to relate the calibration of the actual gas to the reference gas.

Q_a

Q_r

K_a

K_r

K =

where Q_a

mass flow rate of an actual gas (sccm)

mass flow rate of a reference gas (sccm)

K factor of an actual gas

Q_r

K_a

K_r

K factor of a reference gas

For example, if we want to know the flow rate of oxygen and wish to calibrate

with nitrogen at 1000 SCCM, the flow rate of oxygen is:

Q_O2= Q_a= Q_rX K = 1000 X 0.9926 = 992.6 sccm

where K = relative K factor to reference gas (oxygen to nitrogen)

Note: If particular K factor is activated via digital interface, the user

does not need to perform any conversion. All conversion computations

will be performed internally by MCU.

ꢀ

APPENDIX I

OMEGA7 FMA 4000 EEPROM Variables Rev.A0 [10/2/2007]

Gas Independent Variables

INDEX

NAME

BlankEEPROM

SerialNumber

ModelNumber

SoftwareVer

TimeSinceCalHr

Options1

DATA TYPE

char[10]

char[20]

char[10]

float

NOTES

Do not modify. Table Revision [PROTECTED]

Serial Number [PROTECTED]

Model Number [PROTECTED]

Firmware Version [PROTECTED]

Time since last calibration in hours.

Misc. Options*

uint

BackLight

int

Back Light Level [0-4095]

AddressRS485

GasNumber

FlowUnits

char[4]

int

Two character address for RS485 only

Current Gas Table Number [0-9]

int

Current Units of Measure [0-22]

AlarmMode

LowAlarmPFS

HiAlarmPFS

AlmDelay

char

Alarm Mode ['E’- Enabled, 'D’ - Disabled]

Low Flow Alarm Setting [%FS] 0-Disabled

High Flow Alarm Setting [%FS] 0-Disabled

Flow Alarm Action Delay [0-3600sec] 0-Disabled

Relays Assignment Setting (N, T, H, L, R, M)

Totalizer Mode ['E’- Enabled, 'D’ - Disabled]

Totalizer Volume in %*s (updated every 6 min)

Start Totalizer at flow [%FS] 0 - Disabled

Totalizer Action Limit Volume [%*s] 0-Disabled

D-Disabled, I-Internal, U-User Defined

Internal K-Factor Index [0-35]**

float

uint

RelaySetting

TotalMode

char[4]

char

Total

float

TotalFlowStart

TotalVolStop

KfactorMode

KfactorIndex

UserDefKfactor

UDUnitKfactor

UDUnitTimeBase

UDUnitDensity

AoutScaleV

DRC_DP

float

char

int

float

User Defined K-Factor

float

K-Factor for User Defined Units of Measure

User Defined Unit Time Base [1, 60, 3600 sec]

User Defined Unit Density Flag [Y, N]

DAC 0-5 Vdc Analog Output Scale

H/W DRC DP settings [0-255]

int

char

float

AoutScale_mA

AoutOffset_mA

SensorZero

Klag [0]

float

DAC 4-20mA Analog Output Scale

DAC 4-20mA Analog Output Offset

DPW value for Sensor Zero [0-1023]

DRC Lag Constant [Do Not Alter]

float

uint

float

Klag [1]

float

Klag [2]

float

Klag [3]

float

Klag [4]

float

INDEX

NAME

Klag [5]

DATA TYPE

float

NOTES

DRC Lag Constant [Do Not Alter]

Gain for DRC Lag Constant [Do Not Alter]

Resistance when last AutoZero was done [0-4095 count]

Resistance correction coefficient [PFS/count]

Alarm Latch [0-3]

Kgain[0]

float

Kgain[1]

float

Kgain[2]

float

Kgain[3]

float

Kgain[4]

float

Kgain[5]

float

Zero_T

float

Tcor_K

float

AlarmLatch

TotalWarmDisable

Reserved1

LCD_Diagnostic

uint

char

Sensor Warm Up period Totalizer [D/E]

Reserved

uint

char

LCD Diagnostic Mode: [E/D]**

Flow Reading Averaging: [0,1,2]

(100, 250, 1000 ms), Default -1

Reserved2

uint

N _RollBack

char

uint

Back to N conversion mode: [E, D]

Reserved3

Reserved for Troubleshooting (do not change)

Calibration Table: Gas Dependent Variables.

INDEX

100

NAME

DATA TYPE

char[20]

float

NOTES

GasIdentifer

FullScaleFlow

StdTemp

Name of Gas [If not calibrated = “Uncalibrated”]

Full Scale Range in l/min

Standard Temperature

101

102

float

103

StdPressure

StdDensity

float

Standard Pressure

104

float

Gas Standard Density

Name of Gas used for Calibration

[If not calibrated=[“Uncalibrated”]

105

CalibrationGas

char[20]

106

107

108

109

110

111

112

113

114

115

116

117

118

119

120

121

122

123

124

125

126

127

128

129

130

131

132

133

134

CalibratedBy

CalibratedAt

char[20]

char[12]

float

uint

Name of person who performed actual calibration

Name of Calibration Facility

Calibration Date

DateCalibrated

DateCalibrationDue

Date Calibration Due

K_N

Gas Parameters: K-factor relative to N

K_F1

Reserved

K_F1

SensorTbl[0][Sensor Value]

SensorTbl[0][Flow]

Index 0: Must be 120 (zero value) Do not Alter!

Index 0: Must be 0.0 (zero PFS) Do not Alter!

10.0%F.S. A/D value from sensor [counts].

Actual Flow in PFS [0.1].

float

uint

SensorTbl[1][Sensor Value]

SensorTbl[1][Flow]

float

uint

SensorTbl[2][Sensor Value]

SensorTbl[2][Flow]

20.0%F.S. A/D value from sensor [counts].

Actual Flow in PFS [0.2].

float

uint

SensorTbl[3][Sensor Value]

SensorTbl[3][Flow]

30.0%F.S. A/D value from sensor [counts].

Actual Flow in PFS [0.3].

float

uint

SensorTbl[4][Sensor Value]

SensorTbl[4][Flow]

40.0%F.S. A/D value from sensor [counts].

Actual Flow in PFS [0.4].

float

uint

SensorTbl[5][Sensor Value]

SensorTbl[5][Flow]

50.0%F.S. A/D value from sensor [counts].

Actual Flow in PFS [0.5].

float

uint

SensorTbl[6][Sensor Value]

SensorTbl[6][Flow]

60.0%F.S. A/D value from sensor [counts].

Actual Flow in PFS [0.6].

float

uint

SensorTbl[7][Sensor Value]

SensorTbl[7][Flow]

70.0%F.S. A/D value from sensor [counts].

Actual Flow in PFS [0.7].

float

uint

SensorTbl[8][Sensor Value]

SensorTbl[8][Flow]

80.0%F.S. A/D value from sensor [counts].

Actual Flow in PFS [0.8].

float

uint

SensorTbl[9][Sensor Value]

SensorTbl[9][Flow]

90.0%F.S. A/D value from sensor [counts].

Actual Flow in PFS [0.9].

float

uint

SensorTbl[10][Sensor Value]

SensorTbl[10][Flow]

100.0%F.S. A/D value from sensor [counts].

Flow in PFS. Should be 1.0 Do not Alter!

float

Note: Values will be available for selected gas only.

APPENDIX II INTERNAL “K” FACTORS

ƽ CAUTION: K-Factors at best are only an approximation. K factors should not

be used in applications that require accuracy better than +/- 5 to 10%.

K Factor

Relative

to N₂

[Cal/g]

DENSITY

[g/I]

INDEX

ACTUAL GAS

Acetylene C2H2

Air

Allene (Propadiene) C3H4

Ammonia NH₃

0.5829

1.000

0.4346

.7310

.4036

0.24

0.352

.492

1.162

1.293

1.787

.760

Argon Ar

1.4573

0.6735

0.4089

0.5082

0.8083

0.38

.1244

0.1167

0.1279

0.1778

0.0539

0.0647

0.1369

0.1161

0.1113

0.3514

.4007

1.782

3.478

5.227

3.025

7.130

11.18

7.803

6.108

6.644

2.413

2.593

2.503

1.964

3.397

1.250

6.860

3.926

2.945

2.680

3.163

Arsine AsH3

Boron Trichloride BCl3

Boron Triflouride BF3

Bromine Br2

Boron Tribromide Br3

10 Boromine Pentaflouride BrF5

11 Boromine Triflouride BrF3

12 Bromotriflouromethane CBrF3

13 1,3-Butadiene C4H6

14 Butane C₄H₁₀

0.26

0.3855

0.3697

0.3224

.2631

0.2994

0.324

0.291

.7382

0.6026

1.00

15 1-Butane C4H8

0.3648

0.336

16 2-Butane C4H8 CIS

17 2-Butane C4H8 TRANS

18 Carbon Dioxide CO₂

19 Carbon Disulfide CS₂

0.374

.2016

0.1428

.2488

Carbon Monoxide C_O

21 Carbon Tetrachloride CCl4

22 Carbon Tetrafluoride (Freon-14) CF4

23 Carbonyl Fluoride COF2

24 Carbonyl Sulfide COS

25 Chlorine Cl₂

0.31

0.1655

0.1654

0.1710

0.1651

0.114

0.42

0.5428

0.6606

0.86

26 Chlorine Trifluoride ClF3

27 Chlorodifluoromethane (Freon-22) CHClF2

28 Chloroform CHCl₃

0.4016

0.4589

0.3912

0.1650

0.1544

0.1309

4.125

5.326

29 Chloropentafluoroethane (Freon-115) C2ClF5

30 Chlorotrifluoromethane (Freon-13) CClF3

31 Cyanogen C2N2

0.2418

0.3834

0.61

0.164

0.153

0.2613

1.241

3.419

6.892

4.660

3.322

.1786

.0899

32 Helium He

1.454

1.0106

33 Hydrogen H₂

34 Hydrogen H₂(> 100 L/min)

35 Oxygen O2

1.92

3.419

0.0899

1.427

0.9926

0.2193

APPENDIX III GAS FACTOR TABLE (“K FACTORS”)

ƽ CAUTION: K-Factors at best are only an approximation. K factors should not

be used in applications that require accuracy better than +/- 5 to 10%.

K FACTOR

Relative to N₂

[Cal/g]

Density

[g/I]

ACTUAL GAS

Acetylene C₂H₂

Air

Allene (Propadiene) C₃H₄

Ammonia NH₃

.5829

1.0000

.4346

.4036

.240

.352

.492

1.162

1.293

1.787

.760

.7310

*Argon Ar (<=10 L/min)

*Argon AR-1 (>=10 L/min)

1.4573

1.205

.1244

1.782

Arsine AsH₃

.6735

.4089

.5082

.8083

.38

.1167

.1279

.1778

.0539

.0647

.1369

.1161

.1113

.3514

.4007

.3648

.336

3.478

5.227

3.025

7.130

11.18

7.803

6.108

6.644

2.413

2.593

2.503

Boron Trichloride BCl₃

Boron Trifluoride BF₃

Bromine Br₂

Boron Tribromide Br₃

Bromine PentaTrifluoride BrF₅

Bromine Trifluoride BrF₃

Bromotrifluoromethane (Freon-13 B1) CBrF₃

1,3-Butadiene C₄H₆

Butane C₄H₁₀

.26

.3855

.3697

.3224

.2631

.2994

.324

1-Butene C₄H₈

2-Butene C₄H₈CIS

2-Butene C₄H₈TRANS

.291

.374

*Carbon Dioxide CO₂(<10 L/min)

*Carbon Dioxide CO₂-1 (>10 L/min)

.7382

.658

.2016

1.964

Carbon Disulfide CS₂

Carbon Monoxide C0

Carbon Tetrachloride CCl₄

Carbon Tetrafluoride (Freon-14)CF₄

Carbonyl Fluoride COF₂

Carbonyl Sulfide COS

.6026

1.00

.31

.1428

.2488

.1655

.1654

.1710

.1651

.114

.1650

.1544

.1309

.164

3.397

1.250

6.860

3.926

2.945

2.680

3.163

4.125

3.858

5.326

6.892

4.660

2.322

2.742

1.877

.42

.5428

.6606

.86

.4016

.4589

.3912

.2418

.3834

.61

Chlorine Cl₂

Chlorine Trifluoride ClF₃

Chlorodifluoromethane (Freon-22)CHClF₂

Chloroform CHCl₃

Chloropentafluoroethane(Freon-115)C₂ClF₅

Chlorotrifluromethane (Freon-13) CClF₃

CyanogenC₂N₂

.153

.2613

.1739

.3177

CyanogenChloride CICN

Cyclopropane C₃H₅

.6130

.4584

* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.

K FACTOR

Relative to N₂

[Cal/g]

Density

[g/I]

ACTUAL GAS

Deuterium D₂

Diborane B₂H₆

1.00

1.722

.508

.15

.1432

.140

.1882

.150

.1604

.224

.366

.3414

.3914

.420

.3395

.3513

.244

1.799

1.235

9.362

5.395

4.592

5.758

4.506

7.626

2.857

2.011

2.055

3.219

1.342

2.055

2.413

2.879

1.251

1.965

1.695

3.127

6.129

5.395

4.660

6.644

3.926

4.592

3.858

8.360

7.626

6.892

8.397

3.418

9.565

.4357

.1947

.3538

.4252

.2522

.4044

.2235

.4271

.3714

.3896

.2170

.50

Dibromodifluoromethane CBr₂F₂

Dichlorodifluoromethane (Freon-12) CCl₂F₂

Dichlofluoromethane (Freon-21) CHCl₂F

Dichloromethylsilane (CH₃)₂SiCl₂

Dichlorosilane SiH₂Cl₂

Dichlorotetrafluoroethane (Freon-114) C₂Cl₂F₄

1,1-Difluoroethylene (Freon-1132A) C₂H₂F₂

Dimethylamine (CH₃)₂NH

Dimethyl Ether (CH₃)₂O

2,2-Dimethylpropane C₃H₁₂

Ethane C₂H₆

Ethanol C₂H₆O

Ethyl Acetylene C₄H₆

Ethyl Chloride C₂H₅Cl

Ethylene C₂H₄

Ethylene Oxide C₂H₄O

Fluorine F₂

Fluoroform (Freon-23) CHF₃

Freon-11 CCl₃F

Freon-12 CCl₂F₂

Freon-13 CClF₃

Freon-13B1 CBrF₃

Freon-14 CF₄

Freon-21 CHCl₂F

Freon-22 CHClF₂

Freon-113 CCl₂FCClF₂

Freon-114 C₂Cl₂F₄

.3918

.3225

.3891

.60

.365

.268

.5191

.9784

.4967

.3287

.3538

.3834

.3697

.4210

.4252

.4589

.2031

.2240

.2418

.1760

.5696

.2668

.1873

.176

.1357

.1432

.153

.1113

.1654

.140

.1544

.161

.160

.164

.185

.1404

.1071

Freon-115 C₂ClF₅

Freon-C318 C₄F₈

Germane GeH₄

Germanium Tetrachloride GeCl₄

*Helium He (<50 L/min)

*Helium He-1 (>50 L/min)

*Helium He-2 (>10-50 L/min)

1.454

2.43

2.05

1.241

.1786

Hexafluoroethane C₂F₆(Freon-116)

Hexane C₆H₁₄

.2421

.1792

.1834

.3968

6.157

3.845

*Hydrogen H₂-1 (<10-100 L)

*Hydrogen H₂-2 (>10-100 L)

*Hydrogen H₂-3 (>100 L)

1.0106

1.35

1.9

3.419

.0899

* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.

K FACTOR

Relative to N₂

[Cal/g]

Density

[g/I]

ACTUAL GAS

Hydrogen Bromide HBr

1.000

.764

.9998

.9987

.7893

.80

.2492

.27

.2951

1.453

.0861

.1912

.3171

.3479

.0545

.1025

.2397

.1108

.3872

.3701

.0593

3.610

1.627

1.206

.893

5.707

3.613

1.520

9.90

Hydrogen Chloride HCl

Hydrogen Cyanide HCN

Hydrogen Fluoride HF

Hydrogen Iodide HI

Hydrogen Selenide H₂Se

Hydrogen Sulfide H₂S

Iodine Pentafluoride IF₅

Isobutane CH(CH₃)₃

Isobutylene C₄H₆

3.593

2.503

3.739

Krypton Kr

.7175

.75

.5328

.7175

*Methane CH₄(<=10 L/min)

*Methane CH₄-1 (>=10 L/min)

Methanol CH₃

.5843

.4313

.5835

.6299

.68

.5180

.2499

.2126

.3512

.51

.3274

.3547

.1106

.1926

.3221

.2459

.164

.1373

.387

.4343

.246

1.429

1.787

4.236

2.253

1.518

2.146

6.669

9.366

2.011

1.386

.900

Methyl Acetylene C₃H₄

Methyl Bromide CH₂Br

Methyl Chloride CH₃Cl

Methyl Fluoride CH₃F

Methyl Mercaptan CH₃SH

Methyl Trichlorosilane (CH₃)SiCl₃

Molybdenum Hexafluoride MoF₆

Monoethylamine C₂H₅NH₂

Monomethylamine CH₃NH₂

1.46

Neon NE

.990

1.000

.737

.4802

.6134

.7128

.176

.9926

.6337

.446

.2554

.2134

.3950

.174

.4438

.759

.2328

.2485

.1933

.1797

.1632

.2088

.185

.2193

.1917

.195

.38

.398

.1514

.197

.1394

.2374

1.339

1.25

Nitric Oxide NO

Nitrogen N₂

Nitrogen Dioxide NO₂

Nitrogen Trifluoride NF₃

2.052

3.168

2.920

1.964

8.397

1.427

2.406

2.144

2.816

3.219

4.571

8.388

4.418

1.517

Nitrosyl Chloride NOCl

Nitrous Oxide N₂O

Octafluorocyclobutane (Freon-C318) C₄F₈

Oxygen O₂

Oxygen Difluoride OF₂

Ozone

Pentaborane B₅H₉

Pentane C₅H₁₂

Perchloryl Fluoride ClO₃F

Perfluoropropane C₃F₈

Phosgene COCl₂

Phosphine PH₃

* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.

K FACTOR

Relative to N₂

[Cal/g]

Density

[g/I]

ACTUAL GAS

Phosphorous Oxychloride POCl₃

Phosphorous Pentafluoride PH₅

Phosphorous Trichloride PCl₃

Propane C₃H₈

Propylene C₃H₆

Silane SiH₄

Silicon Tetrachloride SiCl₄

Silicon Tetrafluoride SiF₄

Sulfur Dioxide SO₂

Sulfur Hexafluoride SF₆

Sulfuryl Fluoride SO₂F₂

Tetrafluoroethane (Forane 134A) CF₃CH₂F

Tetrafluorohydrazine N₂F₄

Trichlorofluoromethane (Freon-11) CCl₃F

Trichlorosilane SiHCl₃

.36

.3021

.30

.35

.40

.5982

.284

.3482

.69

.2635

.3883

.5096

.3237

.3287

.3278

.1324

.1610

.1250

.399

6.843

5.620

6.127

1.967

1.877

1.433

7.580

4.643

2.858

6.516

4.562

4.224

4.64

.366

.3189

.1270

.1691

.1488

.1592

.1543

.127

.182

.1357

.1380

6.129

6.043

1,1,2-Trichloro-1,2,2 Trifluoroethane

(Freon-113) CCl₂FCClF₂

.2031

.161

8.36

Triisobutyl Aluminum (C₄H₉)AL

Titanium Tetrachloride TiCl₄

Trichloro Ethylene C₂HCl₃

Trimethylamine (CH₃)₃N

Tungsten Hexafluoride WF₆

Uranium Hexafluoride UF₆

Vinyl Bromide CH₂CHBr

Vinyl Chloride CH₂CHCl

Xenon Xe

.0608

.2691

.32

.2792

.2541

.1961

.4616

.48

.508

.120

.163

.3710

.0810

.0888

.1241

.12054

.0378

8.848

8.465

5.95

2.639

13.28

15.70

4.772

2.788

5.858

1.44

APPENDIX IV COMPONENT DIAGRAM

TOP COMPONENT SIDE

Aug. 09, 2007

BOTTOM COMPONENT SIDE

Aug 09, 2007

APPENDIX V

DIMENSIONAL DRAWINGS

FMA 4000 WITHOUT READOUT

FMA 4000 WITH READOUT OPTION

WARRANTY/DISCLAIMER

OMEGA ENGINEERING, INC. warrants this unit to be free of defects in materials and workmanship for a

period of 13 months from date of purchase. OMEGA’s Warranty adds an additional one (1) month grace

period to the normal one (1) year product warranty to cover handling and shipping time. This ensures

that OMEGA’s customers receive maximum coverage on each product.

If the unit malfunctions, it must be returned to the factory for evaluation. OMEGA’s Customer Service

Department will issue an Authorized Return (AR) number immediately upon phone or written request.

Upon examination by OMEGA, if the unit is found to be defective, it will be repaired or replaced at no

charge. OMEGA’s WARRANTY does not apply to defects resulting from any action of the purchaser,

including but not limited to mishandling, improper interfacing, operation outside of design limits, improper

repair, or unauthorized modification. This WARRANTY is VOID if the unit shows evidence of having been

tampered with or shows evidence of having been damaged as a result of excessive corrosion; or current,

heat, moisture or vibration; improper specification; misapplication; misuse or other operating conditions

outside of OMEGA’s control. Components which wear are not warranted, including but not limited to con-

tact points, fuses, and triacs.

OMEGA is pleased to offer suggestions on the use of its various products. However, OMEGA nei-

ther assumes responsibility for any omissions or errors nor assumes liability for any damages

that result from the use of its products in accordance with information provided by OMEGA, either

verbal or written. OMEGA warrants only that the parts manufactured by it will be as specified and

free of defects. OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY KIND

WHATSOEVER, EXPRESS OR IMPLIED, EXCEPTTHAT OFTITLE, AND ALL IMPLIED WARRANTIES

INCLUDING ANY WARRANTY OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PUR-

POSE ARE HEREBY DISCLAIMED. LIMITATION OF LIABILITY:The remedies of purchaser set forth

herein are exclusive, and the total liability of OMEGA with respect to this order, whether based on

contract, warranty, negligence, indemnification, strict liability or otherwise, shall not exceed the

purchase price of the component upon which liability is based. In no event shall OMEGA be liable

for consequential, incidental or special damages.

CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1) as a

“Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or activity; or (2) in

medical applications or used on humans. Should any Product(s) be used in or with any nuclear

installation or activity, medical application, used on humans, or misused in any way, OMEGA assumes

no responsibility as set forth in our basic WARRANTY/ DISCLAIMER language, and, additionally,

purchaser will indemnify OMEGA and hold OMEGA harmless from any liability or damage whatsoever

arising out of the use of the Product(s) in such a manner.

RETURN REQUESTS/INQUIRIES

Direct all warranty and repair requests/inquiries to the OMEGA Customer Service Department. BEFORE

RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN AUTHORIZED

RETURN (AR) NUMBER FROM OMEGA’S CUSTOMER SERVICE DEPARTMENT (IN ORDER TO

AVOID PROCESSING DELAYS). The assigned AR number should then be marked on the outside of the

return package and on any correspondence.

The purchaser is responsible for shipping charges, freight, insurance and proper packaging to prevent

breakage in transit.

FOR WARRANTY RETURNS, please have

the following information available BEFORE

contacting OMEGA:

FOR NON-WARRANTY REPAIRS, consult OMEGA

for current repair charges. Have the following

information available BEFORE contacting OMEGA:

1. Purchase Order number under which

the product was PURCHASED,

1. Purchase Order number to cover the

COST of the repair,

2. Model and serial number of the product

under warranty, and

2. Model and serial number of the

product, and

3. Repair instructions and/or specific problems

relative to the product.

3. Repair instructions and/or specific

problems relative to the product.

OMEGA’s policy is to make running changes, not model changes, whenever an improvement is possible.

This affords our customers the latest in technology and engineering.

OMEGA is a registered trademark of OMEGA ENGINEERING, INC.

copied, reproduced, translated, or reduced to any electronic medium or machine-readable form, in whole or in part,

without the prior written consent of OMEGA ENGINEERING, INC.

Where Do I Find Everything I Need for

Process Measurement and Control?

OMEGA…Of Course!

Shop online at www.omega.com

TEMPERATURE

ꢁ

Thermocouple, RTD & Thermistor Probes, Connectors, Panels & Assemblies

Wire: Thermocouple, RTD & Thermistor

Calibrators & Ice Point References

Recorders, Controllers & Process Monitors

Infrared Pyrometers

PRESSURE, STRAIN AND FORCE

ꢁ

Transducers & Strain Gages

Load Cells & Pressure Gages

Displacement Transducers

Instrumentation & Accessories

FLOW/LEVEL

ꢁ

Rotameters, Gas Mass Flow Meter & Flow Computers

Air Velocity Indicators

Turbine/Paddlewheel Systems

Totalizers & Batch Controllers

pH/CONDUCTIVITY

ꢁ

pH Electrodes, Testers & Accessories

Benchtop/Laboratory Meters

Controllers, Calibrators, Simulators & Pumps

Industrial pH & Conductivity Equipment

DATA ACQUISITION

ꢁ

Data Acquisition & Engineering Software

Communications-Based Acquisition Systems

Plug-in Cards for Apple, IBM & Compatibles

Datalogging Systems

Recorders, Printers & Plotters

HEATERS

ꢁ

Heating Cable

Cartridge & Strip Heaters

Immersion & Band Heaters

Flexible Heaters

Laboratory Heaters

ENVIRONMENTAL

MONITORING AND CONTROL

ꢁ

Metering & Control Instrumentation

Refractometers

Pumps & Tubing

Air, Soil & Water Monitors

Industrial Water & Wastewater Treatment

pH, Conductivity & Dissolved Oxygen Instruments

M-4651/0508

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