DISCRETE SEMICONDUCTORS
General
Magnetoresistive sensors for
magnetic field measurement
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
The KMZ range of magnetoresistive sensors is
characterized by high sensitivity in the detection of
magnetic fields, a wide operating temperature range, a low
and stable offset and low sensitivity to mechanical stress.
They therefore provide an excellent means of measuring
both linear and angular displacement under extreme
environmental conditions, because their very high
sensitivity means that a fairly small movement of actuating
components in, for example, cars or machinery (gear
wheels, metal rods, cogs, cams, etc.) can create
measurable changes in magnetic field. Other applications
for magnetoresistive sensors include rotational speed
measurement and current measurement.
2
handbook, halfpage
R = R
∆ R cos
α
0
0
Permalloy
H
α
Current
I
MLC127
Examples where their properties can be put to good effect
can be found in automotive applications, such as wheel
speed sensors for ABS and motor management systems
and position sensors for chassis position, throttle and
pedal position measurement. Other examples include
instrumentation and control equipment, which often
require position sensors capable of detecting
Fig.2 The magnetoresistive effect in permalloy.
displacements in the region of tenths of a millimetre (or
even less), and in electronic ignition systems, which must
be able to determine the angular position of an internal
combustion engine with great accuracy.
Figure 2 shows a strip of ferromagnetic material, called
permalloy (19% Fe, 81% Ni). Assume that, when no
external magnetic field is present, the permalloy has an
internal magnetization vector parallel to the current flow
(shown to flow through the permalloy from left to right).
If an external magnetic field H is applied, parallel to the
plane of the permalloy but perpendicular to the current
flow, the internal magnetization vector of the permalloy will
rotate around an angle α. As a result, the resistance of R
of the permalloy will change as a function of the rotation
angle α, as given by:
Finally, because of their high sensitivity, magnetoresistive
sensors can measure very weak magnetic fields and are
thus ideal for application in electronic compasses, earth
field correction and traffic detection.
If the KMZ sensors are to be used to maximum advantage,
however, it is important to have a clear understanding of
their operating principles and characteristics, and how
their behaviour may be affected by external influences and
by their magnetic history.
R = RO + ∆ROcos2α
(1)
Operating principles
Ro and ∆Ro are material parameters and to achieve
Magnetoresistive (MR) sensors make use of the
magnetoresistive effect, the property of a current-carrying
magnetic material to change its resistivity in the presence
of an external magnetic field (the common units used for
magnetic fields are given in Table 1).
optimum sensor characteristics Philips use Fe19Ni81,
which has a high Ro value and low magnetostriction. With
this material, ∆Ro is of the order of 3%. For more
information on materials, see Appendix 1.
It is obvious from this quadratic equation, that the
resistance/magnetic field characteristic is non-linear and in
addition, each value of R is not necessarily associated
with a unique value of H (see Fig.3). For more details on
the essentials of the magnetoresistive effect, please refer
to the Section “Further information for advanced users”
later in this chapter or Appendix 1, which examines the MR
effect in detail.
Table 1 Common magnetic units
1 kA/m = 1.25 mTesla (in air)
1 mT = 10 Gauss
The basic operating principle of an MR sensor is shown in
Fig.2.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
In this basic form, the MR effect can be used effectively for
angular measurement and some rotational speed
measurements, which do not require linearization of the
sensor characteristic.
R
handbook, halfpage
In the KMZ series of sensors, four permalloy strips are
arranged in a meander fashion on the silicon (Fig.4 shows
one example, of the pattern on a KMZ10). They are
connected in a Wheatstone bridge configuration, which
has a number of advantages:
H
MLC128
• Reduction of temperature drift
Fig.3 The resistance of the permalloy as a
function of the external field.
• Doubling of the signal output
• The sensor can be aligned at the factory.
MBC930
Fig.4 KMZ10 chip structure.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
Two further resistors, RT, are included, as shown in Fig.5.
These are for trimming sensor offset down to (almost) zero
during the production process.
For some applications however, the MR effect can be used
to its best advantage when the sensor output
characteristic has been linearized. These applications
include:
• Weak field measurements, such as compass
applications and traffic detection;
• Current measurement; and
MLC129
• Rotational speed measurement.
handbook, halfpage
For an explanation of how the characteristic is linearized,
please refer to the Section “Further information for
advanced users” later in this chapter.
Philips magnetoresistive sensors
R
R
T
T
Based on the principles described, Philips has a family of
basic magnetoresistive sensors. The main characteristics
of the KMZ sensors are given in Table 2.
4
3
2
1
V
V
V
O
GND
CC
O
Fig.5 Bridge configuration with offset trimmed to
zero, by resistors RT.
Table 2 Main characteristics of Philips sensors
SENSITIVITY
FIELD
RANGE
(kA/m)(1)
LINEARIZE
MR
EFFECT
SENSOR
TYPE
VCC
(V)
Rbridge
(kΩ)
APPLICATION
EXAMPLES
PACKAGE
(mV ⁄ V)
---------------------
(kA ⁄ m)
KMZ10A
KMZ10A1(2)
KMZ10B
KMZ10C
SOT195
SOT195
SOT195
SOT195
−0.5 to +0.5
−0.05 to +0.05 ≤9
−2.0 to +2.0
−7.5 to +7.5
≤9
16.0
22.0
4.0
1.2
1.3
2.1
1.4
Yes
Yes
Yes
Yes
compass, navigation, metal
detection, traffic control
≤12
≤10
current measurement,
angular and linear position,
reference mark detection,
wheel speed
1.5
KMZ51
KMZ52
SO8
−0.2 to +0.2
−0.2 to +0.2
≤8
≤8
16.0
16.0
2.0
2.0
Yes
Yes
compass, navigation, metal
detection, traffic control
SO16
Notes
1. In air, 1 kA/m corresponds to 1.25 mT.
2. Data given for operation with switched auxiliary field.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
Flipping
The field (e.g. ‘−Hx’) needed to flip the sensor
magnetization, and hence the characteristic, depends on
the magnitude of the transverse field ‘Hy’: the greater the
field ‘Hy’, the smaller the field ‘−Hx’. This follows naturally,
since the greater the field ‘Hy’, the closer the
magnetization's rotation approaches 90°, and hence the
easier it will be to flip it into a corresponding stable position
in the ‘−x’ direction.
The internal magnetization of the sensor strips has two
stable positions. So, if for any reason the sensor is
influenced by a powerful magnetic field opposing the
internal aligning field, the magnetization may flip from one
position to the other, and the strips become magnetized in
the opposite direction (from, for example, the ‘+x’ to the
‘−x’ direction). As demonstrated in Fig.6, this can lead to
drastic changes in sensor characteristics.
Looking at the curve in Fig.7 where Hy = 0.5 kA/m, for
such a low transverse field the sensor characteristic is
stable for all positive values of Hx and a reverse field of
≈1 kA/m is required before flipping occurs. At Hy = 2 kA/m
however, the sensor will flip even at smaller values of ‘Hx’
(at approximately 0.5 kA/m).
MLC130
handbook, halfpage
V
O
(mV)
10
0
4
2
2
4
H
(kA/m)
y
10
reversal
of sensor
characteristics
Fig.6 Sensor characteristics.
MLC131
V
O
(mV)
100
H
=
y
2 kA/m
50
0.5 kA/m
3
0
3
2
1
1
2
H
(kA/m)
x
50
100
Fig.7 Sensor output ‘Vo’ as a function of the auxiliary field ‘Hx’ for several values of transverse field ‘Hy’.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
Figure 7 also shows that the flipping itself is not
instantaneous, because not all the permalloy strips flip at
the same rate. In addition, it illustrates the hysteresis effect
exhibited by the sensor. For more information on sensor
flipping, see Appendix 2 of this chapter.
MBB897
3
handbook, halfpage
R
bridge
(kΩ)
Effect of temperature on behaviour
Figure 8 shows that the bridge resistance increases
linearly with temperature, due to the bridge resistors’
temperature dependency (i.e. the permalloy) for a typical
KMZ10B sensor. The data sheets show also the spread in
this variation due to manufacturing tolerances and this
should be taken into account when incorporating the
sensors into practical circuits.
2
In addition to the bridge resistance, the sensitivity also
varies with temperature. This can be seen from Fig.9,
which plots output voltage against transverse field ‘Hy’ for
various temperatures. Figure 9 shows that sensitivity falls
with increasing temperature (actual values for given for
every sensor in the datasheets). The reason for this is
rather complex and is related to the energy-band structure
of the permalloy strips.
1
40
0
40
80
120
T
160
o
( C)
amb
Fig.8 Bridge resistance of a KMZ10B sensor as
a function of ambient temperature.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
MLC134
15
V
O
o
T
=
25 C
amb
(mV/V)
o
25 C
10
o
75 C
5
0
o
125 C
5
10
15
operating range
3
2
1
0
1
2
3
H
(kA/m)
y
Fig.9 Output voltage ‘Vo’ as a fraction of the supply voltage of a KMZ10B sensor as a function of transverse field
‘Hy’ for several temperatures.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
Figure 10 is similar to Fig.9, but with the sensor powered
by a constant current supply. Figure 10 shows that, in this
case, the temperature dependency of sensitivity is
significantly reduced. This is a direct result of the increase
in bridge resistance with temperature (see Fig.8), which
partly compensates the fall in sensitivity by increasing the
voltage across the bridge and hence the output voltage.
Figure 8 demonstrates therefore the advantage of
operating with constant current.
MLC135
75
o
T
=
25 C
amb
V
O
o
25 C
(mV/V)
50
o
75 C
o
125 C
25
0
25
50
75
operating range
4
2
0
2
4
H
(kA/m)
y
Fig.10 Output voltage ‘Vo’ of a KMZ10B sensor as a function of transverse field ‘Hy’ for several temperatures.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
Using magnetoresistive sensors
linear characteristics is required for compensation. Philips
KTY series are well suited for this purpose, as their
positive Temperature Coefficient (TC) matches well with
the negative TC of the MR sensor. The degree of
compensation can be controlled with the two resistors R7
and R8 and special op-amps, with very low offset and
temperature drift, should be used to ensure compensation
is constant over large temperature ranges.
The excellent properties of the KMZ magnetoresistive
sensors, including their high sensitivity, low and stable
offset, wide operating temperature and frequency ranges
and ruggedness, make them highly suitable for use in a
wide range of automotive, industrial and other
applications. These are looked at in more detail in other
chapters in this book; some general practical points about
using MR sensors are briefly described below.
Please refer to part 2 of this book for more information on
the KTY temperature sensors; see also the Section
“Further information for advanced users” later in this
chapter for a more detailed description of temperature
compensation using these sensors.
ANALOG APPLICATION CIRCUITRY
In many magnetoresistive sensor applications where
analog signals are measured (in measuring angular
position, linear position or current measurement, for
example), a good application circuit should allow for
sensor offset and sensitivity adjustment. Also, as the
sensitivity of many magnetic field sensors has a drift with
temperature, this also needs compensation. A basic circuit
is shown in Fig.11.
USING MAGNETORESISTIVE SENSORS WITH A COMPENSATION
COIL
For general magnetic field or current measurements it is
useful to apply the ‘null-field’ method, in which a magnetic
field (generated by a current carrying coil), equal in
magnitude but opposite in direction, is applied to the
sensor. Using this ‘feedback’ method, the current through
the coil is a direct measure of the unknown magnetic field
amplitude and it has the advantage that the sensor is being
operated at its zero point, where inaccuracies as result of
tolerances, temperature drift and slight non-linearities in
the sensor characteristics are insignificant. A detailed
discussion of this method is covered in Chapter “Weak
field measurement”.
In the first stage, the sensor signal is pre-amplified and
offset is adjusted. After temperature effects are
compensated, final amplification and sensitivity
adjustment takes place in the last stage. This basic circuit
can be extended with additional components to meet
specific EMC requirements or can be modified to obtain
customized output characteristics (e.g. a different output
voltage range or a current output signal).
Philips magnetoresistive sensors have a linear sensitivity
drift with temperature and so a temperature sensor with
V
= 5 V
S
offset
sensitivity
adjustment
adjustment
R7
2.4 kΩ
R9
33 kΩ
R2
500 kΩ
R5
140 kΩ
R1
100 kΩ
R12
150 kΩ
R3
22 kΩ
KMZ10B
R6
KTY82-210
1
R11
22 kΩ
8
op-amp
4
IC1
op-amp
3
2
2
3
6
5
7
V
= 0.2 V to 4.8 V
4
O
TLC2272
1
(with resistive load
R4
greater than 10 kΩ)
14 kΩ
R10
C1
R8
33 kΩ
10 nF
2.4 kΩ
MBH687
Fig.11 Basic application circuit with temperature compensation and offset adjustment.
10
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
Further information for advanced users
THE MR EFFECT
In sensors employing the MR effect, the resistance of the
sensor under the influence of a magnetic field changes as
it is moved through an angle α as given by:
Barber pole
handbook, halfpage
R = RO + ∆ROcos2α
(2)
I
I
It can be shown that
H2
sin2α =
for H ≤ H
O
(3)
-------
HO2
MLC125
Permalloy
Magnetization
and
sin2α = 1 for H > HO
(4)
where Ho can be regarded as a material constant
comprising the so called demagnetizing and anisotropic
fields.
Fig.12 Linearization of the magnetoresistive effect.
Applying equations (3) and (4) to equation (2) leads to:
H2
R = RO + ∆RO 1 –
for H ≤ H0
(5)
(6)
-------
HO2
A Wheatstone bridge configuration is also used for
linearized applications. In one pair of diagonally opposed
elements, the Barber poles are at +45° to the strip axis,
while in another pair they are at −45°. A resistance
increase in one pair of elements due to an external
magnetic field is thus ‘matched’ by a decrease in
resistance of equal magnitude in the other pair.
The resulting bridge imbalance is then a linear function of
the amplitude of the external magnetic field in the plane of
the permalloy strips, normal to the strip axis.
R = RO for H > HO
which clearly shows the non-linear nature of the MR effect.
More detailed information on the derivation of the formulae
for the MR effect can be found in Appendix 1.
LINEARIZATION
The magnetoresistive effect can be linearized by
depositing aluminium stripes (Barber poles), on top of the
permalloy strip at an angle of 45° to the strip axis (see
Fig.12). As aluminium has a much higher conductivity than
permalloy, the effect of the Barber poles is to rotate the
current direction through 45° (the current flow assumes a
‘saw-tooth’ shape), effectively changing the rotation angle
of the magnetization relative to the current from α to
α −45°.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
H2
HO2
∆R
2
H
R = RO
+
O + ∆ R
-----------
1 –
(7)
-------
H O
-------
O
The equation is linear where H/Ho = 0, as shown in Fig.7.
Likewise, for sensors using Barber poles arranged at an
angle of −45°, the equation derives to:
R
handbook, halfpage
H2
H02
∆R
2
H
R = RO
+
O – ∆ R
-----------
1 –
(8)
-------
H O
------
O
This is the mirror image of the characteristic in Fig.7.
H
Hence using a Wheatstone bridge configuration ensures
the any bridge imbalance is a linear function of the
amplitude of the external magnetic field.
MLC126
FLIPPING
As described in the body of the chapter, Fig.7 shows that
flipping is not instantaneous and it also illustrates the
hysteresis effect exhibited by the sensor. This figure and
Fig.14 also shows that the sensitivity of the sensor falls
with increasing ‘Hx’. Again, this is to be expected since the
moment imposed on the magnetization by ‘Hx’ directly
opposes that imposed by ‘Hy’, thereby reducing the degree
of bridge imbalance and hence the output signal for a
given value of ‘Hy’.
Fig.13 The resistance of the permalloy as a
function of the external field H after
linearization (compare with Fig.6).
For sensors using Barber poles arranged at an angle of
+45° to the strip axis, the following expression for the
sensor characteristic can be derived (see Appendix 1 on
the MR effect):
MLC132
150
V
O
H
=
x
(mV)
4 kA/m
100
2 kA/m
1 kA/m
50
0
0
2
4
6
8
10
H
12
(kA/m)
y
Fig.14 Sensor output ‘Vo’ as a function of the transverse field ‘Hy’ for several values of auxiliary field ‘Hx’.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
The following general recommendations for operating the
KMZ10 can be applied:
The greater the auxiliary field, the greater the disturbing
field that can be tolerated before flipping occurs.
For auxiliary fields above 3 kA/m, the SOAR graph shows
that the sensor is completely stable, regardless of the
magnitude of the disturbing field. It can also be seen from
this graph that the SOAR can be extended for low values
of ‘Hy’. In Fig.15, (for the KMZ10B sensor), the extension
for Hy < 1 kA/m is shown.
• To ensure stable operation, avoid operating the sensor
in an environment where it is likely to be subjected to
negative external fields (‘−Hx’). Preferably, apply a
positive auxiliary field (‘Hx’) of sufficient magnitude to
prevent any likelihood of flipping within he intended
operating range (i.e. the range of ‘Hy’).
• Before using the sensor for the first time, apply a positive
auxiliary field of at least 3 kA/m; this will effectively erase
the sensor’s magnetic ‘history’ and will ensure that no
residual hysteresis remains (refer to Fig.6).
TEMPERATURE COMPENSATION
With magnetoresistive sensors, temperature drift is
negative. Two circuits manufactured in SMD-technology
which include temperature compensation are briefly
described below.
• Use the minimum auxiliary field that will ensure stable
operation, because the larger the auxiliary field, the
lower the sensitivity, but the actual value will depend on
the value of Hd. For the KMZ10B sensor, a minimum
auxiliary field of approximately 1 kA/m is recommended;
to guarantee stable operation for all values of Hd, the
sensor should be operated in an auxiliary field of 3 kA/m.
The first circuit is the basic application circuit already given
(see Fig.11). It provides average (sensor-to-sensor)
compensation of sensitivity drift with temperature using the
KTY82-210 silicon temperature sensor. It also includes
offset adjustment (via R1); gain adjustment is performed
with a second op-amp stage. The temperature sensor is
part of the amplifier’s feedback loop and thus increases the
amplification with increasing temperature.
These recommendations (particularly the first one) define
a kind of Safe Operating ARea (SOAR) for the sensors.
This is illustrated in Fig.15, which is an example (for the
KMZ10B sensor) of the SOAR graphs to be found in our
data sheets.
The temperature dependant amplification A and the
temperature coefficient TCA of the first op-amp stage are
approximately:
R5
2RT
A =
1 +
for R8 = R7
------
R3
----------
R7
MLC133
12
handbook, halfpage
TCKTY
H
d
(kA/m)
TCA
=
for R = R
7
--------------------
R7
8
1 +
----------
2RT
8
RT is the temperature dependent resistance of the KTY82.
The values are taken for a certain reference temperature.
This is usually 25 °C, but in other applications a different
reference temperature may be more suitable.
SOAR
4
I
Figure 16 shows an example with a commonly-used
instrumentation amplifier. The circuit can be divided into
two stages: a differential amplifier stage that produces a
symmetrical output signal derived from the
magnetoresistive sensor, and an output stage that also
provides a reference to ground for the amplification stage.
II
0
0
1
2
3
4
H
(kA/m)
x
To compensate for the negative sensor drift, as with the
above circuit the amplification is again given an equal but
positive temperature coefficient, by means of a
KTY81-110 silicon temperature sensor in the feedback
loop of the differential amplifier.
Fig.15 SOAR of a KMZ10B sensor as a function of
auxiliary field ‘Hx’ and disturbing field ‘Hd’
opposing ‘Hx’ (area I).
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
V
S
OP1
R10
R
T
R12
KTY82-110
R14
R5
R6
R1
R
A
V
OP3
O
R4
R13
offset
R
B
R7
R3
R9
OP2
R11
KMZ10B
R2
MLC145
Fig.16 KMZ10B application circuit with instrumentation amplifier.
The amplification of the input stage (‘OP1’ and ‘OP2’) is
given by:
RT × TCKTY
RA + RB + RT
TCA
=
(11)
----------------------------------
RT + RB
For the given negative ‘TC’ of the magnetoresistive sensor
and the required amplification of the input stage ‘A1’, the
resistance ‘RA’ and ‘RB’ can be calculated by:
A1 = 1 +
(9)
--------------------
RA
where RT is the temperature dependent resistance of the
KTY82 sensor and RB is the bridge resistance of the
magnetoresistive sensor.
TC
1
R B = R T ×
KTY × 1 –
-----------------
– 1
(12)
-------
A1
TCA
The amplification of the complete amplifier can be
calculated by:
RT + RB
RA
=
(13)
--------------------
A1 – 1
R14
A = A1 ×
(10)
--------
where TCKTY is the temperature coefficient of the KTY
sensor and TCA is the temperature coefficient of the
amplifier. This circuit also provides for adjustment of gain
and offset voltage of the magnetic-field sensor.
R10
The positive temperature coefficient (TC) of the
amplification is:
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
APPENDIX 1: THE MAGNETORESISTIVE EFFECT
Figure 17 shows the geometry of a simple sensor where
the thickness (t) is much smaller than the width (w) which
is in turn, less than the length (l) (i.e. t « w ‹ l). With the
current (I) flowing in the x-direction (i.e. q = 0 or Q = f) then
the following equation can be obtained from equation 1:
R = R0 + DR cos2f(2)
Magnetoresistive sensors make use of the fact that the
electrical resistance ρ of certain ferromagnetic alloys is
influenced by external fields. This solid-state
magnetoresistive effect, or anisotropic magnetoresistance,
can be easily realized using thin film technology, so lends
itself to sensor applications.
and with a constant current Ι, the voltage drop in the
x-direction Ux becomes:
Resistance- field relation
The specific resistance ρ of anisotropic ferromagnetic
L
∆ρ
------
ρ
Ux = ρ⊥Ι
1 +
cos2φ
(3)
-----
wt
metals depends on the angle Θ between the internal
magnetization M and the current I, according to:
ρ(Θ) = ρ⊥ +(ρ⊥ −ρ||) cos2 Θ
Besides this voltage, which is directly allied to the
resistance variation, there is a voltage in the y-direction,
Uy, given by:
(1)
where ρ⊥ and ρ|| are the resistivities perpendicular and
parallel to M. The quotient (ρ⊥ −ρ||)/ρ⊥ = ∆ρ/ρ
is called the magnetoresistive effect and may amount to
several percent.
1
∆ρ
ρ
Uy =ρ⊥Ι
sinφcosφ
(4)
-- ------
t
This is called the planar or pseudo Hall effect; it
resembles the normal or transverse Hall effect but has a
physically different origin.
Sensors are always made from ferromagnetic thin films as
this has two major advantages over bulk material: the
resistance is high and the anisotropy can be made
uniaxial. The ferromagnetic layer behaves like a single
domain and has one distinguished direction of
magnetization in its plane called the easy axis (e.a.),
which is the direction of magnetization without external
field influence.
All sensor signals are determined by the angle φ between
the magnetization M and the ‘length’ axis and, as M
rotates under the influence of external fields, these
external fields thus directly determine sensor signals. We
can assume that the sensor is manufactured such that the
e.a. is in the x-direction so that without the influence of
external fields, M only has an x-component
(φ = 0˚ or 180˚).
Two energies have to be introduced when M is rotated by
external magnetic fields: the anisotropy energy and the
demagnetizing energy. The anisotropy energy Ek, is given
by the crystal anisotropy field Hk, which depends on the
material and processes used in manufacture. The
demagnetizing energy Ed or form anisotropy depends on
the geometry and this is generally a rather complex
relationship, apart from ellipsoids where a uniform
demagnetizing field Hd may be introduced. In this case, for
the sensor set-up in Fig.17.
handbook, halfpage
L
M
y
ϕ
W
ϑ
Ι
MBH616
x
M s
t
H ≈
(5)
--- ------
w µ 0
d
where the demagnetizing factor N − t/w, the saturation
magnetization Ms ≈ 1 T and the induction constant
-7
µ0 = 4π Vs/Am.
Fig.17 Geometry of a simple sensor.
The field H0 − Hk + t/w(M0/m0) determines the measuring
range of a magnetoresistive sensor, as f is given by:
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
resistance-field (R-H) dependence, so a simple
Hy
sinφ=
(6)
--------------------------
magnetoresistive element cannot be used directly for
linear field measurements. A magnetic biasing field can
be used to solve this problem, but a better solution is
linearization using barber-poles (described later).
Nevertheless plain elements are useful for applications
using strong magnetic fields which saturate the sensor,
where the actual value of the field is not being measured,
such as for angle measurement. In this case, the direction
of the magnetization is parallel to the field and the sensor
signal can be described by a cos2α function.
Hx
H +
------------
o
cosφ
where |Hy| ≤ |H0 + Hx| and Hx and Hy are the components
of the external field. In the simplest case Hx = 0, the volt-
ages Ux and Uy become:
2
Hy
L
∆ρ
------
ρ
Ux =ρ⊥l
1 +
1 –
(7)
-----
wt
------
H0
Hy
-- ------ ------
H0
1
t
∆ρ
ρ
1 – (Hy ⁄ H0)2
(8)
Sensors with inclined elements
Uy =ρ⊥l
Sensors can also be linearized by rotating the current path,
by using resistive elements inclined at an angle θ, as
shown in Fig.18. An actual device uses four inclined
resistive elements, two pairs each with opposite
inclinations, in a bridge.
(Note: if Hx = 0, then H0 must be replaced by
H0 + Hx/cos φ).
Neglecting the constant part in Ux, there are two main
differences between Ux and Uy:
1. The magnetoresistive signal Ux depends on the
The magnetic behaviour of such is pattern is more
complicated as Mo is determined by the angle of inclination
θ, anisotropy, demagnetization and bias field (if present).
Linearity is at its maximum for φ + θ ≈45˚, which can be
achieved through proper selection of θ.
square of Hy/H0, whereas the Hall voltage Uy is linear
for Hy « H0.
2. The ratio of their maximum values is L/w; the Hall
voltage is much smaller as in most cases L » w.
A stabilization field (Hst) in the x-direction may be
necessary for some applications, as this arrangement only
works properly in one magnetization state.
Magnetization of the thin layer
The magnetic field is in reality slightly more complicated
than given in equation (6). There are two solutions for
angle φ:
φ1 < 90˚ and φ2 > 90˚ (with φ1 + φ2 = 180˚ for Hx = 0).
Replacing φ by 180˚ - φ has no influence on Ux except to
change the sign of the Hall voltage and also that of most
linearized magnetoresistive sensors.
Therefore, to avoid ambiguity either a short pulse of a
proper field in the x-axis (|Hx| > Hk) with the correct sign
must be applied, which will switch the magnetization into
the desired state, or a stabilizing field Hst in the
x-direction can be used. With the exception of Hy « H0, it
is advisable to use a stabilizing field as in this case, Hx
values are not affected by the non-ideal behaviour of the
layer or restricted by the so-called ‘blocking curve’.
M
handbook, halfpage
0
ϕ
ϑ
Ι
ϑ
ϕ
Ι
M
0
MBH613
The minimum value of Hst depends on the structure of the
sensitive layer and has to be of the order of Hk, as an
insufficient value will produce an open characteristic
(hysteresis) of the sensor. An easy axis in the y-direction
leads to a sensor of higher sensitivity, as then
Ho = Hk −Hd.
Fig.18 Current rotation by inclined elements
(current and magnetization shown in
quiescent state).
Linearization
As shown, the basic magnetoresistor has a square
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
BARBER-POLE SENSORS
equal widths. The characteristic is plotted in Fig 20 and it
can be seen that for small values of Hy relative to H0, the
R-H dependence is linear. In fact this equation gives the
same linear R-H dependence as the planar Hall-effect
sensor, but it has the magnitude of the magnetoresistive
sensor.
A number of Philips’ magnetoresistive sensors use a
‘barber-pole’ construction to linearize the R-H relationship,
incorporating slanted strips of a good conductor to rotate
the current. This type of sensor has the widest range of
linearity, smaller resistance and the least associated
distortion than any other form of linearization, and is well
suited to medium and high fields.
MBH615
handbook, halfpage
R
handbook, halfpage
Permalloy
Barber pole
Ι
∆R
+
Ι
y
−
Ι
Magnetization
ϑ
R
0
MBH614
x
0
−1
−0.5
0
0.5
1
H
Y
H
0
Fig.19 Linearization of the magnetoresistive effect
with barber-poles (current and
Fig.20 Calculated R-H characteristic of a
barber-pole sensor.
magnetization shown in quiescent state).
Barber-pole sensors require a certain magnetization
state. A bias field of several hundred A/m can be
generated by the sensing current alone, but this is not
sufficient for sensor stabilization, so can be neglected. In
most applications, an external field is applied for this
purpose.
The current takes the shortest route in the high-resistivity
gaps which, as shown in Fig 19, is perpendicular to the
barber-poles. Barber-poles inclined in the opposite
direction will result in the opposite sign for the R-H
characteristic, making it extremely simple to realize a
Wheatstone bridge set-up.
Sensitivity
Due to the high demagnetization, in most applications
field components in the z-direction (perpendicular to the
layer plane) can be ignored. Nearly all sensors are most
sensitive to fields in the y-direction, with Hx only having a
limited or even negligible influence.
The signal voltage of a Barber-pole sensor may be
calculated from the basic equation (1) with Θ = φ + 45˚
(θ = + 45˚):
2
H
H y
Definition of the sensitivity S contains the signal and field
variations (DU and DH), as well as the operating voltage
U0 (as DU is proportional to U0):
L
1 ∆ρ ∆ρ
y
UBP =ρ⊥l
α 1 +
±
1 –
(9)
-----
wt
-- ------ ------ ------
------
H 0
2
ρ
ρ H 0
∆U 1
------- ------
∆H U 0
∆U
So =
=
(10)
---------------
U0∆H
where a is a constant arising from the partial shorting of the
resistor, amounting to 0.25 if barber-poles and gaps have
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
requires a high sensor resistance R with a large area A,
since there are limits for power dissipation and current
density. The current density in permalloy may be very high
(j > 106 A/cm2 in passivation layers), but there are weak
points at the current reversal in the meander (see section
on sensor layout) and in the barber-pole material, with
five-fold increased current density.
This definition relates DU to a unit operating voltage.
The highest (HG) and lowest (Hmin) fields detectable by
the sensor are also of significance. The measuring range
HG is restricted by non-linearity - if this is assumed at 5%,
an approximate value for barber-pole sensors is given by:
HG ≈0.5(H0 + Hx)
(11)
A high resistance sensor with U0 = 25 V and a maximum
S0 results in a value of 2.5 x 10-3
(A/m)-1 for Su or, converted to flux density, ST = 2000 V/T.
This value is several orders of magnitude higher than for a
normal Hall effect sensor, but is valid only for a much
narrower measuring range.
From this and equation (9) for signal voltage (UBP) for a
barber-pole sensor, the following simple relationship can
∆ρ
be obtained: HGS0 ≈0.5
(12)
------
ρ
Other sensor types have a narrower range of linearity and
therefore a smaller useful signal.
Materials
The lowest detectable field Hmin is limited by offset, drift
and noise. The offset is nearly cancelled in a bridge circuit
and the remaining imbalance is minimized by symmetrical
design and offset trimming, with thermal noise negligible in
most applications (see section on sensor layout). Proper
film deposition and, if necessary, the introduction of a
stabilization field will eliminate magnetization switching
due to domain splitting and the introduction of ‘Barkhausen
noise’.
Sensitivity S0 is essentially determined by the sum of the
anisotropy (Hk), demagnetization (Hd) and bias (Hx) fields.
The highest sensitivity is achievable with Hx = 0 and
Hd « Hk, although in this case S0 depends purely on Hk
which is less stable than Hd. For a permalloy with a
thickness greater than or equal to 20 µm, a width in
excess of 60 µm is required which, although possible, has
the drawback of producing a very low resistance per unit
area.
There are five major criteria for a magnetoresistive
material:
• Large magnetoresistive effect Dr/r (resulting in a high
signal to operating voltage ratio)
• Large specific resistance r (to achieve high resistance
value over a small area)
• Low anisotropy
• Zero magnetostriction (to avoid influence of mechanical
stress)
• Long-term stability.
Appropriate materials are binary and ternary alloys of Ni,
Fe and Co, of which NiFe (81/19) is probably the most
common.
Table 1 gives a comparison between some of the more
common materials, although the majority of the figures are
only approximations as the exact values depend on a
number of variables such as thickness, deposition and
post-processing.
The maximum theoretical S0 with this permalloy (at
Hk = 250 A/m and ∆ρ/ρ = 2.5%) is approximately:
mV
--------
1
Table 3 Comparison of magnetoresistive sensor
V
A
----
m
S0(max) = 10–4
= 100
(13)
--------------
materials
kA
------
m
Materials
ρ (10−8Ωm)
22
∆ρ/ρ(%)
2.2
ΙΙk(∆/m)
250
NiFe 81:19
NiFe 86:14
NiCo 50:50
NiCo 70:30
For the same reasons, sensors with reduced sensitivity
should be realized with increased Hd, which can be esti-
mated at a maximum for a barber-pole sensor at 40 kA/m.
A further reduction in sensitivity and a corresponding
growth in the linearity range is attained using a biasing
field. A magnetic shunt parallel to the magnetoresistor or
only having a small field component in the sensitive direc-
tion can also be employed with very high field strengths.
15
24
26
3
200
2.2
3.7
0.07
2500
2500
2000
CoFeB 72:8:20 86
∆ρ is nearly independent of these factors, but r itself
increases with thickness (t ≤ 40 nm) and will decrease
during annealing. Permalloys have a low Hk and zero
magnetostriction; the addition of Co will increase ∆ρ/ρ, but
A high signal voltage Ux can only be produced with a
sensor that can tolerate a high supply voltage Uo. This
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
this also considerably enlarges Hk. If a small temperature
coefficient of ∆ρ is required, NiCo alloys are preferable.
The amorphous alloy CoFeB has a low ∆ρ/ρ, high Hk and
slightly worse thermal stability but due to the absence of
grain boundaries within the amorphous structure, exhibits
excellent magnetic behaviour.
the more the magnetization rotates towards 90˚ and
therefore it becomes easier to flip the sensor into the
corresponding stable position in the ‘-x’ direction. This
means that a smaller -Hx field is sufficient to cause the
flipping action
As can be seen in Fig 22, for low transverse field strengths
(0.5 kA/m) the sensor characteristic is stable for all positive
values of Hx, and a reverse field of approximately 1 kA/m
is required to flip the sensor. However at higher values of
Hy (2 kA/m), the sensor will also flip for smaller values of
Hx (at 0.5 kA/m). Also illustrated in this figure is a
noticeable hysteresis effect; it also shows that as the
permalloy strips do not flip at the same rate, the flipping
action is not instantaneous.
APPENDIX 2: SENSOR FLIPPING
During deposition of the permalloy strip, a strong external
magnetic field is applied parallel to the strip axis. This
accentuates the inherent magnetic anisotropy of the strip
and gives them a preferred magnetization direction, so that
even in the absence of an external magnetic field, the
magnetization will always tend to align with the strips.
Providing a high level of premagnetization within the
crystal structure of the permalloy allows for two stable
premagnetization directions. When the sensor is placed in
a controlled external magnetic field opposing the internal
aligning field, the polarity of the premagnetization of the
strips can be switched or ‘flipped’ between positive and
negative magnetization directions, resulting in two stable
output characteristics.
MLC131
V
O
(mV)
H
=
100
y
2 kA/m
50
0.5 kA/m
3
0
3
2
1
1
2
H
(kA/m)
x
MLC130
50
handbook, halfpage
V
O
(mV)
100
10
0
4
2
2
4
Fig.22 Sensor output ‘Vo’ as a function of the
auxiliary field Hx.
H
(kA/m)
y
10
reversal
of sensor
characteristics
The sensitivity of the sensor reduces as the auxiliary field
Hx increases, which can be seen in Fig 22 and more
clearly in Fig 23. This is because the moment imposed on
the magnetization by Hx directly opposes that of Hy,
resulting in a reduction in the degree of bridge imbalance
and hence the output signal for a given value of Hy.
Fig.21 Sensor characteristics.
The field required to flip the sensor magnetization (and
hence the output characteristic) depends on the
magnitude of the transverse field Hy. The greater this field,
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
MLC132
150
V
O
H
=
x
(mV)
4 kA/m
100
2 kA/m
1 kA/m
50
0
0
2
4
6
8
10
H
12
(kA/m)
y
Fig.23 Sensor output ‘Vo’ as a function of the transverse field Hy.
A Safe Operating ARea (SOAR) can be determined for
magnetoresistive sensors, within which the sensor will not
flip, depending on a number of factors. The higher the
auxiliary field, the more tolerant the sensor becomes to
external disturbing fields (Hd) and with an Hx of 3 kA/m or
greater, the sensor is stabilized for all disturbing fields as
long as it does not irreversibly demagnetize the sensor. If
Hd is negative and much larger than the stabilising field Hx,
the sensor will flip. This effect is reversible, with the sensor
returning to the normal operating mode if Hd again
becomes negligible (see Fig 24). However the higher Hx,
the greater the reduction in sensor sensitivity and so it is
generally recommended to have a minimum auxiliary field
that ensures stable operation, generally around 1 kA/m.
The SOAR can also be extended for low values of Hx as
long as the transverse field is less than 1 kA/m. It is also
recommended to apply a large positive auxiliary field
before first using the sensor, which erases any residual
hysteresis
MLC133
12
handbook, halfpage
H
d
(kA/m)
8
SOAR
4
I
II
0
0
1
2
3
4
H
(kA/m)
x
Fig.24 SOAR of a KMZ10B sensor as a function of
auxiliary field ‘Hx’ (MLC133).
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
APPENDIX 3: SENSOR LAYOUT
different for these three families of sensors in every case,
the elements are linked in the same fashion to form the four
arms of a Wheatstone bridge. The meander pattern used
in the KMZ51 is more sophisticated and also includes
integrated compensation and flipping coils (see chapter on
weak fields); the KMZ41 is described in more detail in the
chapter on angle measurement.
In Philips’ magnetoresistive sensors, the permalloy strips
are formed into a meander pattern on the silicon substrate.
With the KMZ10 (see Fig 25) and KMZ51 series, four
barber-pole permalloy strips are used while the KMZ41
series has simple elements. The patterns used are
MBC930
Fig.25 KMZ10 chip structure.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
In one pair of diagonally opposed elements the
barber-poles are at +45˚ to the strip axis, with the second
pair at −45˚. A resistance increase in one pair of elements
due to an external magnetic field is matched by an equal
decrease in resistance of the second pair. The resulting
bridge imbalance is then a linear function of the amplitude
of the external magnetic field in the plane of the permalloy
strips normal to the strip axis.
MLC129
handbook, halfpage
This layout largely eliminates the effects of ambient
variations (e.g. temperature) on the individual elements
and also magnifies the degree of bridge imbalance,
increasing sensitivity.
R
R
T
T
4
3
2
1
V
V
V
O
GND
CC
O
Fig 26 indicates two further trimming resistors (RT) which
allow the sensors electrical offset to be trimmed down to
zero during the production process.
Fig.26 KMZ10 and KMZ11 bridge configuration.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
WEAK FIELD MEASUREMENT
Contents
static offset, an offset drift due to temperature variations of
about 6 (µV/V)K−1 can be expected and assuming an
ambient temperature up to 100 °C, the resulting offset can
be of the order of 2 mV/V.
• Fundamental measurement techniques
Taking these factors into account, with no external field a
sensor with a typical sensitivity of 15 mV/V (kA/m)−1 can
have an offset equivalent to a field of 130 A/m, which is
itself about four times the strength of a typical weak field
such as the earth’s geomagnetic field. Clearly, measures
to compensate for the sensor offset value have to be
implemented in weak field applications.
• Application note AN00022: Electronic compass design
using KMZ51 and KMZ52
• Application circuit: signal conditioning unit for compass
• Example 1: Earth geomagnetic field compensation in
CRT’s
• Example 2: Traffic detection
• Example 3: Measurement of current.
A technique called ‘flipping’ (patented by Philips) can be
used to control the sensor. Comparable to the ‘chopping’
technique used in the amplification of small electrical
signals, it not only stabilizes the sensor but also eliminates
the described offset effects.
Fundamental measurement techniques
Measurement of weak magnetic fields such as the earth’s
geomagnetic field (which has a typical strength of between
approximately 30 A/m and 50 A/m), or fields resulting from
very small currents, requires a sensor with very high
sensitivity. With their inherent high sensitivity,
magnetoresistive sensors are extremely well suited to
sensing very small fields.
When the bi-stable sensor is placed in a controlled,
reversible external magnetic field, the polarity of the
premagnetization (Mx) of the sensor strips can be switched
or flipped between the two output characteristics (see
Fig.27).
Philips’ magnetoresistive sensors are by nature bi-stable
(refer to Appendix 2). ‘Standard’ techniques used to
stabilize such sensors, including the application of a strong
field in the x-direction (Hx) from a permanent stabilization
magnet, are unsuitable as they reduce the sensor’s
sensitivity to fields in the measurement, or y-direction (Hy).
(Refer to Appendix 2, Fig. A2.2).
V
O
M
x
To avoid this loss in sensitivity, magnetoresistive sensors
can instead be stabilized by applying brief, strong
non-permanent field pulses of very short duration (a few
µs). This magnetic field, which can be easily generated by
simply winding a coil around the sensor, has the same
stabilizing effect as a permanent magnet, but as it is only
present for a very short duration, after the pulse there is no
loss of sensitivity. Modern magnetoresistive sensors
specifically designed for weak field applications
offset
H
y
M
x
MLC764
incorporate this coil on the silicon.
However, when measuring weak fields, second order
effects such as sensor offset and temperature effects can
greatly reduce both the sensitivity and accuracy of MR
sensors. Compensation techniques are required to
suppress these effects.
Fig.27 Butterfly curve including offset.
This reversible external magnetic field can be easily
achieved with a coil wound around the sensor, consisting
of current carrying wires, as described above. Depending
on the direction of current pulses through this coil, positive
and negative flipping fields in the x-direction (+Hx and −Hx)
are generated (see Fig.28).
OFFSET COMPENSATION BY ‘FLIPPING’
Despite electrical trimming, MR sensors may have a
maximum offset voltage of ±1.5 mV/V. In addition to this
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
Flipping causes a change in the polarity of the sensor
output signal and this can be used to separate the offset
signal from the measured signal. Essentially, the unknown
field in the ‘normal’ positive direction (plus the offset) is
measured in one half of the cycle, while the unknown field
in the ‘inverted’ negative direction (plus the offset) is
measured in the second half. This results in two different
outputs symmetrically positioned around the offset value.
After high pass filtering and rectification a single,
continuous value free of offset is output, smoothed by low
pass filtering. See Figs 29 and 30.
current
pulses
coil
H
sensor
y
V
O
H
x
Offset compensation using flipping requires additional
external circuitry to recover the measured signal.
MLC762
Fig.28 Flipping coil.
CLOCK
T
I
F
PHASE
SENSITIVE
DEMODULATOR
FLIPPING
L
PRE-
AMPLIFIER
OFFSET
FILTER
V
out
F
SOURCE
MBH617
Fig.29 Block diagram of flipping circuit.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
T
T
T
flipping current I
F
time
internal
magnetization
V
O
V
O
offset
time
H
y
(a)
(b)
(c)
V
O
time
V
O
time
MBH618
Fig.30 Timing diagram for flipping circuit (a) output voltage; (b) filtered output voltage; (c) output voltage filtered
and demodulated.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
SENSOR TEMPERATURE DRIFT
not negligible, as it can produce a difference of a factor of
three within a −25 °C to +125 °C temperature range, for
fields up to 0.5 kA/m. This effect is not compensated for by
the flipping action described in the last section.
The sensitivity of MR sensors is also temperature
dependent, with sensitivity decreasing as temperature
increases (Fig.31).The effect on sensor output is certainly
MLC134
15
V
O
o
T
=
25 C
amb
(mV/V)
o
25 C
10
o
75 C
5
0
o
125 C
5
10
operating range
15
3
2
1
0
1
2
3
H
(kA/m)
y
Fig.31 Output voltage ‘Vo’ as a fraction of the supply voltage for a KMZ10B sensor, as a function of transverse
field ‘Hy’, at several temperatures.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
The simplest form of temperature compensation is to use
a current source to supply to the sensor instead of a
voltage source. In this case, the resulting reduction in
sensitivity due to temperature is partially compensated by
a corresponding increase in bridge resistance.
output voltage ‘Vo’, and reduces the variation in sensitivity
to a factor of approximately 1.5 (compared to a factor of
three using the voltage source). However, this method
requires a higher supply voltage, due to the voltage drop
of the current source.
Thus a current source not only improves the stability of the
MLC135
75
o
T
=
25 C
amb
V
O
o
25 C
(mV/V)
50
o
75 C
o
125 C
25
0
25
50
75
operating range
4
2
0
2
4
H
(kA/m)
y
Fig.32 Output voltage ‘Vo’ of a KMZ10B sensor as a function of transverse field ‘Hy’ using a current source, for
several temperatures.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
The optimal method of compensating for temperature
dependent sensitivity differences in MR measurements of
weak fields uses electro-magnetic feedback. As can be
seen from the sensor characteristics in Figs 31 and 32,
sensor output is completely independent of temperature
changes at the point where no external field is applied
(the null-point). By using an electro-magnetic feedback
set-up, it is possible to ensure the sensor is always
operated at this point.
The magnetic field produced by the compensation coil is in
the opposite direction to the measured field, so when it is
added to the measured field, it compensates exactly for
the change in the output signal, regardless of its actual,
temperature-dependent value. This principle is called
current compensation and because the sensor is always
used at its ‘zero’ point, compensation current is
independent of the actual sensitivity of the sensor or
sensitivity drift with temperature.
To achieve this, a second compensation coil is wrapped
around the sensor perpendicular to the flipping coil, so that
the magnetic field produced by this coil is in the same
plane as the field being measured.
Information on the measured magnetic signal is effectively
given by the current fed to the compensating coil. If the
field factor of the compensation coil is known, this
simplifies calculation of the compensating field from the
compensating current and therefore the calculation of the
measured magnetic field. If this field factor is not precisely
known, then the resistor performing the current/voltage
conversion must be trimmed. Figure 34 shows a block
diagram of a compensated sensor set-up including the
flipping circuit.
Should the measured magnetic field vary, the sensor’s
output voltage will change, but the change will be different
at different ambient temperatures. This voltage change is
converted into a current by an integral controller and
supplied to the compensation coil, which then itself
produces a magnetic field proportional to the output
voltage change caused by the change in measured field.
compensation coil
compensation field
flipping field
earth's field
MLC757
flipping coil
sensor KMZ10A1
Fig.33 Magnetic field directions and the flipping and compensation coils.
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Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
The influence of other disturbing fields can also be
eliminated provided they are well known, by adding a
second current source to the compensating coil. Such
fields might be those arising from the set-up housing,
ferromagnetic components placed close to the sensor or
magnetic fields from electrical motors.
The brief summary in Table 3 compares the types of
compensation and their effects, so they can be assessed
for their suitability in a given application. Because these
options encompass a range of costs, the individual
requirements of an application should be carefully
analysed in terms of the performance gains versus relative
costs.
CLOCK
PRE-AMPLIFIER
WITH
SUPRESSION
OF OFFSET
PHASE-
SENSITIVE
DEMODULATOR
L
FLIPPING
SOURCE
F
L
C
CURRENT
REGULATOR
VOLTAGE & CURRENT
OUTPUT
MBH619
Fig.34 Block diagram of compensation circuit.
Table 4 Summery of compensation techniques
TECHNIQUE
EFFECT
Setting
avoids reduction in sensitivity due to constant stabilization field
Flipping
avoids reduction in sensitivity due to constant stabilization field, as well as
compensating for sensor offset and offset drift due to temperature
Current supply
reduction of sensitivity drift with temperature by a factor of two
Electro-magnetic feedback accurate compensation of sensitivity drift with temperature
2000 Sep 06
29
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