Omega Automobile Parts FMA 4000 User Manual

Users Guide  
Shop online at  
FMA 4000  
Digital Mass Flow Meters  
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TABLE OF CONTENTS  
1. UNPACKING THE FMA 4000 MASS FLOW METER................................
1
1
1.1 Inspect Package for External Damage.............................................
1
1.2 Unpack the Mass Flow Meter..........................................................
1
1.3 Returning Merchandise for Repair...................................................
1
1
3
3
2. INSTALLATION.......................................................................................
2.1 Primary Gas Connections................................................................
2.2 Electrical Connections.....................................................................
2.2.1 Power Supply Connections.............................................................
3
2.2.2 Output Signals Connections............................................................
4
2.2.3 Communication Parameters and Connections................................
6
3. PRINCIPLE OF OPERATION...................................................................  
4. SPECIFICATIONS...................................................................................  
5. OPERATING INSTRUCTIONS..................................................................  
7
9
9
5.1 Preparation and Warm Up...............................................................
10  
5.2 Swamping Condition.......................................................................  
11  
5.3 FMA 4000 Parameters Settings.......................................................
11  
5.3.1 Engineering Units Settings..............................................................
12  
5.3.2 Gas Table Settings...........................................................................
12  
13  
14  
14  
15  
5.3.3 Totalizer Settings.............................................................................  
5.3.4 Flow Alarm Settings........................................................................  
5.3.5 Relay Assignment Settings.............................................................
5.3.6 K Factors Settings...........................................................................  
5.3.7 Zero Calibration...............................................................................  
17  
5.3.8 Self Diagnostic Alarm......................................................................
17  
5.4 Analog output Signals configuration...............................................
18  
6. MAINTENANCE.......................................................................................
18  
6.1 Introduction.....................................................................................
19  
6.2 Flow Path Cleaning..........................................................................
19  
19  
6.2.1 Restrictor Flow Element (RFE)........................................................  
6.2.2 FMA 4000 model.............................................................................  
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7. CALIBRATION PROCEDURES.................................................................20  
7.1 Flow Calibration...............................................................................20  
7.2 Gas Calibration of FMA 4000 Mass Flow Meter...............................21  
7.2.1 Connections and Initial Warm Up....................................................21  
7.2.2 ZERO Check/Adjustment Adjustment..............................................21  
7.2.3 Gas Linearization Table Adjustment................................................21  
7.3 Analog output Calibration of FMA 4000 Mass Flow Meter.............. 23  
7.3.1 Initial Setup.....................................................................................24  
7.3.2 Gas flow 0-5 Vdc analog output calibration.................................... 25  
7.3.3 Gas flow 4-20 mA analog output calibration...................................25  
8. RS485 / RS232 SOFTWARE INTERFACE COMMANDS......................... 26  
8.1 General............................................................................................26  
8.2 Commands Structure......................................................................26  
8.3 ASCII Commands Set......................................................................28  
9. TROUBLESHOOTING..............................................................................34  
9.1 Common Conditions.......................................................................34  
9.2 Troubleshooting Guide....................................................................35  
9.3 Technical Assistance....................................................................... 37  
10. CALIBRATION CONVERSIONS FROM REFERENCE GASES................
37  
APPENDIX I OMEGA FMA 4000 EEPROM Variables..............................  
38  
APPENDIX II INTERNAL USER SELECTABLE GAS FACTOR TABLE  
(INTERNAL “K” FACTORS)....................................................
41  
APPENDIX III GAS FACTOR TABLE (“K” FACTORS)....................................  
APPENDIX IV COMPONENT DIAGRAM......................................................  
APPENDIX V DIMENSIONAL DRAWINGS.................................................  
APPENDIX VI WARRANTY...........................................................................  
42  
46  
48  
50  
TRADEMARKS  
®
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Buna-N -is a registered trademark of DuPont Dow Elastomers.  
Neoprene -is a registered trademark of DuPont.  
®
®
Kalrez -is a registered trademark of DuPont Dow Elastomers.  
Omega -is a registered trademark of Omega Engineering Inc.  
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1.  
UNPACKING THE FMA 4000 MASS FLOW METER  
Inspect Package for External Damage  
1.1  
Your FMA 4000 Mass Flow Meter was carefully packed in a sturdy cardboard car-  
ton, with anti-static cushioning materials to withstand shipping shock. Upon  
receipt, inspect the package for possible external damage. In case of external  
damage to the package contact the shipping company immediately.  
1.2  
Unpack the Mass Flow Meter  
Open the carton carefully from the top and inspect for any sign of concealed ship-  
ping damage. In addition to contacting the shipping carrier please forward a copy  
of any damage report to Omega7 directly.  
When unpacking the instrument please make sure that you have all the items  
indicated on the Packing List. Please report any shortages promptly.  
1.3  
Returning Merchandise for Repair  
Please contact an OMEGA7 customer service representative and request a  
Return Authorization Number (AR).  
It is mandatory that any equipment returned for servicing be purged and neutral-  
ized of any dangerous contents including but not limited to toxic, bacterially infec-  
tious, corrosive or radioactive substances. No work shall be performed on a  
returned product unless the customer submits a fully executed, signed SAFETY  
CERTIFICATE. Please request form from the Service Manager.  
2.  
INSTALLATION  
2.1  
Primary Gas Connections  
Please note that the FMA 4000 Mass Flow Meter will not operate with liquids. Only  
clean gases are allowed to be introduced into the instrument. If gases are con-  
taminated they must be filtered to prevent the introduction of impediments into the  
sensor.  
1
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CAUTION: FMA 4000 TRANSDUCERS SHOULD NOT BE USED FOR  
MONITORING OXYGEN GAS UNLESS SPECIFICALLY CLEANED AND  
PREPARED FOR SUCH APPLICATION.  
ƽ
For more information, contact Omega7.  
F
Attitude limit of the Mass Flow Meter is 15 from calibration position (standard  
calibration is in horizontal position). This means that the gas flow path of the Flow  
Meter must be within this limit in order to maintain the original calibration accura-  
cy. Should there be need for a different orientation of the meter, re-calibration may  
be necessary. It is also preferable to install the FMA 4000 transducer in a stable  
environment, free of frequent and sudden temperature changes, high moisture,  
and drafts.  
Prior to connecting gas lines inspect all parts of the piping system including fer-  
rules and fittings for dust or other contaminant’s.  
When connecting the gas system to be monitored, be sure to observe the direc-  
tion of gas flow as indicated by the arrow on the front of the meter.  
Insert tubing into the compression fittings until the ends of the properly sized tub-  
ing home flush against the shoulders of the fittings. Compression fittings are to be  
tightened to one and one quarter turns according to the manufacturer's instruc-  
tions. Avoid over tightening which will seriously damage the Restrictor Flow  
Elements (RFE's)!  
CAUTION: For FMA 4000 model, the maximum pressure in the  
gas line should not exceed 500 PSIA (34.47 bars). Applying pressure above  
500 PSIA (34.47 bars) will seriously damage the flow sensor.  
ƽ
FMA 4000 transducers are supplied with either standard 1/4 inch, or optional 1/8  
inch inlet and outlet compression fittings which should NOT be removed unless  
the meter is being cleaned or calibrated for a new flow range.  
Using a Helium Leak Detector or other equivalent method, perform a thorough  
leak test of the entire system. (All FMA 4000's are checked prior to shipment for  
leakage within stated limits. See specifications in this manual.)  
2
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2.2  
Electrical Connections  
FMA 4000 is supplied with a 15 pin “D” connector. Pin diagram is presented in  
Figure b-1.  
2.2.1 Power Supply Connections  
The power supply requirements for FMA 4000 transducers are: 11 to 26 Vdc,  
(unipolar power supply)  
DC Power (+) --------------- pin 7 of the 15 pin “D” connector  
DC Power (-) --------------- pin 5 of the 15 pin “D” connector  
CAUTION: Do not apply power voltage above 26Vdc.  
Doing so will cause FMA 4000 damage or faulty operation.  
ƽ
2.2.2 Output Signals Connections  
CAUTION: When connecting the load to the output terminals, do not exceed  
the rated values shown in the specifications. Failure to do so might cause  
damage to this device. Be sure to check if the wiring and the polarity of the  
power supply is correct before turning the power ON. Wiring error may cause  
damage or faulty operation.  
ƽ
FMA 4000 Mass Flow Meters are equipped with either calibrated 0-5 or calibrat-  
ed 4-20 mA output signals (jumper selectable). This linear output signal repre-  
sents 0-100% of the flow meter’s full scale range.  
WARNING: The 4-20 mA current loop output is self-powered (non-isolated).  
Do NOT connect an external voltage source to the output signals.  
ƽ
Flow 0-5 VDC or 4-20 mA output signal connection:  
Plus (+) -------------------------- pin 2 of the 15 pin “D” connector  
Minus (-) -------------------------- pin 1 of the 15 pin “D” connector  
To eliminate the possibility of noise interference, use a separate cable entry for  
the DC power and signal lines.  
3
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2.2.3 Communication Parameters and Connections  
The digital interface operates via RS485 (optional RS232) and provides access to  
applicable internal data including: flow, CPU temperature reading, auto zero, total-  
izer and alarm settings, gas table, conversion factors and engineering units selec-  
tion, dynamic response compensation and linearization table adjustment.  
Communication Settings for RS485 / RS232 communication interface:  
Baud rate:  
Stop bit:  
Data bits:  
Parity:  
......................  
......................  
......................  
......................  
9600 baud  
1
8
None  
None  
Flow Control: ......................  
RS485 communication interface connection:  
The RS485 converter/adapter must be configured for: multidrop, 2 wire, half  
duplex mode. The transmitter circuit must be enabled by TD or RTS (depending  
on which is available on the converter/adapter). Settings for the receiver circuit  
should follow the selection made for the transmitter circuit in order to eliminate  
echo.  
RS485 T(-) or R(-)  
RS485 T(+) or R(+)  
...................... pin 8 of the 15 pin “D” connector (TX-)  
...................... pin 15 of the 15 pin “D” connector (RX+)  
RS485 GND (if available) ...................... pin 9 of the 15 pin “D” connector (GND)  
RS232 communication interface connection:  
Crossover connection has to be established:  
RS232 RX (pin 2 on the DB9 connector) ..... pin 8 of the 15 pin “D” connector (TX)  
RS232 TX (pin 3 on the DB9 connector) ..... pin 15 of the 15 pin “D” connector (RX)  
RS232 GND (pin 5 on the DB9 connector) ..... pin 9 of the 15 pin “D” connector (GND)  
4
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Figure b.1 - FMA 4000 15 PIN “D” CONNECTOR CONFIGURATION  
PIN  
1
FMA 4000 FUNCTION  
Common, Signal Ground For Pin 2  
(4-20 mA return).  
2
3
4
5
0-5 Vdc or 4-20mA Flow Signal Output.  
Relay No. 2 - Normally Open Contact.  
Relay No. 2 - Common Contact.  
Common, Power Supply  
(- DC power for 11 to 26 Vdc).  
Relay No. 1 - Common Contact.  
Plus Power Supply  
6
7
(+ DC power for 11 to 26 Vdc).  
RS485 (-) (Optional RS232 TX).  
RS232 Signal GND (RS485 GND Optional).  
Do not connect (Test/Maintenance terminal).  
Relay No. 2 - Normally Closed Contact.  
Relay No. 1 - Normally Open Contact.  
Relay No. 1 - Normally Closed Contact.  
Do not connect (Test/Maintenance terminal).  
RS485 (+) (Optional RS232 RX).  
8
9
10  
11  
12  
13  
14  
15  
Shield Chassis Ground.  
IMPORTANT NOTES:  
ƽ
Generally, D” Connector numbering patterns are standardized. There are, how-  
ever, some connectors with nonconforming patterns and the numbering  
sequence on your mating connector may or may not coincide with the numbering  
sequence shown in our pin configuration table above. It is imperative that you  
match the appropriate wires in accordance with the correct sequence regardless  
of the particular numbers displayed on the mating connector.  
Make sure power is OFF when connecting or disconnecting any cables in  
the system.  
ƽ
The (+) and (-) power inputs are each protected by a 300mA M (medium time-lag)  
resettable fuse. If a shorting condition or polarity reversal occurs, the fuse will cut  
power to the flow transducer circuit. Disconnect the power to the unit, remove the  
faulty condition, and reconnect the power. The fuse will reset once the faulty con-  
dition has been removed. DC Power cable length may not exceed 9.5 feet (3  
meters). Use of the FMA 4000 flow transducer in a manner other than that spec-  
ified in this manual or in writing from Omega, may impair the protection provided  
by the equipment.  
5
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3.  
PRINCIPLE OF OPERATION  
The stream of gas entering the Mass Flow transducer is split by shunting a small  
portion of the flow through a capillary stainless steel sensor tube. The remainder of  
the gas flows through the primary flow conduit. The geometry of the primary con-  
duit and the sensor tube are designed to ensure laminar flow in each branch.  
According to principles of fluid dynamics the flow rates of a gas in the two laminar  
flow conduits are proportional to one another. Therefore, the flow rates measured  
in the sensor tube are directly proportional to the total flow through the transducer.  
In order to sense the flow in the sensor tube, heat flux is introduced at two sec-  
tions of the sensor tube by means of precision wound heater-sensor coils. Heat is  
transferred through the thin wall of the sensor tube to the gas flowing inside. As  
gas flow takes place heat is carried by the gas stream from the upstream coil to  
the downstream coil windings. The resultant temperature dependent resistance  
differential is detected by the electronic control circuit.The measured temperature  
gradient at the sensor windings is linearly proportional to the instantaneous rate  
of flow taking place.  
An output signal is generated that is a function of the amount of heat carried by  
the gases to indicate mass-molecular based flow rates.  
Additionally, the FMA 4000 Mass Flow Meter incorporates a Precision Analog  
Microcontroller (ARM7TDMI7 MCU) and non-volatile memory that stores all hard-  
ware specific variables and up to 10 different calibration tables. The flow rate can  
be displayed in 23 different volumetric or mass flow engineering units. Flow meter  
parameters and functions can be programmed remotely via the RS485/RS232  
(optional) interface. FMA 4000 flow meters support various functions including:  
programmable flow totalizer, low, high or range flow alarm, automatic zero adjust-  
ment (activated via local button or communication interface), 2 programmable  
SPDT relays output, 0-5 Vdc / 4-20 mA analog outputs (jumper selectable), self  
diagnostic alarm, 36 internal and user defined K-factor. Optional local 2x16 LCD  
readout with adjustable back light provides flow rate and total volume reading in  
currently selected engineering units and diagnostic events indication.  
6
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4.  
SPECIFICATIONS  
FLOW MEDIUM: Please note that FMA 4000 Mass Flow Meters are designed to work only  
with clean gases. Never try to measure flow rates of liquids with any FMA 4000.  
F
CALIBRATIONS: Performed at standard conditions [14.7 psia (101.4 kPa) and 70 F  
F
(21.1 C)] unless otherwise requested or stated.  
ENVIRONMENTAL (PER IEC 664): Installation Level II; Pollution Degree II.  
FLOW ACCURACY (INCLUDING LINEARITY): 1% of FS at calibration temperature and  
pressure.  
REPEATABILITY: 0.15% of full scale.  
F
FLOW TEMPERATURE COEFFICIENT: 0.15% of full scale/ C or better.  
FLOW PRESSURE COEFFICIENT: 0.01% of full scale/psi (6.895 kPa) or better.  
FLOW RESPONSE TIME: 1000ms time constant; approximately 2 seconds to within 2%  
of set flow rate for 25% to 100% of full scale flow.  
MAXIMUM GAS PRESSURE: 500 psig (3447 kPa gauge).  
MAXIMUM PRESSURE DROP: 0.18 PSID (at 10 L/min flow). See Table IV for  
pressure drops associated with various models and flow rates.  
F
F
F
F
GAS AND AMBIENT TEMPERATURE: 41 F to 122 F (5 C to 50 C).  
RELATIVE GAS HUMIDITY: Up to 70%.  
LEAK INTEGRITY: 1 x 10-9 sccs He maximum to the outside environment.  
ATTITUDE SENSITIVITY: Incremental deviation of up to 1% from stated accuracy, after re-  
zeroing.  
OUTPUT SIGNALS: Linear 0-5 Vdc (3000 ohms min load impedance);  
Linear 4-20 mA (500 ohms maximum loop resistance).  
Maximum noise 20mV peak to peak (for 0-5 Vdc output).  
TRANSDUCER INPUT POWER: 11 to 26 Vdc, 100 mV maximum peak to peak output  
noise.  
Power consumption:  
+12Vdc (200 mA maximum);  
+24Vdc (100 mA maximum);  
Circuit board have built-in polarity reversal protection, 300mA resettable fuse provide  
power input protection.  
WETTED MATERIALS: Anodized aluminum, brass, 316 stainless steel, 416 stainless steel,  
FKM, O-rings; BUNA-N7, NEOPRENE7 or KALREZ7 O-rings are optional.  
7
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CAUTION: Omega makes no expressed or implied guarantees of corrosion  
resistance of mass flow meters as pertains to different flow media reacting with  
components of meters. It is the customers' sole responsibility to select the  
model suitable for a particular gas based on the fluid contacting (wetted)  
materials offered in the different models.  
ƽ
INLET AND OUTLET CONNECTIONS: Model FMA 4000 standard 1/4" compression fittings.  
Optional 1/8" or 3/8" compression fittings and 1/4" VCR fittings are available.  
DISPLAY: Optional local 2x16 characters LCD with adjustable backlight (2 lines of text).  
CALIBRATION OPTIONS: Standard is one 10 points NIST calibration.  
Optional, up to 9 additional calibrations may be ordered at additional charge.  
CE COMPLIANCE: EMC Compliance with 89/336/EEC as amended.  
Emission Standard: EN 55011:1991, Group 1, Class A.  
Immunity Standard: EN 55082-1:1992.  
FLOW RANGES  
TABLE I FMA 4000 LOW FLOW MASS FLOW METER*  
scc/min [N2]  
std liters/min [N2]  
0 to 1  
CODE  
00  
CODE  
07  
0 to 5  
0 to 10  
0 to 20  
0 to 50  
0 to 100  
0 to 200  
0 to 500  
01  
08  
0 to 2  
02  
09  
0 to 5  
03  
10  
0 to 10  
04  
05  
06  
F
F
*Flow rates are stated for Nitrogen at STP conditions [i.e. 70 F (21.1 C) at 1 atm].  
For other gases use the K factor as a multiplier from APPENDIX III.  
TABLE IV PRESSURE DROPS  
MAXIMUM PRESSURE DROP  
FLOW RATE  
MODEL  
[std liters/min]  
[mm H2O]  
[psid]  
[kPa]  
FMA 4000  
up to 10  
130  
0.18  
1.275  
WEIGHT  
SHIPPING WEIGHT  
MODEL  
FMA 4000 transmitter  
2.20 lbs. (1.00 kg)  
3.70 lbs. (1.68 kg)  
8
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5.  
OPERATING INSTRUCTIONS  
Preparation and Warm Up  
5.1  
It is assumed that the Mass Flow Meter has been correctly installed and thor-  
oughly leak tested as described in section 2. Make sure the flow source is OFF.  
When applying power to a flow meter within the first two seconds, you will see on  
the LCD display: the product name, the software version, and revision of the EEP-  
ROM table (applicable for LCD option only).  
OMEGA FMA 4000 485  
S: Ver1.4  
Rev.A0  
Figure b-2: FMA 4000 first Banner Screen  
Within the next two seconds, the RS485 network address, the analog output set-  
tings, and currently selected gas calibration table will be displayed (applicable for  
LCD option only).  
Ad: 11 Out: 0-5Vdc  
Gas# 1  
AIR  
Figure b-3: FMA 4000 second Banner Screen  
Note: Actual content of the LCD screen may vary depending on the  
model and device configuration.  
After two seconds, the LSD display switches to the main screen with the  
following information:  
-
-
Mass Flow reading in current engineering units (upper line).  
Totalizer Volume reading in current volume or mass based  
engineering units (lower line).  
F: 50.0 L/min  
T: 75660.5 Ltr  
Figure b-4: FMA 4000 Main Screen  
9
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Note: Allow the Digital Mass Flow Meter to warm-up for a MINIMUM  
of 6 minutes.  
During initial powering of the FMA 4000 transducer, the flow output signal will be  
indicating a higher than usual output. This is an indication that the FMA 4000  
transducer has not yet attained its minimum operating temperature.This condition  
will automatically cancel within a few minutes and the transducer should eventu-  
ally indicate zero.  
Note: During the first 6 minutes of the initial powering of the FMA 4000  
transducer, the status LED will emit CONSTANT UMBER light.  
For the FMA 4000 transducer with LCD option: If the LCD diagnostic is activated,  
the second line of the LCD will display the time remaining until the end of the  
warm up period (Minutes:Seconds format) and will alternatively switch to Totalizer  
reading indication every 2 seconds.  
F: 50.0 L/min  
** WarmUp 2:39 **  
Figure b-5: FMA 4000 Main Screen during Sensor Warm up period.  
Note: After 6 minutes of the initial powering of the FMA 4000 the  
transducer, status LED will emit a constant GREEN light (normal  
operation, ready to measure). For FMA 4000 with LCD option, the  
screen will reflect flow and totalizer reading. (see Figure b-4).  
5.2  
Swamping Condition  
If a flow of more than 10% above the maximum flow rate of the Mass Flow Meter  
is taking place, a condition known as “swamping” may occur. Readings of a  
“swamped” meter cannot be assumed to be either accurate or linear. Flow must  
be restored to below 110% of maximum meter range. Once flow rates are lowered  
to within calibrated range, the swamping condition will end. Operation of the meter  
above 110% of maximum calibrated flow may increase recovery time.  
10  
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5.3  
FMA 4000 Parameters Settings  
5.3.1 Engineering Units Settings  
The FMA 4000 Mass Flow Meter is capable of displaying flow rate with 23 different  
Engineering Units. Digital interface commands (see paragraph 8.3 ASCII Command  
Set “FMA 4000 SOFTWARE INTERFACE COMMANDS”) are provided to:  
-
-
get currently active Engineering Units  
set desired Engineering Units.  
The following Engineering Units are available:  
TABLE VI UNITS OF MEASUREMENT  
FLOW RATE  
ENGINEERING  
UNITS  
TOTALIZER  
ENGINEERING  
UNITS  
NUMBER  
INDEX  
DESCRIPTION  
1
2
3
4
5
6
7
8
9
0
1
2
3
4
5
6
7
8
%
%s  
mL  
mL  
mL  
Ltr  
Ltr  
Ltr  
Percent of full scale  
Milliliter per second  
Milliliter per minute  
Milliliter per hour  
mL/sec  
mL/min  
mL/hr  
L/sec  
Liter per second  
L/ min  
L/hr  
Liter per minute  
Liter per hour  
3
3
Cubic meter per second  
Cubic meter per minute  
m /sec  
m
3
3
m / min  
m
3
3
10  
11  
9
Cubic meter per hour  
Cubic feet per second  
m /hr  
m
3
3
f
10  
f /sec  
3
3
f
12  
13  
14  
15  
16  
17  
18  
19  
20  
21  
22  
23  
11  
12  
13  
14  
15  
16  
17  
18  
19  
20  
21  
22  
Cubic feet per minute  
Cubic feet per hour  
Grams per second  
Grams per minute  
Grams per hour  
f /min  
3
3
f
f /hr  
g/sec  
g/min  
g/hr  
g
g
g
kg/sec  
kg/min  
kg/hr  
kg  
kg  
kg  
Lb  
Lb  
Lb  
UD  
Kilograms per second  
Kilograms per minute  
Kilograms per hour  
Pounds per second  
Pounds per minute  
Pounds per hour  
Lb/sec  
Lb/min  
Lb/hr  
User  
User defined  
11  
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Note: Once Flow Unit of Measure is changed, the Totalizer’s  
Volume/Mass based Unit of Measure will be changed automatically.  
5.3.2 Gas Table Settings  
The FMA 4000 Mass Flow Meter is capable of storing calibration data for up to 10  
different gases. Digital interface commands are provided to:  
-
-
get currently active Gas Table number and Gas name  
set desired Gas Table.  
Note: By default the FMA 4000 is shipped with at least one valid  
calibration table (unless optional additional calibrations were ordered).  
If instead of the valid Gas name (for example NITROGEN), the LCD  
screen or digital interface displays Gas designator as “Uncalibrated”,  
then the user has chosen the Gas Table which was not calibrated.  
Using an “Uncalibrated” Gas Table will result in erroneous reading.  
5.3.3 Totalizer Settings  
The total volume of the gas is calculated by integrating the actual gas flow rate  
with respect to the time. Digital interface commands are provided to:  
-
-
-
-
-
reset the totalizer to ZERO  
start the totalizer at a preset flow  
assign action at a preset total volume  
start/stop (enable/disable) totalizing the flow  
read totalizer via digital interface  
The Totalizer has several attributes which may be configured by the user.  
These attributes control the conditions which cause the Totalizer to start integrat-  
ing the gas flow and also to specify actions to be taken when the Total Volume is  
outside the specified limit.  
Note: Before enabling the Totalizer, ensure that all totalizer settings  
are configured properly. Totalizer Start values have to be entered in  
%F.S. engineering unit. The Totalizer will not totalize until the flow rate  
becomes equal to or more than the Totalizer Start value. Totalizer Stop  
values must be entered in currently active volume / mass based  
engineering units. If the Totalizer Stop at preset total volume feature is  
not required, then set Totalizer Stop value to zero.  
Totalizer action conditions become true when the totalizer reading and preset  
“Stop at Total” volumes are equal.  
12  
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Local maintenance push button is available for manual Totalizer reset on the field.  
The maintenance push button is located on the right side of the flow meter inside  
the maintenance window above the 15 pin D-connector (see Figure c-1 “FMA  
4000 configuration jumpers”).  
Note: In order to locally Reset Totalizer, the reset push button must be  
pressed during power up sequence. The following sequence is  
recommended:  
1. Disconnect FMA 4000 from the power.  
2. Press maintenance push button (do not release).  
3. Apply power to the FMA 4000 while holding down the maintenance  
push button.  
4. Release maintenance push button after 6 seconds. For FMA 4000  
with optional LCD, when FMA 4000 Main Screen appears  
(see Figure b-4).  
5.3.4 Flow Alarm Settings  
FMA 4000 provides the user with a flexible alarm/warning system that monitors  
the Gas Flow for conditions that fall outside configurable limits as well as visual  
feedback for the user via the status LED and LCD (only for devices with LCD  
option) or via a Relay contact closure.  
The flow alarm has several attributes which may be configured by the user via a  
digital interface. These attributes control the conditions which cause the alarm to  
occur and to specify actions to be taken when the flow rate is outside the speci-  
fied conditions.  
Mode Enable  
/Disable -  
Allows the user to Enable/Disable Flow Alarm.  
Low Alarm - The value of the monitored Flow in % F.S. below  
which is considered an alarm condition.  
Note:  
The value of the Low alarm must be less than the  
value of the High Alarm.  
High Alarm- The value of the monitored Flow in % F.S. above  
which is considered an alarm condition.  
Note:  
The value of the High alarm must be more than the  
value of the Low Alarm.  
Action Delay- The time in seconds that the Flow rate value must remain  
above the high limit or below the low limit before an alarm  
condition is indicated. Valid settings are in the range of 0  
to 3600 seconds.  
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Latch Mode- Controls Latch feature when Relays are assigned to  
Alarm event. Following settings are available:  
0 - Latch feature is disabled for both relays  
1 - Latch feature is enabled for Relay#1 and disabled for Relay#2  
2 - Latch feature is enabled for Relay#2 and disabled for Relay#1  
3 - Latch feature is enabled for both relays.  
Note: If the alarm condition is detected, and the Relay is assigned to  
Alarm event, the corresponding Relay will be energized.  
Note: By default, flow alarm is non-latching. That means the alarm is  
indicated only while the monitored value exceeds the specified  
conditions. If Relay is assigned to the Alarm event, in some cases, the  
Alarm Latch feature may be desirable.  
The current Flow Alarm settings and status are available via digital interface (see  
paragraph 8.3 ASCII Command Set “FMA 4000 SOFTWARE INTERFACE COM-  
MANDS”).  
5.3.5 Relay Assignment Settings  
Two sets of dry contact relay outputs are provided to actuate user supplied equip-  
ment. These are programmable via digital interface such that the relays can be  
made to switch when a specified event occurs (e.g. when a low or high flow alarm  
limit is exceeded or when the totalizer reaches a specified value).  
The user can configure each Relay action from 6 different options:  
No Action  
: (N) No assignment (relay is not assigned to any events and not energized).  
: (T) Totalizer reached preset limit volume.  
: (H) High Flow Alarm condition.  
Totalizer > Limit  
High Flow Alarm  
Low Flow Alarm  
: (L) Low Flow Alarm condition.  
Range between H&L : (R) Range between High and Low Flow Alarm condition.  
Manual Enabled : (M) Activated regardless of the Alarm and Totalizer conditions.  
5.3.6 K Factors Settings  
Conversion factors relative to Nitrogen for up to 36 gases are stored in the FMA  
4000 (see APPENDIX II). In addition, provision is made for a user-defined con-  
version factor. Conversion factors may be applied to any of the ten gas calibra-  
tions via digital interface commands.  
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The available K Factor settings are:  
Disabled  
(K = 1).  
Internal Index The index [0-35] from internal K factor table  
(see APPENDIX II).  
User Defined User defined conversion factor.  
Note: The conversion factors will not be applied for % F.S.  
engineering unit.  
5.3.7 Zero Calibration  
The FMA 4000 includes an auto zero function that, when activated, automatical-  
ly adjusts the mass flow sensor to read zero. The initial zero adjustment for your  
FMA 4000 was performed at the factory. It is not required to perform zero calibra-  
tion unless the device has zero reading offset with no flow conditions.  
Note: Before performing Zero Calibration, make sure the device is  
powered up for at least 15 minutes and absolutely no flow condition is  
established.  
Shut off the flow of gas into the Digital Mass Flow Meter. To ensure that no seep-  
age or leak occurs into the meter, it is good practice to temporarily disconnect the  
gas source. The Auto Zero may be initiated via digital communication interface or  
locally by pressing the maintenance push button, which is located on the right side  
of the flow meter inside the maintenance window above the 15 pin D-connector  
(see Figure c-1 “FMA 4000 configuration jumpers”).  
Note: The same maintenance push button is used for Auto Zero  
initiation and Totalizer reset. The internal diagnostic algorithm will  
prevent initiating Auto Zero function via the maintenance push button  
before the 6 minutes sensor warm up period has elapsed.  
To start Auto Zero locally, press the maintenance push button.The status LED will  
flash not periodically with the RED light. On the FMA 4000 with optional LCD, the  
following screen will appear:  
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AUTOZERO IS ON!  
Figure b-6: FMA 4000 Screen in the beginning of Auto Zero procedure.  
The Auto Zero procedure normally takes 1 - 2 minutes during which time the DP  
Zero counts and the Sensor reading changes approximately every 3 to 6 seconds.  
AUTOZERO IS ON!  
S:  
405 DP: 512  
Figure b-7: FMA 4000 during the Auto Zero procedure.  
The nominal value for a fully balanced sensor is 120 Counts. If the FMA 4000’s  
digital signal processor was able to adjust the Sensor reading within 120 10  
counts, then Auto Zero is considered successful. The status LED will return to a  
constant GREEN light and the screen below will appear:  
AutoZero is Done  
S:  
122 DP: 544  
Figure b-7: FMA 4000 during the Auto Zero procedure.  
Note: The actual value of the Sensor and DP counts will vary for each  
FMA 4000.  
If the device was unable to adjust the Sensor reading to within 120 10 counts,  
then Auto Zero is considered as unsuccessful. The constant RED light will appear  
on the status LED.The user will be prompted with the “AutoZero ERROR!” screen.  
Note: For FMA 4000 with RS232 option all Auto Zero status info  
available via digital communication interface.  
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5.3.8 Self Diagnostic Alarm  
FMA 4000 series Mass Flow Meters are equipped with a self-diagnostic alarm  
which is available via multicolor LED, digital interface and on screen indication (for  
devices with optional LCD). The following diagnostic events are supported:  
DIAGNOSTIC  
ALARM DESCRIPTION  
LED COLOR  
AND PATTERN  
PRIORITY  
LEVEL  
NUMBER  
Not periodically  
flashing RED  
Auto Zero procedure is running  
0
1
FATAL ERROR (reset or  
maintenance service is required for Constant RED  
return in to the normal operation)  
1
2
2
3
CPU Temperature too high  
(Electronics Overheating)  
Flashing RED/UMBER  
Sensor in the warm up stage  
(first 6 minutes after power up  
sequence, normal operation, no  
critical diagnostic events present)  
Constant UMBER  
3
4
Flow Sensor Temperature too low  
Flashing UMBER/OFF  
4
5
5
6
Flow Sensor Temperature too high Flashing RED/OFF  
Totalizer Reading hit preset limit  
Low flow Alarm conditions  
High flow Alarm conditions  
Flashing GREEN/UMBER  
6
7
8
9
7
8
Flashing GREEN/OFF  
Flashing GREEN/RED  
Constant GREEN  
9
Normal operation, no diagnostic  
events  
10  
Note: [0] - Priority Level is highest (most important). When two or more  
diagnostic events are present at the same time, the event with the  
highest priority level will be indicated on the status LED and displayed  
on the LCD (if equipped). All diagnostic events may be accessed  
simultaneously via digital communication interface (see paragraph 8.3  
“ASCII Command Set”).  
5.4  
Analog Output Signals configuration  
FMA 4000 series Mass Flow Meters are equipped with calibrated 0-5 Vdc and 4-  
20 mA output signals. The set of the jumpers (J7A, J7B, J7C) located on the right  
side of the flow meter, inside of the maintenance window above the 15 pin D-con-  
nector (see Figure c-1 “FMA 4000 configuration jumpers”) are used to switch  
between 0-5 Vdc or 4-20 mA output signals (see Table VI).  
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Analog output signals of 0-5 Vdc and 4-20 mA are attained at the appropriate pins of  
the 15-pin “D” connector (see Figure b-1) on the side of the FMA 4000 transducer.  
Table VI Analog Output Jumper Configuration  
ANALOG SIGNAL  
0-5 Vdc  
4-20 mA  
OUTPUT  
J7.A  
J7.B  
J7.C  
5-9  
6-10  
7-11  
J7.A  
J7.B  
J7.C  
1-5  
2-6  
3-7  
Flow Rate Output  
Jumper Header J7  
See APPENDIX IV for actual jumpers layout on the PCB.  
Note: Digital output (communication) is simultaneously available with  
analog output.  
6.  
MAINTENANCE  
6.1  
Introduction  
It is important that the Mass Flow Meter is only used with clean, filtered gases.  
Liquids may not be metered. Since the RTD sensor consists, in part, of a small  
capillary stainless steel tube, it is prone to occlusion due to impediments or gas  
crystallization. Other flow passages are also easily obstructed.  
Therefore, great care must be exercised to avoid the introduction of any potential  
flow impediment. To protect the instrument, a 50 micron (FMA 4000) filter is built  
into the inlet of the flow transducer.The filter screen and the flow paths may require  
occasional cleaning as described below. There is no other recommended mainte-  
nance required. It is good practice, however, to keep the meter away from vibra-  
tion, hot or corrosive environments and excessive RF or magnetic interference.  
If periodic calibrations are required, they should be performed by qualified per-  
sonnel and calibrating instruments, as described in section 7. It is recommended  
that units are returned to Omega® for repair service and calibration.  
CAUTION: TO PROTECT SERVICING PERSONNEL IT IS  
ƽ
MANDATORY THAT ANY INSTRUMENT BEING SERVICED IS  
COMPLETELY PURGED AND NEUTRALIZED OF TOXIC,  
BACTERIOLOGICALLY INFECTED, CORROSIVE OR RADIOACTIVE  
CONTENTS.  
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6.2  
Flow Path Cleaning  
Before attempting any disassembly of the unit for cleaning, try inspecting the flow  
paths by looking into the inlet and outlet ends of the meter for any debris that may  
be clogging the flow through the meter. Remove debris as necessary. If the flow  
path is clogged, proceed with steps below.  
Do not attempt to disassemble the sensor. If blockage of the sensor tube is not alle-  
viated by flushing through with cleaning fluids, please return meter for servicing.  
CAUTION: DISASSEMBLY MAY COMPROMISE CURRENT CALIBRATION.  
ƽ
6.2.1 Restrictor Flow Element (RFE)  
The Restrictor Flow Element (RFE) is a precision flow divider inside the trans-  
ducer which splits the inlet gas flow by a preset amount to the sensor and main  
flow paths. The particular RFE used in a given Mass Flow Meter depends on the  
gas and flow range of the instrument.  
6.2.2 FMA 4000 Model  
Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow  
Element (RFE) is connected to the inlet fitting. Carefully disassemble the RFE  
from the inlet connection. The 50 micron filter screen will now become visible.  
Push the screen out through the inlet fitting. Clean or replace each of the removed  
parts as necessary. If alcohol is used for cleaning, allow time for drying.  
Inspect the flow path inside the transducer for any visible signs of contaminant. If  
necessary, flush the flow path through with alcohol. Thoroughly dry the flow paths  
by flowing clean dry gas through.  
Carefully re-install the RFE and inlet fitting avoiding any twisting and deforming to  
the RFE. Be sure that no dust has collected on the O-ring seal.  
NOTE: OVER TIGHTENING WILL DEFORM AND RENDER THE RFE  
DEFECTIVE. IT IS ADVISABLE THAT AT LEAST ONE CALIBRATION  
POINT BE CHECKED AFTER RE-INSTALLING THE INLET FITTING.  
SEE SECTION (7.2.3).  
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7.  
CALIBRATION PROCEDURES  
NOTE: REMOVAL OF THE FACTORY INSTALLED CALIBRATION  
SEALS AND/OR ANY ADJUSTMENTS MADE TO THE METER, AS  
DESCRIBED IN THIS SECTION, WILL VOID ANY CALIBRATION  
WARRANTY APPLICABLE.  
ƽ
7.1  
Flow Calibration  
Omega® Engineerings' Flow Calibration Laboratory offers professional calibration  
support for Mass Flow Meters using precision calibrators under strictly controlled  
conditions. NIST traceable calibrations are available. Calibrations can also be per-  
formed at customers' site using available standards.  
Factory calibrations are performed using NIST traceable precision volumetric cal-  
ibrators incorporating liquid sealed frictionless actuators.  
Generally, calibrations are performed using dry nitrogen gas. The calibration can  
then be corrected to the appropriate gas desired based on relative correction [K]  
factors shown in the gas factor table (see APPENDIX III). A reference gas, other  
than nitrogen, may be used to better approximate the flow characteristics of cer-  
tain gases.This practice is recommended when a reference gas is found with ther-  
modynamic properties similar to the actual gas under consideration. The appro-  
priate relative correction factor should be recalculated (see section 9).  
It is standard practice to calibrate Mass Flow Meters with dry nitrogen gas at  
F
F
70.0 F (21.1 C), 20 psia (137.9 kPa absolute) inlet pressure and 0 psig outlet  
pressure. It is best to calibrate FMA 4000 transducers to actual operating condi-  
tions. Specific gas calibrations of non-toxic and non-corrosive gases are available  
for specific conditions. Please contact your Omega® for a price quotation.  
It is recommended that a flow calibrator be used which has at least four times bet-  
ter collective accuracy than that of the Mass Flow Meter to be calibrated.  
Equipment required for calibration includes: a flow calibration standard, PC with  
available RS485 / RS232 communication interface, a certified high sensitivity  
multi meter (for analog output calibration only), an insulated (plastic) screwdriver,  
a flow regulator (for example - metering needle valve) installed upstream from the  
Mass Flow Meter, and a pressure regulated source of dry filtered nitrogen gas (or  
other suitable reference gas). Using Omega® supplied calibration and mainte-  
nance software to simplify the calibration process is recommended.  
Gas and ambient temperature, as well as inlet and outlet pressure conditions,  
should be set up in accordance with actual operating conditions.  
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7.2  
Gas Flow Calibration of FMA 4000 Mass Flow Meter  
All adjustments in this section are made from the outside of the meter  
via digital communication interface between a PC (terminal) and FMA  
4000. There is no need to disassemble any part of the instrument or  
perform internal PCB component (potentiometers) adjustment.  
FMA 4000 Mass Flow Meters may be field recalibrated/checked for the same  
range they were originally factory calibrated for. When linearity adjustment is  
needed or flow range changes are being made, proceed to step 7.2.3. Flow range  
changes may require a different Restrictor Flow Element (RFE). Consult Omega®  
for more information.  
7.2.1 Connections and Initial Warm Up  
Power up the Mass Flow Meter for at least 15 minutes prior to commencing the  
calibration procedure. Establish digital RS485 / RS232 communication between  
PC (communication terminal) and the FMA 4000. Start Omega® supplied calibra-  
tion and maintenance software on the PC.  
7.2.2 ZERO Check/Adjustment  
Using Omega® supplied calibration and maintenance software open Back Door  
access:  
Query/BackDoor/Open  
When software prompts with Warning, click the [YES] button. This will open the  
access to the rest of the Query menu.  
Start Sensor Compensated Average reading:  
Query/Read/ SensorCompAverage  
This will display Device Sensor Average ADC counts.  
With no flow conditions, the sensor Average reading must be in the range 120  
10 counts. If it is not, perform Auto Zero procedure (see section 5.3.10 “Zero  
Calibration”).  
7.2.3 Gas Linearization Table Adjustment  
Note: Your FMA 4000 Digital Mass Flow Meter was calibrated at the  
factory for the specified gas and full scale flow range (see device’s  
front label). There is no need to adjust the gas linearization table  
unless linearity adjustment is needed, flow range has to be changed,  
or new additional calibration is required. Any alteration of the gas  
linearization table will VOID calibration warranty supplied with instrument.  
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Gas flow calibration parameters are separately stored in the Gas Dependent por-  
tion of the EEPROM memory for each of 10 calibration tables. See APPENDIX I  
for complete list of gas dependent variables.  
Note: Make sure the correct gas number and name selected are  
current. All adjustments made to the gas linearization table will be  
applied to the currently selected gas. Use Gas Select command via  
digital communication interface (see paragraph 8.3 ASCII Command  
Set “FMA 4000 SOFTWARE INTERFACE COMMANDS”) or Omega®  
supplied calibration and maintenance software to verify current gas  
table or select a new gas table.  
The FMA 4000 gas flow calibration involves building a table of the actual flow val-  
ues (indexes 114, 116, 118, 120, 122, 124, 126, 128, 130, 132, 134) and corre-  
sponding sensor readings (indexes 113, 115, 117, 118, 119, 121, 123, 125, 127,  
129, 131, 133).  
Actual flow values are entered in normalized fraction format: 100.000 % F.S. cor-  
responds to 1.000000 flow value and 0.000 % F.S. corresponds to 0.000000 flow  
value. The valid range for flow values is from 0.000000 to 1.000000 (note: FMA  
4000 will accept up to 6 digits after decimal point).  
Sensor readings are entered in counts of 12 bits ADC output and should always  
be in the range of 0 to 4095.There are 11 elements in the table so the data should  
be obtained at an increment of 10.0 % of full scale (0.0, 10.0, 20.0, 30.0, 40.0,  
50.0, 60.0, 70.0, 80.0, 90.0 and 100.0 % F.S.).  
Note: Do not alter memory index 113 (must be 120 counts) and 114  
(must be 0.0). These numbers represent zero flow calibration points  
and should not be changed.  
If a new gas table is going to be created, it is recommended to start calibration  
from 100% full scale. If only linearity adjustment is required, calibration can be  
started in any intermediate portion of the gas table.  
Using the flow regulator, adjust the flow rate to 100% of full scale flow. Check the  
flow rate indicated against the flow calibrator. Observe the flow reading on the  
FMA 4000. If the difference between calibrator and FMA 4000 flow reading is  
more than 0.5% F.S., make a correction in the sensor reading in the correspon-  
ding position of the linearization table (see Index 133).  
If the FMA 4000 flow reading is more than the calibrator reading, the number of  
counts in the index 133 must be decreased. If the FMA 4000 flow reading is less  
than the calibrator reading, the number of counts in the index 133 must be  
increased. Once Index 133 is adjusted with a new value, check the FMA 4000 flow  
rate against the calibrator and, if required, perform additional adjustments for  
Index 133.  
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If a simple communication terminal is used for communication with the FMA 4000,  
then “MW” (Memory Write) command from the software interface commands set  
may be used to adjust sensor value in the linearization table (see section 8.3 for  
complete software interface commands list).  
Memory Read “MR” command can be used to read the current value of the index.  
Assuming the FMA 4000 is configured with RS485 interface and has address  
“11”, the following example will first read the existing value of Index 133 and then  
write a new adjusted value:  
!11,MR,133[CR]  
- reads EEPROM address 133  
!11,MW,133,3450[CR] - writes new sensor value (3450 counts) in to the index 133  
Once 100% F.S. calibration is completed, the user can proceed with calibration for  
another 9 points of the linearization table by using the same approach.  
Note: It is recommended to use Omega® supplied calibration and  
maintenance software for gas table calibration. This software includes  
an automated calibration procedure which may radically simplify  
reading and writing for the EEPROM linearization table.  
7.3  
Analog output Calibration of FMA 4000  
Mass Flow Meter  
FMA 4000 series Mass Flow Meters are equipped with  
calibrated 0-5 Vdc and 4-20 mA output signals. The set  
of the jumpers (J7A, J7B, J7C) on the printed circuit  
board is used to switch between 0-5 Vdc and 4-20 mA  
output signals (Figure c-1 “FMA 4000 configuration  
jumpers”).  
AutoZero/Reset  
push button.  
FUNCTION J7A  
JCD  
J7B  
6-10 7-11  
2-6 3-7  
J7C  
ANALOG  
OUTPUT  
0-5 VDC  
4-20 mA  
OFF  
5-9  
1-5  
RS485  
8-12  
4-8  
TERMINAL  
RESISTOR  
ON  
J7 Jumpers  
Figure c-1 FMA 4000 Analog Output Configuration Jumpers  
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The FMA 4000 analog output calibration involves calculation and storing of the  
offset and span variables in the EEPROM for each available output. The 0-5 Vdc  
output has only scale variable and 20 mA output has offset and scale variables.  
The following is a list of the Gas independent variables used for analog output  
computation:  
Note: The analog output available on the FMA 4000 Digital Mass Flow  
Meter was calibrated at the factory for the specified gas and full scale  
flow range (see the device’s front label). There is no need to perform  
analog output calibration unless the EEPROM IC was replaced or  
offset/span adjustment is needed. Any alteration of the analog output  
scaling variables in the Gas independent table will VOID calibration  
warranty supplied with instrument.  
Note: It is recommended to use the Omega® supplied calibration and  
maintenance software for analog output calibration. This software  
includes an automated calibration procedure which may radically  
simplify calculation of the offsets and spans variables and, the reading  
and writing for the EEPROM table.  
Index Name  
Description  
25  
27  
28  
AoutScaleV  
- DAC 0-5 Vdc Analog Output Scale  
AoutScale_mA - DAC 4-20mA Analog Output Scale  
AoutOffset_mA - DAC 4-20mA Analog Output Offset  
7.3.1 Initial Setup  
Power up the Mass Flow Meter for at least 15 minutes prior to commencing the  
calibration procedure. Make sure absolutely no flow takes place through the  
meter. Establish digital RS485 / RS232 communication between PC (communi-  
cation terminal) and FMA 4000. The commands provided below assume that cal-  
ibration will be performed manually (w/o Omega® supplied calibration and main-  
tenance software) and the device has RS485 address 11. If Omega® supplied cal-  
ibration and maintenance software is used, skip the next section and follow the  
software prompts.  
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Enter Backdoor mode by typing:  
Unit will respond with:  
Disable DAC update by typing:  
Unit will respond with:  
!11,MW,1000,1[CR]  
!11,BackDoorEnabled: Y  
!11,WRITE,4,D[CR]  
!11,DisableUpdate: D  
7.3.2 Gas flow 0-5 Vdc analog output calibration  
1. Install jumpers J7A, J7B and J7C on the PC board for 0-5 Vdc output (see Table VI).  
2. Connect a certified high sensitivity multi meter set for the voltage measurement to the  
pins 2 (+) and 1 (-) of the 15 pins D connector.  
3. Write 4000 counts to the DAC channel 1: !11,WRITE,1,4000[CR]  
4. Read voltage with the meter and calculate:  
5. Save FlowOutScaleV in to the EEPROM:  
Where: X – the calculated AoutScaleV value.  
!11,MW,25,X[CR]  
7.3.3 Gas flow 4-20 mA analog output calibration  
1. Install jumpers J7A, J7B and J7C on the PC board for 4-20 mA output (see Table VI).  
2. Connect a certified high sensitivity multi meter set for the current measurement to  
pins 2 (+) and 1 (-) of the 15 pins D connector.  
3. Write 4000 counts to the DAC channel 1:  
4. Read current with the meter and calculate:  
!11,WRITE,1,4000[CR]  
5. Write zero counts to the DAC channel 1:  
!11,WRITE,1,0CR]  
6. Read offset current with the meter and calculate:  
7. Save AoutScale_mA in to the EEPROM:  
Save AoutOffset_mA in to the EEPROM:  
!11,MW,27,Y[CR]  
!11,MW,28,Z[CR]  
Where: Y – the calculated AoutScale_mA value.  
Z – the calculated AoutOffset_mA value.  
Note: When done with the analog output calibration make sure the  
DAC update is enabled and the BackDoor is closed  
(see command below).  
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Enable DAC update by typing:  
Unit will respond with:  
!11,WRITE,4,N[CR]  
!11,DisableUpdate: N  
Close BackDoor access by typing:  
Unit will respond with:  
!11,MW,1000,0[CR]  
!11,BackDoorEnabled: N  
8.  
RS485 / RS232 SOFTWARE INTERFACE COMMANDS  
General  
8.1  
The standard FMA 4000 comes with an RS485 interface. For the optional RS232  
interface, the start character (!) and two hexadecimal characters for the address  
must be omitted. The protocol described below allows for communications with  
the unit using either a custom software program or a “dumb terminal. All values  
are sent as printable ASCII characters. For RS485 interface, the start character is  
always (!).The command string is terminated with a carriage return (line feeds are  
automatically stripped out by the FMA 4000). See section 2.2.3 for information  
regarding communication parameters and cable connections.  
8.2  
Commands Structure  
The structure of the command string:  
!<Addr>,<Cmd>,Arg1,Arg2,Arg3,Arg4<CR>  
Where:  
!
Start character **  
RS485 device address in the ASCII representation of hexadecimal  
(00 through FF are valid).**  
Addr  
Cmd  
The one or two character command from the table below.  
Arg1 to Arg4 The command arguments from the table below.  
Multiple arguments are comma delimited.  
CR  
Carriage Return character.  
Note: ** Default address for all units is 11. Do not submit start  
character and two character hexadecimal device address for  
RS232 option.  
Several examples of commands follow. All assume that the FMA 4000 has been  
configured for address 18 (12 hex) on the RS485 bus:  
1. To get current calibration tables: !12,G<CR>  
The FMA 4000 will reply:  
!12,G 0 AIR<CR>  
(Assuming Current Gas table is #0, calibrated for AIR )  
2. To get current Alarm status:  
The FMA 4000 will reply:  
3. To get a flow reading:  
!12,A,R<CR>  
!12,N<CR> (Assuming no alarm conditions)  
!12,F<CR>The FMA 4000 will reply:  
!12,50.0<CR> (Assuming the flow is at 50% FS)  
4. Set the high alarm limit to 85% of full scale flow rate:  
!12,A,H,85.0<CR>  
The FMA 4000 will reply:  
!12,AH85.0<CR>  
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Note: Address 00 is reserved for global addressing. Do not assign, the  
global address for any device. When command with global address is  
sent, all devices on the RS485 bus execute the command but do not  
reply with an acknowledge message.  
The global address can be used to change RS485 address for a particular device with  
unknown address:  
1.  
2.  
Make sure only one device (which address must be changed) is connected to the  
RS485 network.  
Type the memory write command with global address: !00,MW,7,XX[CR] where  
XX, the new hexadecimal address, can be [01 – FF].  
After assigning the new address, a device will accept commands with the new address.  
Note: Do not assign the same RS485 address for two or more  
devices on the same RS485 bus. If two or more devices with the same  
address are connected to the one RS485 network, a communication  
collision will take place on the bus and communication errors will occur.  
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8.3  
ASCII Commands Set  
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9.  
TROUBLESHOOTING  
Common Conditions  
9.1  
Your FMA 4000 Digital Mass Flow Meter was thoroughly checked at numerous  
quality control points during and after manufacturing and assembly operations. It  
was calibrated according to your desired flow and pressure conditions for a given  
gas or a mixture of gases.  
It was carefully packed to prevent damage during shipment. Should you feel that  
the instrument is not functioning properly, please check for the following common  
conditions first:  
Are all cables connected correctly? Are there any leaks in the installation? Is the  
power supply correctly selected according to requirements? When several meters  
are used a power supply with appropriate current rating should be selected.  
Were the connector pinouts matched properly? When interchanging with other  
manufacturers' equipment, cables and connectors must be carefully wired for cor-  
rect pin configurations. Is the pressure differential across the instrument sufficient?  
34  
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9.2  
Troubleshooting Guide  
NO.  
INDICATION  
LIKELY REASON  
SOLUTION  
1
No zero reading after  
15 min. warm up time has been changed.  
and no flow condition.  
Embedded temperature Perform Auto Zero Procedure (see section  
5.3.6 “Zero Calibration”).  
2
Status LED indicator  
and LCD Display  
Power supply is bad or Measure voltage on pins 7 and 5 of the 15  
polarity is reversed.  
pin D-connector. If voltage is out of  
specified range, then replace power supply  
with a new one. If polarity is reversed  
(reading is negative) make correct  
connection.  
remains blank when  
unit is powered up. No  
response when flow is  
introduced from analog  
outputs 0-5 Vdc or  
4-20 mA.  
PC board is defective.  
Return FMA 4000 to factory for repair.  
3
4
LCD Display reading or Output 0-5 Vdc signal  
/ and analog output (pins 2–1 of the  
0-5 Vdc signal fluctuate D-connector) is shorted resistance is more than 1000 Ohm.  
Check external connections to pin 2 – 1, of  
the D-connector. Make sure the load  
in wide range during  
flow measurement.  
on the GND or  
overloaded.  
LCD Display reading  
does correspond to the  
correct flow range, but  
0-5 Vdc output signal  
does not change  
(always the same read  
ing or around zero).  
Output 0-5 Vdc  
schematic is burned  
out or damaged.  
Return FMA 4000 to factory for repair.  
Analog flow output  
scale and offset  
variable are corrupted. recalibration (see section 7.3).  
Restore original EEPROM scale and offset  
variable or perform analog output  
5
LCD Display reading  
and 0-5 Vdc output  
voltage do correspond  
to the correct flow  
range, but 4-20 mA  
output signal does not  
change (always the  
same or reading  
External loop is open or Check external connections to pins 2 and  
load resistance more  
than 500 Ohm.  
15 of the D-connector. Make sure the loop  
resistance is less than 500 Ohm.  
Output 4-20 mA  
schematic is burned  
out or damaged.  
Return FMA 4000 to factory for repair.  
around 4.0 mA).  
6
7
Calibration is off (more FMA 4000 has initial  
than 1.0 % F.S.). zero shift.  
Shut off the flow of gas into the FMA 4000  
(ensure gas source is disconnected and no  
seepage or leak occurs into the meter).  
Wait for 15 min. with no flow condition and  
perform Auto Zero calibration Procedure  
(see section 5.3.7 “Zero Calibration”).  
LCD Display reading is Sensor under  
Lower the flow through FMA 4000 within  
calibrated range or shut down the flow  
completely. The swamping condition will  
end automatically.  
swamping conditions  
above maximum flow  
range and output volt  
age 0-5 Vdc signal is  
more than 5.0 Vdc  
when gas flows  
(flow is more than 10%  
above maximum flow  
rate for particular  
FMA 4000).  
through the FMA 4000.  
PC board is defective.  
Return FMA 4000 to factory for repair.  
35  
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NO.  
INDICATION  
LIKELY REASON  
SOLUTION  
8
Gas flows through the The gas flow is too low Check maximum flow range on transducer’s  
FMA 4000, but LCD for particular model of front panel and make required flow  
Display reading and the FMA 4000.  
output voltage 0-5 Vdc  
adjustment.  
FMA 4000 models:  
Unscrew the inlet compression fitting of the  
meter and reinstall RFE (see section 6.2.2).  
NOTE: Calibration accuracy can be affected.  
signal do not respond  
to flow.  
RFE is not connected  
properly to the inlet  
fitting.  
Sensor or PC board is Return FMA 4000 to factory for repair.  
defective.  
9
Gas does not flow  
through the FMA 4000  
with inlet pressure  
applied to the inlet  
fitting. LCD Display  
reading and output  
voltage 0-5 Vdc signal  
show zero flow.  
Filter screen obstructed Flush clean or disassemble to remove  
at inlet.  
impediments or replace the filter screen  
(see section 6.2).  
NOTE: Calibration accuracy can be affected.  
10 Gas flows through the Direction of the gas  
Check the direction of gas flow as indicated  
by the arrow on the front of the meter and  
make required reconnection in the  
installation.  
FMA 4000, output  
voltage 0-5 Vdc signal  
does not respond to  
flow (reading near  
1mV).  
flow is reversed.  
FMA 4000 is connected Locate and correct gas leak in the system.  
in the installation with If FMA 4000 has internal leak return it to  
back pressure  
factory for repair.  
conditions and gas leak  
exist in the system.  
11 The Status LED  
indicator is rapidly  
flashing with UMBER  
color on /off.  
Sensor temperature is Make sure the ambient and gas  
too low.  
temperatures are within specified range  
F
(above 5 C)  
12 The Status LED  
indicator is rapidly  
flashing with RED color  
on /off.  
Sensor temperature is Make sure the ambient and gas  
too high.  
temperatures are within specified range  
F
(below 50 C).  
13 The Status LED  
indicator is rapidly  
flashing with RED and  
UMBER colors.  
MCU temperature is too Disconnect power from the FMA 4000.  
high (overload).  
Make sure the ambient temperature is with  
F
in specified range (below 50 C). Let the  
device cool down for at least 15 minutes.  
Apply power to the FMA 4000 and check  
status LED indication. If overload condition  
will be indicated again the unit has to be  
returned to the factory for repair.  
14 The Status LED  
indicator is constantly  
on with the RED light.  
Fatal Error (EEPROM  
or Auto Zero error).  
Cycle the power on the FMA 4000. If Status  
LED still constantly on with RED light, wait  
6 minutes and start Auto Zero function (see  
5.3.7 Zero Calibration). If after Zero  
Calibration the Fatal Error condition will be  
indicated again the unit has to be returned  
to the factory for repair.  
36  
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9.3  
Technical Assistance  
OMEGA7 Engineering will provide technical assistance over the phone to quali-  
fied repair personnel. Please call our Flow Department at 800-872-9436 Ext.  
2298. Please have your Serial Number and Model Number ready when you call.  
10.  
CALIBRATION CONVERSIONS FROM  
REFERENCE GASES  
The calibration conversion incorporates the K factor. The K factor is derived from  
gas density and coefficient of specific heat. For diatomic gases:  
1
=
Kgas  
d X Cp  
where d = gas density (gram/liter)  
Cp  
= coefficient of specific heat (cal/gram)  
Note in the above relationship that d and Cp are usually chosen at the same con-  
ditions (standard, normal or other).  
If the flow range of a Mass Flow Meter remains unchanged, a relative K factor is  
used to relate the calibration of the actual gas to the reference gas.  
Qa  
Qr  
Ka  
Kr  
K =  
=
where Qa  
=
=
=
=
mass flow rate of an actual gas (sccm)  
mass flow rate of a reference gas (sccm)  
K factor of an actual gas  
Qr  
Ka  
Kr  
K factor of a reference gas  
For example, if we want to know the flow rate of oxygen and wish to calibrate  
with nitrogen at 1000 SCCM, the flow rate of oxygen is:  
QO2 = Qa = Qr X K = 1000 X 0.9926 = 992.6 sccm  
where K = relative K factor to reference gas (oxygen to nitrogen)  
Note: If particular K factor is activated via digital interface, the user  
does not need to perform any conversion. All conversion computations  
will be performed internally by MCU.  
37  
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APPENDIX I  
OMEGA7 FMA 4000 EEPROM Variables Rev.A0 [10/2/2007]  
Gas Independent Variables  
INDEX  
NAME  
BlankEEPROM  
SerialNumber  
ModelNumber  
SoftwareVer  
TimeSinceCalHr  
Options1  
DATA TYPE  
char[10]  
char[20]  
char[20]  
char[10]  
float  
NOTES  
0
Do not modify. Table Revision [PROTECTED]  
Serial Number [PROTECTED]  
1
2
Model Number [PROTECTED]  
3
Firmware Version [PROTECTED]  
4
Time since last calibration in hours.  
Misc. Options*  
5
uint  
6
BackLight  
int  
Back Light Level [0-4095]  
7
AddressRS485  
GasNumber  
FlowUnits  
char[4]  
int  
Two character address for RS485 only  
Current Gas Table Number [0-9]  
8
9
int  
Current Units of Measure [0-22]  
10  
11  
12  
13  
14  
15  
16  
17  
18  
19  
20  
21  
22  
23  
24  
25  
26  
27  
28  
29  
30  
31  
32  
33  
34  
AlarmMode  
LowAlarmPFS  
HiAlarmPFS  
AlmDelay  
char  
Alarm Mode ['E’- Enabled, 'D’ - Disabled]  
Low Flow Alarm Setting [%FS] 0-Disabled  
High Flow Alarm Setting [%FS] 0-Disabled  
Flow Alarm Action Delay [0-3600sec] 0-Disabled  
Relays Assignment Setting (N, T, H, L, R, M)  
Totalizer Mode ['E’- Enabled, 'D’ - Disabled]  
Totalizer Volume in %*s (updated every 6 min)  
Start Totalizer at flow [%FS] 0 - Disabled  
Totalizer Action Limit Volume [%*s] 0-Disabled  
D-Disabled, I-Internal, U-User Defined  
Internal K-Factor Index [0-35]**  
float  
float  
uint  
RelaySetting  
TotalMode  
char[4]  
char  
Total  
float  
TotalFlowStart  
TotalVolStop  
KfactorMode  
KfactorIndex  
UserDefKfactor  
UDUnitKfactor  
UDUnitTimeBase  
UDUnitDensity  
AoutScaleV  
DRC_DP  
float  
float  
char  
int  
float  
User Defined K-Factor  
float  
K-Factor for User Defined Units of Measure  
User Defined Unit Time Base [1, 60, 3600 sec]  
User Defined Unit Density Flag [Y, N]  
DAC 0-5 Vdc Analog Output Scale  
H/W DRC DP settings [0-255]  
int  
char  
float  
float  
AoutScale_mA  
AoutOffset_mA  
SensorZero  
Klag [0]  
float  
DAC 4-20mA Analog Output Scale  
DAC 4-20mA Analog Output Offset  
DPW value for Sensor Zero [0-1023]  
DRC Lag Constant [Do Not Alter]  
DRC Lag Constant [Do Not Alter]  
DRC Lag Constant [Do Not Alter]  
DRC Lag Constant [Do Not Alter]  
DRC Lag Constant [Do Not Alter]  
float  
uint  
float  
Klag [1]  
float  
Klag [2]  
float  
Klag [3]  
float  
Klag [4]  
float  
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INDEX  
35  
NAME  
Klag [5]  
DATA TYPE  
float  
NOTES  
DRC Lag Constant [Do Not Alter]  
Gain for DRC Lag Constant [Do Not Alter]  
Gain for DRC Lag Constant [Do Not Alter]  
Gain for DRC Lag Constant [Do Not Alter]  
Gain for DRC Lag Constant [Do Not Alter]  
Gain for DRC Lag Constant [Do Not Alter]  
Gain for DRC Lag Constant [Do Not Alter]  
Resistance when last AutoZero was done [0-4095 count]  
Resistance correction coefficient [PFS/count]  
Alarm Latch [0-3]  
36  
Kgain[0]  
float  
37  
Kgain[1]  
float  
38  
Kgain[2]  
float  
39  
Kgain[3]  
float  
40  
Kgain[4]  
float  
41  
Kgain[5]  
float  
42  
Zero_T  
float  
43  
Tcor_K  
float  
44  
AlarmLatch  
TotalWarmDisable  
Reserved1  
LCD_Diagnostic  
uint  
45  
char  
Sensor Warm Up period Totalizer [D/E]  
Reserved  
46  
uint  
47  
char  
LCD Diagnostic Mode: [E/D]**  
Flow Reading Averaging: [0,1,2]  
(100, 250, 1000 ms), Default -1  
48  
Reserved2  
uint  
49  
50  
N _RollBack  
2
char  
uint  
Back to N conversion mode: [E, D]  
2
Reserved3  
Reserved for Troubleshooting (do not change)  
39  
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Calibration Table: Gas Dependent Variables.  
INDEX  
100  
NAME  
DATA TYPE  
char[20]  
float  
NOTES  
GasIdentifer  
FullScaleFlow  
StdTemp  
Name of Gas [If not calibrated = “Uncalibrated”]  
Full Scale Range in l/min  
Standard Temperature  
101  
102  
float  
103  
StdPressure  
StdDensity  
float  
Standard Pressure  
104  
float  
Gas Standard Density  
Name of Gas used for Calibration  
[If not calibrated=[“Uncalibrated”]  
105  
CalibrationGas  
char[20]  
106  
107  
108  
109  
110  
111  
112  
113  
114  
115  
116  
117  
118  
119  
120  
121  
122  
123  
124  
125  
126  
127  
128  
129  
130  
131  
132  
133  
134  
CalibratedBy  
CalibratedAt  
char[20]  
char[20]  
char[12]  
char[12]  
float  
float  
float  
uint  
Name of person who performed actual calibration  
Name of Calibration Facility  
Calibration Date  
DateCalibrated  
DateCalibrationDue  
Date Calibration Due  
K_N  
Gas Parameters: K-factor relative to N  
2
2
K_F1  
Reserved  
Reserved  
K_F1  
SensorTbl[0][Sensor Value]  
SensorTbl[0][Flow]  
Index 0: Must be 120 (zero value) Do not Alter!  
Index 0: Must be 0.0 (zero PFS) Do not Alter!  
10.0%F.S. A/D value from sensor [counts].  
Actual Flow in PFS [0.1].  
float  
uint  
SensorTbl[1][Sensor Value]  
SensorTbl[1][Flow]  
float  
uint  
SensorTbl[2][Sensor Value]  
SensorTbl[2][Flow]  
20.0%F.S. A/D value from sensor [counts].  
Actual Flow in PFS [0.2].  
float  
uint  
SensorTbl[3][Sensor Value]  
SensorTbl[3][Flow]  
30.0%F.S. A/D value from sensor [counts].  
Actual Flow in PFS [0.3].  
float  
uint  
SensorTbl[4][Sensor Value]  
SensorTbl[4][Flow]  
40.0%F.S. A/D value from sensor [counts].  
Actual Flow in PFS [0.4].  
float  
uint  
SensorTbl[5][Sensor Value]  
SensorTbl[5][Flow]  
50.0%F.S. A/D value from sensor [counts].  
Actual Flow in PFS [0.5].  
float  
uint  
SensorTbl[6][Sensor Value]  
SensorTbl[6][Flow]  
60.0%F.S. A/D value from sensor [counts].  
Actual Flow in PFS [0.6].  
float  
uint  
SensorTbl[7][Sensor Value]  
SensorTbl[7][Flow]  
70.0%F.S. A/D value from sensor [counts].  
Actual Flow in PFS [0.7].  
float  
uint  
SensorTbl[8][Sensor Value]  
SensorTbl[8][Flow]  
80.0%F.S. A/D value from sensor [counts].  
Actual Flow in PFS [0.8].  
float  
uint  
SensorTbl[9][Sensor Value]  
SensorTbl[9][Flow]  
90.0%F.S. A/D value from sensor [counts].  
Actual Flow in PFS [0.9].  
float  
uint  
SensorTbl[10][Sensor Value]  
SensorTbl[10][Flow]  
100.0%F.S. A/D value from sensor [counts].  
Flow in PFS. Should be 1.0 Do not Alter!  
float  
Note: Values will be available for selected gas only.  
40  
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APPENDIX II INTERNAL “K” FACTORS  
ƽ CAUTION: K-Factors at best are only an approximation. K factors should not  
be used in applications that require accuracy better than +/- 5 to 10%.  
K Factor  
Relative  
to N2  
Cp  
[Cal/g]  
DENSITY  
[g/I]  
INDEX  
ACTUAL GAS  
0
1
2
3
Acetylene C2H2  
Air  
Allene (Propadiene) C3H4  
Ammonia NH3  
0.5829  
1.000  
0.4346  
.7310  
.4036  
0.24  
0.352  
.492  
1.162  
1.293  
1.787  
.760  
4
5
6
7
8
9
Argon Ar  
1.4573  
0.6735  
0.4089  
0.5082  
0.8083  
0.38  
.1244  
0.1167  
0.1279  
0.1778  
0.0539  
0.0647  
0.1369  
0.1161  
0.1113  
0.3514  
.4007  
1.782  
3.478  
5.227  
3.025  
7.130  
11.18  
7.803  
6.108  
6.644  
2.413  
2.593  
2.503  
2.503  
2.503  
1.964  
3.397  
1.250  
6.860  
3.926  
2.945  
2.680  
3.163  
Arsine AsH3  
Boron Trichloride BCl3  
Boron Triflouride BF3  
Bromine Br2  
Boron Tribromide Br3  
10 Boromine Pentaflouride BrF5  
11 Boromine Triflouride BrF3  
12 Bromotriflouromethane CBrF3  
13 1,3-Butadiene C4H6  
14 Butane C4H10  
0.26  
0.3855  
0.3697  
0.3224  
.2631  
0.2994  
0.324  
0.291  
.7382  
0.6026  
1.00  
15 1-Butane C4H8  
0.3648  
0.336  
16 2-Butane C4H8 CIS  
17 2-Butane C4H8 TRANS  
18 Carbon Dioxide CO2  
19 Carbon Disulfide CS2  
0.374  
.2016  
0.1428  
.2488  
20  
Carbon Monoxide CO  
21 Carbon Tetrachloride CCl4  
22 Carbon Tetrafluoride (Freon-14) CF4  
23 Carbonyl Fluoride COF2  
24 Carbonyl Sulfide COS  
25 Chlorine Cl2  
0.31  
0.1655  
0.1654  
0.1710  
0.1651  
0.114  
0.42  
0.5428  
0.6606  
0.86  
26 Chlorine Trifluoride ClF3  
27 Chlorodifluoromethane (Freon-22) CHClF2  
28 Chloroform CHCl3  
0.4016  
0.4589  
0.3912  
0.1650  
0.1544  
0.1309  
4.125  
5.326  
5.326  
29 Chloropentafluoroethane (Freon-115) C2ClF5  
30 Chlorotrifluoromethane (Freon-13) CClF3  
31 Cyanogen C2N2  
0.2418  
0.3834  
0.61  
0.164  
0.153  
0.2613  
1.241  
3.419  
6.892  
4.660  
3.322  
.1786  
.0899  
32 Helium He  
1.454  
1.0106  
33 Hydrogen H2  
34 Hydrogen H2 (> 100 L/min)  
35 Oxygen O2  
1.92  
3.419  
0.0899  
1.427  
0.9926  
0.2193  
41  
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APPENDIX III GAS FACTOR TABLE (“K FACTORS”)  
ƽ CAUTION: K-Factors at best are only an approximation. K factors should not  
be used in applications that require accuracy better than +/- 5 to 10%.  
K FACTOR  
Relative to N2  
Cp  
[Cal/g]  
Density  
[g/I]  
ACTUAL GAS  
Acetylene C2H2  
Air  
Allene (Propadiene) C3H4  
Ammonia NH3  
.5829  
1.0000  
.4346  
.4036  
.240  
.352  
.492  
1.162  
1.293  
1.787  
.760  
.7310  
*Argon Ar (<=10 L/min)  
*Argon AR-1 (>=10 L/min)  
1.4573  
1.205  
.1244  
.1244  
1.782  
1.782  
Arsine AsH3  
.6735  
.4089  
.5082  
.8083  
.38  
.1167  
.1279  
.1778  
.0539  
.0647  
.1369  
.1161  
.1113  
.3514  
.4007  
.3648  
.336  
3.478  
5.227  
3.025  
7.130  
11.18  
7.803  
6.108  
6.644  
2.413  
2.593  
2.503  
2.503  
2.503  
Boron Trichloride BCl3  
Boron Trifluoride BF3  
Bromine Br2  
Boron Tribromide Br3  
Bromine PentaTrifluoride BrF5  
Bromine Trifluoride BrF3  
Bromotrifluoromethane (Freon-13 B1) CBrF3  
1,3-Butadiene C4H6  
Butane C4H10  
.26  
.3855  
.3697  
.3224  
.2631  
.2994  
.324  
1-Butene C4H8  
2-Butene C4H8 CIS  
2-Butene C4H8 TRANS  
.291  
.374  
*Carbon Dioxide CO2 (<10 L/min)  
*Carbon Dioxide CO2-1 (>10 L/min)  
.7382  
.658  
.2016  
.2016  
1.964  
1.964  
Carbon Disulfide CS2  
Carbon Monoxide C0  
Carbon Tetrachloride CCl4  
Carbon Tetrafluoride (Freon-14)CF4  
Carbonyl Fluoride COF2  
Carbonyl Sulfide COS  
.6026  
1.00  
.31  
.1428  
.2488  
.1655  
.1654  
.1710  
.1651  
.114  
.1650  
.1544  
.1309  
.164  
3.397  
1.250  
6.860  
3.926  
2.945  
2.680  
3.163  
4.125  
3.858  
5.326  
6.892  
4.660  
2.322  
2.742  
1.877  
.42  
.5428  
.6606  
.86  
.4016  
.4589  
.3912  
.2418  
.3834  
.61  
Chlorine Cl2  
Chlorine Trifluoride ClF3  
Chlorodifluoromethane (Freon-22)CHClF2  
Chloroform CHCl3  
Chloropentafluoroethane(Freon-115)C2ClF5  
Chlorotrifluromethane (Freon-13) CClF3  
CyanogenC2N2  
.153  
.2613  
.1739  
.3177  
CyanogenChloride CICN  
Cyclopropane C3H5  
.6130  
.4584  
* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.  
42  
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K FACTOR  
Relative to N2  
Cp  
[Cal/g]  
Density  
[g/I]  
ACTUAL GAS  
Deuterium D2  
Diborane B2H6  
1.00  
1.722  
.508  
.15  
.1432  
.140  
.1882  
.150  
.1604  
.224  
.366  
.3414  
.3914  
.420  
.3395  
.3513  
.244  
1.799  
1.235  
9.362  
5.395  
4.592  
5.758  
4.506  
7.626  
2.857  
2.011  
2.055  
3.219  
1.342  
2.055  
2.413  
2.879  
1.251  
1.965  
1.695  
3.127  
6.129  
5.395  
4.660  
6.644  
3.926  
4.592  
3.858  
8.360  
7.626  
6.892  
8.397  
3.418  
9.565  
.4357  
.1947  
.3538  
.4252  
.2522  
.4044  
.2235  
.4271  
.3714  
.3896  
.2170  
.50  
Dibromodifluoromethane CBr2F2  
Dichlorodifluoromethane (Freon-12) CCl2F2  
Dichlofluoromethane (Freon-21) CHCl2F  
Dichloromethylsilane (CH3)2SiCl2  
Dichlorosilane SiH2Cl2  
Dichlorotetrafluoroethane (Freon-114) C2Cl2F4  
1,1-Difluoroethylene (Freon-1132A) C2H2F2  
Dimethylamine (CH3)2NH  
Dimethyl Ether (CH3)2O  
2,2-Dimethylpropane C3H12  
Ethane C2H6  
Ethanol C2H6O  
Ethyl Acetylene C4H6  
Ethyl Chloride C2H5Cl  
Ethylene C2H4  
Ethylene Oxide C2H4O  
Fluorine F2  
Fluoroform (Freon-23) CHF3  
Freon-11 CCl3F  
Freon-12 CCl2F2  
Freon-13 CClF3  
Freon-13B1 CBrF3  
Freon-14 CF4  
Freon-21 CHCl2F  
Freon-22 CHClF2  
Freon-113 CCl2FCClF2  
Freon-114 C2Cl2F4  
.3918  
.3225  
.3891  
.60  
.365  
.268  
.5191  
.9784  
.4967  
.3287  
.3538  
.3834  
.3697  
.4210  
.4252  
.4589  
.2031  
.2240  
.2418  
.1760  
.5696  
.2668  
.1873  
.176  
.1357  
.1432  
.153  
.1113  
.1654  
.140  
.1544  
.161  
.160  
.164  
.185  
.1404  
.1071  
Freon-115 C2ClF5  
Freon-C318 C4F8  
Germane GeH4  
Germanium Tetrachloride GeCl4  
*Helium He (<50 L/min)  
*Helium He-1 (>50 L/min)  
*Helium He-2 (>10-50 L/min)  
1.454  
2.43  
2.05  
1.241  
1.241  
1.241  
.1786  
.1786  
.1786  
Hexafluoroethane C2F6 (Freon-116)  
Hexane C6H14  
.2421  
.1792  
.1834  
.3968  
6.157  
3.845  
*Hydrogen H2-1 (<10-100 L)  
*Hydrogen H2-2 (>10-100 L)  
*Hydrogen H2-3 (>100 L)  
1.0106  
1.35  
1.9  
3.419  
3.419  
3.419  
.0899  
.0899  
.0899  
* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.  
43  
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K FACTOR  
Relative to N2  
Cp  
[Cal/g]  
Density  
[g/I]  
ACTUAL GAS  
Hydrogen Bromide HBr  
1.000  
1.000  
.764  
.9998  
.9987  
.7893  
.80  
.2492  
.27  
.2951  
1.453  
.0861  
.1912  
.3171  
.3479  
.0545  
.1025  
.2397  
.1108  
.3872  
.3701  
.0593  
3.610  
1.627  
1.206  
.893  
5.707  
3.613  
1.520  
9.90  
Hydrogen Chloride HCl  
Hydrogen Cyanide HCN  
Hydrogen Fluoride HF  
Hydrogen Iodide HI  
Hydrogen Selenide H2Se  
Hydrogen Sulfide H2S  
Iodine Pentafluoride IF5  
Isobutane CH(CH3)3  
Isobutylene C4H6  
3.593  
2.503  
3.739  
Krypton Kr  
.7175  
.75  
.5328  
.5328  
.7175  
.7175  
*Methane CH4 (<=10 L/min)  
*Methane CH4-1 (>=10 L/min)  
Methanol CH3  
.5843  
.4313  
.5835  
.6299  
.68  
.5180  
.2499  
.2126  
.3512  
.51  
.3274  
.3547  
.1106  
.1926  
.3221  
.2459  
.164  
.1373  
.387  
.4343  
.246  
1.429  
1.787  
4.236  
2.253  
1.518  
2.146  
6.669  
9.366  
2.011  
1.386  
.900  
Methyl Acetylene C3H4  
Methyl Bromide CH2Br  
Methyl Chloride CH3Cl  
Methyl Fluoride CH3F  
Methyl Mercaptan CH3SH  
Methyl Trichlorosilane (CH3)SiCl3  
Molybdenum Hexafluoride MoF6  
Monoethylamine C2H5NH2  
Monomethylamine CH3NH2  
1.46  
Neon NE  
.990  
1.000  
.737  
.4802  
.6134  
.7128  
.176  
.9926  
.6337  
.446  
.2554  
.2134  
.3950  
.174  
.4438  
.759  
.2328  
.2485  
.1933  
.1797  
.1632  
.2088  
.185  
.2193  
.1917  
.195  
.38  
.398  
.1514  
.197  
.1394  
.2374  
1.339  
1.25  
Nitric Oxide NO  
Nitrogen N2  
Nitrogen Dioxide NO2  
Nitrogen Trifluoride NF3  
2.052  
3.168  
2.920  
1.964  
8.397  
1.427  
2.406  
2.144  
2.816  
3.219  
4.571  
8.388  
4.418  
1.517  
Nitrosyl Chloride NOCl  
Nitrous Oxide N2O  
Octafluorocyclobutane (Freon-C318) C4F8  
Oxygen O2  
Oxygen Difluoride OF2  
Ozone  
Pentaborane B5H9  
Pentane C5H12  
Perchloryl Fluoride ClO3F  
Perfluoropropane C3F8  
Phosgene COCl2  
Phosphine PH3  
* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.  
44  
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K FACTOR  
Relative to N2  
Cp  
[Cal/g]  
Density  
[g/I]  
ACTUAL GAS  
Phosphorous Oxychloride POCl3  
Phosphorous Pentafluoride PH5  
Phosphorous Trichloride PCl3  
Propane C3H8  
Propylene C3H6  
Silane SiH4  
Silicon Tetrachloride SiCl4  
Silicon Tetrafluoride SiF4  
Sulfur Dioxide SO2  
Sulfur Hexafluoride SF6  
Sulfuryl Fluoride SO2F2  
Tetrafluoroethane (Forane 134A) CF3CH2F  
Tetrafluorohydrazine N2F4  
Trichlorofluoromethane (Freon-11) CCl3F  
Trichlorosilane SiHCl3  
.36  
.3021  
.30  
.35  
.40  
.5982  
.284  
.3482  
.69  
.2635  
.3883  
.5096  
.3237  
.3287  
.3278  
.1324  
.1610  
.1250  
.399  
6.843  
5.620  
6.127  
1.967  
1.877  
1.433  
7.580  
4.643  
2.858  
6.516  
4.562  
4.224  
4.64  
.366  
.3189  
.1270  
.1691  
.1488  
.1592  
.1543  
.127  
.182  
.1357  
.1380  
6.129  
6.043  
1,1,2-Trichloro-1,2,2 Trifluoroethane  
(Freon-113) CCl2FCClF2  
.2031  
.161  
8.36  
Triisobutyl Aluminum (C4H9)AL  
Titanium Tetrachloride TiCl4  
Trichloro Ethylene C2HCl3  
Trimethylamine (CH3)3N  
Tungsten Hexafluoride WF6  
Uranium Hexafluoride UF6  
Vinyl Bromide CH2CHBr  
Vinyl Chloride CH2CHCl  
Xenon Xe  
.0608  
.2691  
.32  
.2792  
.2541  
.1961  
.4616  
.48  
.508  
.120  
.163  
.3710  
.0810  
.0888  
.1241  
.12054  
.0378  
8.848  
8.465  
5.95  
2.639  
13.28  
15.70  
4.772  
2.788  
5.858  
1.44  
45  
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APPENDIX IV COMPONENT DIAGRAM  
TOP COMPONENT SIDE  
Aug. 09, 2007  
46  
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BOTTOM COMPONENT SIDE  
Aug 09, 2007  
47  
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APPENDIX V  
DIMENSIONAL DRAWINGS  
FMA 4000 WITHOUT READOUT  
48  
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FMA 4000 WITH READOUT OPTION  
49  
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WARRANTY/DISCLAIMER  
OMEGA ENGINEERING, INC. warrants this unit to be free of defects in materials and workmanship for a  
period of 13 months from date of purchase. OMEGA’s Warranty adds an additional one (1) month grace  
period to the normal one (1) year product warranty to cover handling and shipping time. This ensures  
that OMEGA’s customers receive maximum coverage on each product.  
If the unit malfunctions, it must be returned to the factory for evaluation. OMEGA’s Customer Service  
Department will issue an Authorized Return (AR) number immediately upon phone or written request.  
Upon examination by OMEGA, if the unit is found to be defective, it will be repaired or replaced at no  
charge. OMEGA’s WARRANTY does not apply to defects resulting from any action of the purchaser,  
including but not limited to mishandling, improper interfacing, operation outside of design limits, improper  
repair, or unauthorized modification. This WARRANTY is VOID if the unit shows evidence of having been  
tampered with or shows evidence of having been damaged as a result of excessive corrosion; or current,  
heat, moisture or vibration; improper specification; misapplication; misuse or other operating conditions  
outside of OMEGA’s control. Components which wear are not warranted, including but not limited to con-  
tact points, fuses, and triacs.  
OMEGA is pleased to offer suggestions on the use of its various products. However, OMEGA nei-  
ther assumes responsibility for any omissions or errors nor assumes liability for any damages  
that result from the use of its products in accordance with information provided by OMEGA, either  
verbal or written. OMEGA warrants only that the parts manufactured by it will be as specified and  
free of defects. OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY KIND  
WHATSOEVER, EXPRESS OR IMPLIED, EXCEPTTHAT OFTITLE, AND ALL IMPLIED WARRANTIES  
INCLUDING ANY WARRANTY OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PUR-  
POSE ARE HEREBY DISCLAIMED. LIMITATION OF LIABILITY:The remedies of purchaser set forth  
herein are exclusive, and the total liability of OMEGA with respect to this order, whether based on  
contract, warranty, negligence, indemnification, strict liability or otherwise, shall not exceed the  
purchase price of the component upon which liability is based. In no event shall OMEGA be liable  
for consequential, incidental or special damages.  
CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1) as a  
“Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or activity; or (2) in  
medical applications or used on humans. Should any Product(s) be used in or with any nuclear  
installation or activity, medical application, used on humans, or misused in any way, OMEGA assumes  
no responsibility as set forth in our basic WARRANTY/ DISCLAIMER language, and, additionally,  
purchaser will indemnify OMEGA and hold OMEGA harmless from any liability or damage whatsoever  
arising out of the use of the Product(s) in such a manner.  
RETURN REQUESTS/INQUIRIES  
Direct all warranty and repair requests/inquiries to the OMEGA Customer Service Department. BEFORE  
RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN AUTHORIZED  
RETURN (AR) NUMBER FROM OMEGA’S CUSTOMER SERVICE DEPARTMENT (IN ORDER TO  
AVOID PROCESSING DELAYS). The assigned AR number should then be marked on the outside of the  
return package and on any correspondence.  
The purchaser is responsible for shipping charges, freight, insurance and proper packaging to prevent  
breakage in transit.  
FOR WARRANTY RETURNS, please have  
the following information available BEFORE  
contacting OMEGA:  
FOR NON-WARRANTY REPAIRS, consult OMEGA  
for current repair charges. Have the following  
information available BEFORE contacting OMEGA:  
1. Purchase Order number under which  
the product was PURCHASED,  
1. Purchase Order number to cover the  
COST of the repair,  
2. Model and serial number of the product  
under warranty, and  
2. Model and serial number of the  
product, and  
3. Repair instructions and/or specific problems  
relative to the product.  
3. Repair instructions and/or specific  
problems relative to the product.  
OMEGA’s policy is to make running changes, not model changes, whenever an improvement is possible.  
This affords our customers the latest in technology and engineering.  
OMEGA is a registered trademark of OMEGA ENGINEERING, INC.  
© Copyright 2001 OMEGA ENGINEERING, INC. All rights reserved. This document may not be copied, photo-  
copied, reproduced, translated, or reduced to any electronic medium or machine-readable form, in whole or in part,  
without the prior written consent of OMEGA ENGINEERING, INC.  
50  
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Where Do I Find Everything I Need for  
Process Measurement and Control?  
OMEGA…Of Course!  
TEMPERATURE  
Thermocouple, RTD & Thermistor Probes, Connectors, Panels & Assemblies  
Wire: Thermocouple, RTD & Thermistor  
Calibrators & Ice Point References  
Recorders, Controllers & Process Monitors  
Infrared Pyrometers  
PRESSURE, STRAIN AND FORCE  
Transducers & Strain Gages  
Load Cells & Pressure Gages  
Displacement Transducers  
Instrumentation & Accessories  
FLOW/LEVEL  
Rotameters, Gas Mass Flow Meter & Flow Computers  
Air Velocity Indicators  
Turbine/Paddlewheel Systems  
Totalizers & Batch Controllers  
pH/CONDUCTIVITY  
pH Electrodes, Testers & Accessories  
Benchtop/Laboratory Meters  
Controllers, Calibrators, Simulators & Pumps  
Industrial pH & Conductivity Equipment  
DATA ACQUISITION  
Data Acquisition & Engineering Software  
Communications-Based Acquisition Systems  
Plug-in Cards for Apple, IBM & Compatibles  
Datalogging Systems  
Recorders, Printers & Plotters  
HEATERS  
Heating Cable  
Cartridge & Strip Heaters  
Immersion & Band Heaters  
Flexible Heaters  
Laboratory Heaters  
ENVIRONMENTAL  
MONITORING AND CONTROL  
Metering & Control Instrumentation  
Refractometers  
Pumps & Tubing  
Air, Soil & Water Monitors  
Industrial Water & Wastewater Treatment  
pH, Conductivity & Dissolved Oxygen Instruments  
M-4651/0508  
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