7O
Agilent 10737L and Agilent 10737R
Compact Three-Axis Interferometers
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Description
•
The corner cube assembly. This assembly is factory-aligned to
produce the required beam pattern. Do not remove the corner cube
assembly or loosen the screws holding the assembly in place.
Moving this assembly will change the output beam pattern.
1
Corner cube assembly
(Do not loosen or remove)
2
3
4
5
Reference mirror or high stability adapter
Plane mirror converter
Polarizing beam splitter
Shear plate assembly
(Do not loosen or remove)
6
7
Receiver assembly
4-40 socket-head cap screws
attaching receiver assembly
6
5
1
2
4
4
5
L
0 3
7
R
1 0
E
6
T
E
M
O
R
1
E
F
R
E
F
1
R
0
E
7
3
T
N
I
7
L
S I
3
X A -
1 0 7 3 7
1
0
R
7
3
7
7
L
3
-
X
I
S
I
N
T
E
R
R
F
E
T
E
E
R
F
M
E
O
R
3
3
7
2
Figure 7O-1. Agilent 10737L Compact Three-axis Interferometer
User’s Manual
7O-3
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Description
L
R
E
1 0 7 3 7
T
E
M
O
R
E
F
R
E
F
1
R
0
E
7
3
T
N
I
7
L
S I
3
X A -
To
M
easu
r
e
m
e
n
t
Mirror
S
ee
S
ee
A
O
x
u
i
s
#2
t
V
i
ew
A
tpu
V
i
ew
B
A
O
x
u
i
s
#1
t
tpu
A
x
is
#2
A
xis #1
A
x
i
s
#3
A
O
x
u
i
s
#3
t
=
P
r
i
m
a
r
y
m
eas
u
r
e
m
e
n
t
beam
tpu
=
=
M
eas
u
r
e
m
e
n
t
Point
I
nput f
o
r
all
A
xes
Second
a
r
y
m
ease
m
e
n
t
beam
V
i
e
M
w
E
A
N
V
i
e
w
B
INPUT FACE
ME
A
S
URE
T FAC
E
Figure 7O-2. Agilent 10737L Compact Three-Axis Interferometer
7O-4
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Description
1 0 7 3 7 R
1
0
7
3
7
R
3
-
X
I
S
I
N
T
E
R
R
E
F
T
E
E
R
M
F
O R E
To
M
easu
r
e
m
e
n
t
Mirror
See
V
i
ew
B
See
V
i
ew
A
A
O
x
u
i
s
#2
t
tpu
A
O
x
u
i
s
#1
t
tpu
A
x
i
s
#2
#3
A
x
is
#1
A
xis
A
O
x
u
i
s
#3
t
tpu
=
Pr
i
m
a
r
y
m
easu
r
e
m
e
n
t
beam
=
=
M
eas
u
r
e
m
e
n
t
P
oin
t
I
nput f
o
r
all
A
xes
Second
a
r
y
m
eas
u
r
e
m
e
n
t
beam
V
i
e
w
A
T FAC
V
i
e
w
B
MEASUREMENT FACE
I
N
P
U
E
Figure 7O-3. Agilent 10737R Compact Three-Axis Interferometer
User’s Manual
7O-5
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Description
Ap p lica tion s
Gen er a l
The Agilent 10737L or Agilent 10737R interferometer, by making
three simultaneous distance measurements along or parallel to the
X-axis, can make these measurements:
•
•
•
displacement along the X-axis
rotation (pitch) about the Y-axis
rotation (yaw) about the Z-axis
The angular measurements made by either of these interferometers
can be calculated by taking the arctangent of the difference between
two linear measurements involved, divided by their separation:
(Y – Y’)
THETA = arctan -------------------
D
This method for determining angle is described in more detail in the
“Electronic yaw calculation method” and “Optical yaw calculation
method” subsections under the “Three-axis system using discrete plane
mirror interferometers (X, Y, YAW)” section in Chapter 3, “System
Design Considerations,” of this manual.
X-Y Sta ge
These interferometers are well suited for X-Y stage or multiaxis
applications, such as lithography equipment. Two of these
interferometers, can measure all X, Y, pitch, roll, and yaw motions of a
stage. Since only five axes are required to make all these
measurements, the sixth axis can be used as a redundant yaw
measurement (useful for mirror mapping). In these applications, the
measurement mirrors are attached to the X-Y stage.
7O-6
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Description
MEASUREMENT USING AGILENT 10737R/L COMPACT
THREE-AXIS INTERFEROMETERS
Laser Head
Beam
Directing
Optics
To Fiber Optics
Receivers
Agilent 10737L
Compact Three-axis
Interferometer
To Fiber Optics
Receivers
Agilent 10737R
Compact Three-axis
Interferometer
Multiaxis
Stage
Figure 7O-4. Measurement using two Agilent 10737R interferometers
Op tica l Sch em a tics
Optical schematics for these interferometers are given in Figure 7O-5.
Each interferometer functions similarly to three parallel
Agilent 10706B High Stability Plane Mirror interferometers with a
three-way beam splitter in front of them.
To reduce thermal drift errors, the measurement and reference beam
paths have the same optical path length in glass. This minimizes
measurement errors due to temperature changes in the interferometer.
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Description
MEASUREMENT PATH (f )
B
Agilent 10737L and Agilent 10737R
R
eference
irror
Compact Three-Axis Interferometers
M
f
B
F
L
rom
aser
Axis #2
Axis #3
Axis #1
Axis #1 = f 2∆f
B
Axis #2 = f 2∆f
1
2
3
B
Axis #3 = f
2
f
∆
B
λ/
4
Plate
NOTE: Because the Measurement
mirror may have a combination of
displacement, pitch, and yaw motions,
the Measurement Axes may have
different Df values, as shown
M
M
eas
i
u
r
re
me
nt
rr
o
REFERENCE PATH (f )
A
Agilent 10737L and Agilent 10737R
Compact Three-Axis Interferometers
R
eference
M
irror
f
A
F
rom
Axis #2
Axis #3
Axis #1
Laser
Axis #1 = f
Axis #2 = f
Axis #3 = f
A
A
A
λ/
4
P
la
t
e
M
M
eas
i
u
r
rement
rr
o
COMPOSITE (f ) and (f )
A
B
Agilent 10737L and Agilent 10737R
Compact Three-Axis Interferometers
R
e
M
f
e
r
e
n
irror
ce
f
B
F
rom
Axis #2
Axis #3
Axis #1
Laser
f
f
f
Axis #1 = f 2∆f
A
A
B
Axis #2 = f 2∆f
1,
2,
3,
B
λ/
4
Plate
Axis #3 = f
2
f
∆
A
B
M
M
eas
i
u
r
re
me
nt
rr
o
LEGEND
=
f
=
f
=
f
a
nd
f
A
B
A
B
=
Rounded corners are used to help you trace paths.
Figure 7O-5. Agilent 10737L/R Compact Three-Axis interferometers — beam paths
7O-8 User’s Manual
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Special Considerations
Special Considerations
La ser bea m p ow er con sid er a tion
When working with an application that requires use of a separate
beam splitter, make sure that you provide enough laser beam power to
any multiaxis interferometer so all receivers connected to it receive
adequate light power. This will help ensure that each measurement
receiver in the system receives the optimum signal strength in the
intended application.
Or ien t a tion
Note that although illustrations may show an interferometer in one
orientation, you may orient the unit as required by your measurement
application—vertically, horizontally, or upside-down.
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Special Considerations
AGILENT 10737L THREE-AXIS INTERFEROMETER
14.38 mm
(0.566)
68.92
(2.71)
Axis No.1
Output
7.19 mm
(0.283)
Axis No.2
Output
MP2
See
Note 1
MP1
See Note 1
7.19 mm
(0.283)
Input for
all axes
FROM
LASER
HEAD
10.11 mm
(0.39)
24.49 mm
(0.964)
Axis No.3
Output
MP3
See Notes 1 & 2
20.90 mm
(0.83)
17.3 mm
(0.68)
Laser Beam turns left
(viewed from top).
R
GENERAL NOTES:
1. For Each Axis:
Secondary Measurement beam
MP = Measurement Point
Darker Beam
Indicates
Primary Measurement beam
2. Drawing not to scale.
From
Laser Head
Figure 7O-6A. Agilent 10737L Interferometer — beam patterns
7O-10
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Special Considerations
Axis No.2
Output
14.38 mm
(0.566)
68.92
(2.71)
Input for
all axes
7.19 mm
(0.283)
MP1
See Note 1
Axis No.1
Output
MP2
See Note 1
7.19 mm
(0.283)
FROM
LASER
HEAD
Axis No.3
Output
24.49 mm
(0.964)
10.11 mm
(0.39)
MP3
See
Notes 1 & 2
17.3 mm
(0.68)
20.90 mm
(0.83)
Laser Beam turns right
(viewed from top).
GENERAL NOTES:
1. For Each Axis:
Secondary Measurement beam
MP = Measurement Point
R
Darker Beam
Indicates
Primary Measurement beam
2. Drawing not to scale.
From
Laser Head
Figure 7O-6B. Agilent 10737R Interferometer—beam patterns
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Mounting
Mounting
Ad ju st a ble m ou n ts
The Agilent 10711A Adjustable Mount provides a convenient means of
mounting, aligning, and securely locking an Agilent 10737L or
Agilent 10737R interferometer in position. Since the mount allows
some tilt and yaw adjustment, the need for custom fixturing is
minimized. The mount allows the interferometer to be rotated about its
physical centerline, simplifying installation. Note however, that since
the input aperture is not centered on the input face, some translation
of the interferometer or beam delivery optics may be required when the
interferometer is rotated.
F a sten er s
The Agilent 10737L/R interferometers are supplied with English
mounting hardware, which is required to fasten it to its adjustable
mount.
7O-12
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Installation and Alignment
Installation and Alignment
Su m m a r y
The installation and alignment procedure has two major parts:
•
•
Planning and setting up the laser beam path(s)
Installing and aligning the interferometer(s).
Objectives of the installation and alignment procedure are:
1. Minimizing cosine error.
2. Maximizing signal strength at the receivers.
3. Ensuring a symmetrical range of rotation about the zero angle
point.
Gen er a l
Refer to the Agilent 10706A interferometer “Installation” information
in subchapter 7C of this manual.
Tools a n d Equ ip m en t Req u ir ed or Recom m en d ed
Table 7O-1 lists and describes the tools and equipment needed to
install and align the Agilent 10737L and 10737R interferometers.
User’s Manual
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Installation and Alignment
Table 7O-1. Tools and Equipment Required or Recommended
Item and Description
Mfr. Part Number (Mfr =
Agilent unless otherwise
indicated)
Comment, Note, etc.
Penta prism or similar prism that bends Prisms of this type are available Recommended, but not required.
light exactly 90 degrees
from scientific or optical supply
shops
For setting up right angles in the
beam paths from the laser head to the
interferometers.
An Agilent 10777A Optical Square
may be used.
True square
L.S. Starret, Athol, Mass.
Recommended, but not required.
For setting up beam paths parallel to
or perpendicular to machine surfaces
that are parallel to or perpendicular to
the stage mirrors.
Washer, lock, 0.115 in id, 0.270 in od,
internal tooth; qty = 6
2190-0004
2940-0269
Supplied with Agilent 10737L/R
Interferometer.
Screw, cap, 4-40, 0.500 in lg, hex trim
head 0.187 in (3/16 in) across flats; qty =
2
Supplied with Agilent 10737L/R
Interferometer.
Screw, machine, 4-40, 1.75 in lg, pan
head, pozidriv; qty = 6
2200-0127
3030-0253
Supplied with Agilent 10737L/R
Interferometer.
Screw, socket head cap, 4-40, 0.250 in
lg, hex recess 0.094 in (3/32 in) across
flats; qty = 2
Supplied with Agilent 10737L/R
Interferometer.
Screw, socket head cap, 2-56, 0.187 in
lg, 0.064 in radius oval point, hex recess;
qty = 2
3030-0983
Supplied with Agilent 10737L/R
Interferometer.
Hex key, 5/64 in (0.078–in)
Hex key, 3/32-in (0.094 in)
Wrench, 3/16-in open-end
8710-0865
8710-0896
8710-1740
Supplied with Agilent 10737L/R
Interferometer.
Supplied with Agilent 10737L/R
Interferometer.
Supplied with Agilent 10737L/R
Interferometer.
Used to secure the Agilent 10711A
Adjustable Mount.
Alignment Aid
Alignment Aid
10706-60001
10706-60202
Supplied with the Agilent 10737L/R
Interferometer.
See Figure 7O-7 for illustration.
Supplied with the Agilent 10737L/R
Interferometer.
See Figure 7O-7 for illustration.
7O-14
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Installation and Alignment
Alignment aid (Agilent Part Number 10706-60001) is the same as one
used on the Agilent 10706B Plane Mirror Interferometer. Refer to the
“Alignment aids” section for the Agilent 10706B Plane Mirror
Interferometer, in subchapter 7C of this manual for a further
discussion of its use.
Alignment aid (Agilent Part Number 10706-60202), shown in
Figure 7O-7, facilitates autoreflection alignment for the high stability
adapter to achieve minimal thermal drift. It contains a quarter-wave
plate which allows the reference beam to return to the laser head
without offset. Figure 7O-10 illustrates how the aid is positioned
between the beam splitter and the high stability adapter during
alignment.
Alignment Aid
Insert between Beam Splitter
and High Stability reflector
during autoreflection.
RGET
TA
REMOVE
ER ALIGNING
AFT
logies
Agilent Techno
P/N 10706-60202
Alignment Aid
P/N 10706-60001
Alignment Aid
P/N 10706-60202
Figure 7O-7. Agilent 10737L/R interferometers—alignment aids
User’s Manual
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Procedure
Procedure
P la n n in g th e m ea su r em en t setu p
Determine the general plan for your measurement. Examples of
measurement setups are given throughout this manual. Particularly,
your plan should address:
1. Which axes you want to measure, and what measurements you
want to make,
2. Where the interferometers will be positioned with respect to the
stage mirrors,
3. Where the laser head will be positioned and how the laser beam
will be delivered to the interferometers, and
4. Making sure you will have enough laser power to drive all receivers
in your measurement system.
Good practice defines the plane and direction of all beam paths against
machined surfaces known to be parallel or perpendicular to the stage
plane.
You may need to provide special mounting arrangements for the laser
head and the optics in order to place the measurement beams where
you want them on the stage mirrors.
In itia l in sta lla tion a n d setu p
1
Install the laser head, the beam-steering optics, and the beam-splitting
optics in their general locations, as specified in your plan. The
interferometer(s) will be installed after the beam paths have been
established as described below.
2
3
Turn on power to the laser head and select the laser head’s small
output aperture.
Refer to Chapter 4, “System Installation and Alignment,” in this
manual, beginning with the “Alignment principles” section, for
additional information about aligning your measurement setup.
7O-16
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Procedure
In sta llin g a n d a lign in g a n in ter fer om eter
CAUTION
CAUTION
In performing the procedure below, perform only the removal,
disassembly or assembly steps described. Do not remove or take apart
anything you are not instructed to. Do not touch any glass surface or
allow it to be scratched, dirtied or otherwise harmed.
Do not touch any glass surface of any optic. For cleaning instructions,
see Chapter 10, “Maintenance,” in this manual.
Perform this procedure for each interferometer in your measurement
system.
This procedure assumes that the laser head and all optics except the
interferometer(s) have been installed and that the appropriate beam
path(s) to the stage mirror(s) have been established as described in
Chapter 4, “System Installation and Alignment,” of this manual.
The procedure has these major parts:
1. Removing the receiver assembly
2. Removing the high stability adapter (reference mirror)
3. Aligning the measurement beam path
4. Aligning the reference beam path
5. Comparing beam path alignments
Rem ovin g th e r eceiver a ssem bly
To remove the receiver assembly, refer to figures 7O-1 and 7O-8.
1
2
Use the 5/64-inch hex key to remove the two cap screws that hold the
receiver assembly to the interferometer. Set the screws in a clean, safe
place where they will not be lost.
Remove the receiver assembly from the interferometer. Set the receiver
assembly in a clean, safe place.
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Procedure
Rem ovin g th e h igh sta bility a d a pter (r efer en ce m ir r or )
To remove the high stability adapter, refer to figures 7O-1 and 7O-8,
and:
1
2
Use the 5/64-inch hex key to remove the two cap screws with springs
that hold the high stability adapter (reference mirror) to the
interferometer. Set the screws in a clean, safe place where they will not
be lost.
Remove the high stability adapter (reference mirror) from the
interferometer. Set the high stability adapter in a clean, safe place.
Input
Beam
1
0
1 0 7 3 7 L
0
7
3
7
3
7
7
L
L
3
-
A
X
I
S
I
N
T
E
R
R
F
E
T
E
E
R
F
M
E
O R
Center on One
Measurement Beam
Alignment Aid 10706-60001
Measurement
Beam
Figure 7O-8. Agilent 10737L Compact Three-Axis Interferometer with
Agilent 10706-60001 Alignment Aid
NOTE
From here on, this procedure assumes that the interferometer is
installed on an Agilent adjustable mount.
7O-18
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Procedure
Align in g th e m ea su r em en t bea m pa th
1
2
3
Remove the receiver assembly and high stability adapter, as described
in the respective procedures, above.
Install the interferometer so the beam from the laser source enters its
input aperture and is normal to its input face.
Set the alignment aid (Agilent Part Number 10706-60001) on the
interferometer’s Measurement beam aperture as shown in
Figure 7O-8.
With the alignment aid installed, the beam will be reflected off the
stage mirror back to the laser head.
4
5
Set the laser head to the small aperture.
Roll and yaw the interferometer until the autoreflected beam is
centered on the small aperture of the laser.
6
Select the laser head’s large output aperture and translate the
interferometer horizontally until the input beam is centered on the
interferometer’s input aperture.
A piece of translucent tape over the interferometer’s input aperture
will make the input beam visible. This procedure assumes that the
vertical height of the beam was set before the interferometer was
installed, (see the “Initial installation and setup” procedure);
alternatively, fixturing for a vertical adjustment for the interferometer
may be used.
7
8
9
Select the laser head’s small output aperture and check that the beam
is still autoreflecting.
Repeat steps 3 through 7 until the beam is both autoreflecting and
centered on the interferometer's input aperture.
Tighten all mount adjustment screws.
10 Remove the alignment aid.
11 Check the position of the beams in the interferometer’s output
apertures (see Figure 7O-9).
Once again, translucent tape is helpful for viewing the beams in the
apertures. If any beam clipping occurs, or if the beams are far off from
the desired location, check for obstructions and recheck the alignment
(by performing steps 3 through 7 above).
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Procedure
Figure 7O-9. Agilent 10737L Compact Three-Axis Interferometer —
return beam pattern
12 Install the receiver assembly.
To do this, reverse the “Removing the receiver assembly” procedure,
above.
13 Plug in the fiber-optic cables.
14 Adjust each receiver’s gain by turning its gain adjustment screw to
cause the receiver’s LED to light, then reduce the gain until the LED
just turns off. For more information, see Agilent 10780F instructions in
Chapter 8, “Receivers,” of this manual.
7O-20
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Procedure
Align in g th e r efer en ce bea m pa th
NOTE
The measurement path must be aligned and the laser beam centered
on the input aperture before aligning the reference mirror.
1
Remove the receiver assembly and the plane mirror converter (see
figures 7O-1 and 7O-4), and set aside on a clean surface. Do not touch
any glass surface of any optic.
7 L
R
3
E
T
1 0 7
E
M
O
R
E
F
R
E
F
1
R
0
E
7
T
3
7
N
I
L
S I
3
X A -
Input
Beam
Alignment Aid
10706-60202
Figure 7O-10. Agilent 10737L Compact Three-Axis Interferometer
with 10706-60202 Alignment Aid
2
3
Install the reference mirror assembly (see figures 7O-1 and 7O-4).
The 4-40 screws on springs hold the mirror in place. The four 2-56
screws tilt the mirror for alignment. Back off the 2-56 screws so the
mirror housing is flush with the interferometer. Tighten the
4-40 screws to compress the springs completely and then back off
approximately 1-1/2 turns.
Place the 10706-60202 alignment aid between the beam splitting cube
and the reference mirror (see Figure 7O-10).
4
5
Block the beams going to the stage mirror.
Set the laser to the small aperture.
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Procedure
6
Tilt the reference mirror by adjusting the 2-56 screws until the beam
from the reference mirror autoreflects back to the center of the laser
small aperture.
7
8
Remove the alignment aid.
Check the position of the beams in the interferometer’s output
apertures (see Figure 7O-9).
Once again, translucent tape is helpful for viewing the beams in the
apertures. If any beam clipping occurs, or if the beams are far off from
the desired location, check for obstructions and recheck the alignment
(by performing steps 6 through 10 above).
9
Install the receiver assembly.
To do this, reverse the “Removing the receiver assembly” procedure,
above.
10 Plug in the fiber-optic cables.
11 Adjust each receiver’s gain by turning its gain adjustment screw to
cause the receiver’s LED to light, then reduce the gain until the LED
just turns off. For more information, see Agilent 10780F instructions in
Chapter, 8, “Receivers,” of this manual.
12 Unblock the stage mirror beams.
Com pa r in g bea m pa th a lign m en ts
1
2
Remove the receiver assembly.
Look for any lack of overlap between the reference and measurement
return beams, translucent tape will help. If beams do not overlap,
check reference mirror alignment.
Note that if you must realign the measurement mirror, you will also
have to realign the reference mirror.
3
Install the receiver assembly and make sure all screws are tight.
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Operation
Operation
Mea su r em en ts
For an interferometer setup to measure distances along the X-axis,
measurements of displacement, pitch, and yaw are derived as
described below. These computations are done via software on the
system controller or computer.
Disp la cem en t
For the Agilent 10737L/R interferometer, displacement along the
X-axis can be measured as the average of the data returned from
measurement axis #1 and measurement axis #2.
measurement axis #1 + measurement axis #2
Displacement = ---------------------------------------------------------------------------------------------------------------
2
P itch
For the Agilent 10737L/R interferometer, pitch (rotation about the Y
axis) can be measured using data returned from all three measurement
axes, and the vertical offset between the common centerline of
measurement axes #1 and #2 and the centerline of measurement
axis #3 (7.19 mm, or 0.283 inch).
Displacement – measurement axis #3
--------------------------------------------------------------------------------------------------
Pitch =
radian
7.19 mm or 2.83inch
Ya w
For the Agilent 10737L/R interferometer, yaw (rotation about the
Z axis) can be measured as the difference between the data returned
from measurement axis #1 and measurement axis #2, divided by the
distance between them (14.38 mm, or 0.566 inch).
measurement axis #1 – measurement axis #3
---------------------------------------------------------------------------------------------------------------------
Yaw =
radian
14.38 mm or 0.5666 inch
Er r or
The deadpath distance for an Agilent 10737L/R interferometer is the
distance between the interferometer’s measurement face and the
measurement mirror, at the measurement “zero” position. This is the
same as for the Agilent 10706B interferometer, on which it is based.
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Specifications and Characteristics
Specifications and Characteristics
Specifications describe the device’s warranted performance.
Supplemental characteristics (indicated by TYPICAL or NOMINAL)
are intended to provide non-warranted performance information useful
in applying the device.
Plane mirror systems have a fundamental optical resolution of one
quarter wavelength (0.158 micron, 6.23 microinches).
Using electronic resolution extension, the system resolution is
increased significantly. Depending on the system, an additional
resolution extension factor of 32 (for Agilent 10885A and 10895A) or
256 (for Agilent 10897B and 10898A) is usually available.
Interferometer
Fundamental Optical
Resolution
System Resolution (see
NOTE)
Agilent 10737L or Agilent 10737R λ/4 (158.2 nm, 6.2 µin)
See specifications on
following page.
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Specifications and Characteristics
Agilen t 10737L/R Com p a ct Th r ee-Axis In ter fer om et er
Sp ecifica tion s
Linear Resolution:
5 nm (using Agilent 10885A, or Agilent 10895A electronics)
0.6 nm (using Agilent 10897A, or Agilent 10898A electronics)
Yaw Resolution:
0.35 µrad (0.07 arc-sec) (using Agilent 10885A, or Agilent 10895A electronics)
0.04 µrad (0.01 arc-sec) (using Agilent 10897A, or Agilent 10898A electronics)
Pitch and Roll Resolution: 0.7 µrad (0.14 arc-sec) (using Agilent 10885A, or Agilent 10895A electronics)
0.1 µrad (0.02 arc-sec) (using Agilent 10897A, or Agilent 10898A electronics)
*
Yaw Range :
0.44 mrad ( 1.5 arc-min)
Pitch and Roll Range:
Linear Range:
0.44 mrad ( 1.5 arc-min)
10 m (33 ft) total for all three axes.
0–40 °C (17–23 °C to ensure system non-linearity specification)
Same as Agilent 10706B
Operating Temperature:
Thermal Drift Coefficient:
Weight:
490 g (18 oz)
Dimensions:
see Figure 7O-11 on the next page
Materials Used:
Housing: stainless steel and aluminum
Optics: optical grade glass
Adhesives: vacuum grade, cyanoacrylate polarizer material
Receiver inserts: urethane foam, acetal, 15% glass fill polyester
Installation:
Uses 3-mm beam available from Agilen 5517C-003. Requires three
Agilent 10780F-037 Remote Receivers. Compatible with Agilent 10711A
Adjustable Mount.
Measurement (Plane) Mirror Reflectance: 98% at 633 nm at normal incidence
Recommendations:
Flatness: Flatness deviations will appear as measurement errors when the mirror
is scanned perpendicular to the beam. Recommended range 1/4 (0.16 µm or 6 µin)
to 1/20 (0.03 µm or 1.2 µin) dependent on accuracy requirements.
Optical Surface Quality:
60-40 per Mil 0-13830
* At a distance of 300 mm, maximum measurement mirror angle due to all components (i.e., yaw and pitch or yaw
and roll) between the measurement mirror and the interferometer. A six-axis system is assumed.
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Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
Interferometers
Specifications and Characteristics
32 mm
(1.26)
3 x Fiber-Optic
Connectors
for Agilent 10780F-037
1 0 7 0 3 L
Receivers
32 mm
(1.26)
From Laser
3.0 mm
(0.12)
4x Drilled For Clearance
of 4-40 Screw and tapped
6-32 UNC-2B ∞ .250 deep
4x this side and 4x far side.
66 mm
(2.6)
To Plane Mirror
64.1 mm
(2.53)
125 mm
(4.92)
7.19 mm
(0.283)
38.2 mm
(1.50)
22.63 mm
(0.891)
17.3 mm
(0.68)
7.19 mm
(0.283)
7.19 mm
(0.283)
17.3 mm
(0.68)
7.19 mm
(0.283)
Input
Aperture
82 mm
(3.22)
Agilent 10737L interferometer is shown; Agilent 10737R interferometer dimensions are similar.
Figure 7O-11. Agilent 10737L/R Compact Three-Axis Interferometer — dimensions
Product specifications and descriptions in this
document subject to change without notice.
Copyright (C) 2002 Agilent Technologies
Printed in U.S.A. 07/02
This is a chapter from the manual titled:
Laser and Optics User's Manual
For complete manual, order:
Paper version: p/n 05517-90045
CD version: p/n 05517-90063
This chapter is p/n 05517-90122
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